Aileen O’Mahony, Anil Mane, Jeff Elam 1/21/2014 ALD Update Aileen O’Mahony, Anil Mane, Jeff Elam 1/21/2014

As-ground MCPs 450 MΩ dummy 410 MΩ 400 MΩ Dummy 350 MΩ 280 MΩ 300 MΩ 310 MΩ 460 MΩ 530 MΩ 380 MΩ Precursor inlet Outlet Precursor flow 17 as-ground wax free MCPs coated in single batch using a MCP holder fabricated by UCB. (Many thanks to UCB team) These had degased for 3days @ UCB. MCPs splits into ALO passivated (20nm) and non passivated

As-ground MCPs 17 as-ground MCPs coated in one batch MCP ID R (Mohm) post-anneal 20 nm ALO pass. 1211113 MCP1, position1 450 20 nm ALO pass. 1211113 MCP2, position 3 400 20 nm ALO pass. 1211113 MCP3, position 5 530 20 nm ALO pass. 1211113 MCP4, position 8 280 20 nm ALO pass. 1211113 MCP5, position 13 20 nm ALO pass. 1211113 MCP6, position 18 300 20 nm ALO pass. 1211113 MCP7, position 2 20 nm ALO pass. 1211113 MCP8, position 23 310 20 nm ALO pass. 1211113 MCP9, position 4 460 No ALO pass. Position 10 380 No ALO pass. Position 15 No ALO pass. Position 16 No ALO pass. Position 20 410 No ALO pass. Position 21 No ALO pass. Position 22 350 No ALO pass. Position 24 No ALO pass. Position 25 MCPs are sent to UCB for testing, 4 pairs will be back to UoC (Matt for Cs study)

Grid Spacers 8”x8” mm grid spacer coated with Chem1 (for Andrey). Annealed at 400C in Beneq After R measurements 6 cm grid spacers to be coated once R measured (for Bob) More 8” 2mm GS will be coated