Thermal Micro-actuators for Out-of-plane Motion Brian Patrick Trease The University of Michigan Department of Mechanical Engineering Sandia National Laboratories (Albuquerque, NM) Org. 01769 – MEMS Device Technologies Thomas Zipperian, Manager James Allen, Technical Advisor October 6, 2001 Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy under contract DE-AC04-94AL85000.

In the next 15 minutes …. Motivation – Adaptive Optics Background MEMS Thermal Actuators Prototype Testing Modeling New Designs

Adaptive Optics Uncorrected Corrected 250 kg/m2 Abberation correction required for optical systems Abberations Atmospheric Disturbances Physical Imperfections Uncorrected Corrected Applications Telescopes (on Earth and in space) Laser Systems Imagery and weapons 250 kg/m2

Basic Adaptive Optics System Deformable Mirror aberrated wavefront Micromirror Array Control requires high displacement and high resolution beam sampler imaging system control computer wavefront sensor

Background Microactuators and MEMS Out-of-Plane Actuators: Small features (1 mm) IC Fabrication Only 10 mm tall Flat structures Initially in-plane SUMMiT VTM Out-of-Plane Actuators: Pop-up mirrors Bent beams

Thermal Actuators Bimaterial Single Material (In-Plane) + V - Aluminum Bimaterial Single Material (In-Plane) Steel + V - Resistive Heating

Prototype Testing Promising Results! Probe Station Top View (SEM) Microscope Side View Chip with devices Promising Results!

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-- Convenience vs. Accuracy -- Actuator Models Analytical Model Finite Element Analysis (FEA) current T0 T1 T2 i Computers solve complex structures by breaking them down into simple elements Bending via Force Method -- Convenience vs. Accuracy --

New Designs 0 (a) (b)

The Future Fabrication Physical Testing Select and Modify Best Designs SUMMiT VTM Process Physical Testing Validation and Modification of Models Select and Modify Best Designs

The University of Michigan Compliant Systems Design Laboratory Thank You! Brian Patrick Trease The University of Michigan Compliant Systems Design Laboratory trease@asme.org Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company for the United States Department of Energy under Contract DE-AC04-94AL85000.