Deposit latex particles onto silicon substrate

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Presentation transcript:

Procedure for Particle Lithography and Chemical Vapor Deposition of Organosilane SAMs Deposit latex particles onto silicon substrate Dry latex templates under ambient conditions Form self-assembled monolayers of silanes via chemical vapor deposition Remove latex particles by rinsing surface

Structure of alkylsilane SAMs H2O 1 2 1. Hydrolysis 3 -H2O 2. Adsorption 3. Condensation head group linker Si-O linkage Si/SiO2 substrate Structure of alkylsilane SAMs

Topography Phase 100 nm Topography Phase 300 nm Tapping Mode AFM images of 2-[Methoxy(polyethyleneoxy)propyl]trichlorosilane (PEG) prepared via Particle Lithography and Chemical Vapor Deposition