Production and test of Si sensors for W-Si sandwich calorimeter

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Presentation transcript:

Production and test of Si sensors for W-Si sandwich calorimeter M.G.Song, M.W.Kim, J.H.Kang, Y.Kwon ( Yonsei Univ. ALICE Group) together with PHENIX FOCAL efforts HIM 2009-09, Pohang

Contents Introduction to W-Si sandwich calorimeter Sensor production Design Fabrication Packaging Signal conditioning Sensor test Cosmic test Beam test Summary HIM 2009-09, Pohang

W-Si sandwich calorimeter, Basics EM Shower in a typical prototype 15mm, RM 20cm,  20X0,  1λ HIM 2009-09, Pohang

W-Si sandwich calorimeter, Basics EM Shower in a typical prototype HIM 2009-09, Pohang

Detector schematics HIM 2009-09, Pohang

W-Si sandwich calorimeter, Basics Ideal for EM signal (, e, 0) under forward high multiplicity Compact EM shower inside calorimeter (W) 3D tracking under large background possible though Si layers (Si) Easy adjustment of the detector granule (Si) Good energy resolution (W-Si) Expensive (Si), but we(Korea) can do well. HIM 2009-09, Pohang

Sensor production Sensor production 6.2 cm x 6.2 cm n type wafer substrate and p type pattern 4 x 4 (1.5cm each) pad : 16 channel per sensor HIM 2009-09, Pohang

Fabrication Mask production ETRI Production Optical Electron lithography ETRI Production Lithography Developing Implantation Etching HIM 2009-09, Pohang

Packaging Micro module production Ceramic spacer INTC(Inter connect) board Silicon Sensor Cu foil epoxy plate HIM 2009-09, Pohang

Components for micro-module Ceramic spacer Protection from warping and heat INTC(Inter connect) board Electrical connection to sensor Silicon Sensor Cu foil Connection of sensor back plane to ground Epoxy plate Electrical and physical protection These are components for micro-module. This one is a silicon sensor which is the most important part of a micro-module. On the front of sensor, INTC board is attached. In this board, there are some RC components to connect to sensor electrically. Below the sensor, Cu foil is used to connect sensor back plane with ground. Cu foil INTC board are used for electrical connection. Ceramic spacer and Epoxy plate are used for electrical and physical protection. Especically, ceramic spacer locates between INCT board and carrier board, so it protect both boards from electrical connection and heat. Yonsei Nuclear Physics Lab.

Signal conditioning HIM 2009-09, Pohang

Cosmic muon test Most electrons passing a sensor layer are MIPs, which deposit minimum ionization energy as like cosmic muon. Cosmic test requires a setup of test electronics made up of silicon sensor, preamp hybrid card, test board, and bridge board. HIM 2009-09, Pohang

Cosmic muon test HIM 2009-09, Pohang

Cosmic muon test HIM 2009-09, Pohang

HIM 2009-09, Pohang

Beam test at CERN Beam test had been taken 09.06.22~29 at PS and SPS 4 Sensor were used for each layer, and a super module had 7 W-Si layers. HIM 2009-09, Pohang

Beam test setup HIM 2009-09, Pohang

HIM 2009-09, Pohang

HIM 2009-09, Pohang

Summary W-Si calorimeter can effectively measure EM signal under large multiplicity Si sensor plays a key roll in the function We are conducting production & test of the Si sensors and see a good prospect HIM 2009-09, Pohang