North America Liquid Chemicals Committee Liaison Report December 1st, 2011 NA LChem Report - December 2011

Outline Task Force & Leadership Changes New SNARF Organization Chart Meeting Information Ballot Results Upcoming Ballots Task Force Reports Upcoming Meeting Schedule NA LChem Report - December 2011

Task Force and Leadership Changes New TFOF SEMI F39 (Chemical Blending Systems) & F41(Chemical Distribution System) Rewrite TF Leaders David Kandiyeli (Ichor Systems) Koh Murai (Ichor Systems) TF will also include re-write of F31 (Bulk Chemical Distribution Systems) NA LChem Report - December 2011

New SNARFs Doc. 5354, Revision to SEMI C47-0706, Guideline for Trans 1, 2 Dichloroethylene Doc. 5355, Revision to SEMI C48-0706, Specification and Guideline for 1,1,1-Trichloroethane, Furnace Grade Doc. 5356, Revision to SEMI C51-0706, Specifications and Guidelines for Xylenes NA LChem Report - December 2011

Leadership Committee Co-chairs Frank Flowers / FMC Frank Parker / ICL NA LChem Report - December 2011

Current Committee Structure NA LChem Report - December 2011

Meeting Information Last meeting Next meeting October 25 for NA Fall 2011 Meetings San Jose, California Next meeting April 3 for NA Spring 2012 Meetings San Jose, California NA LChem Report - December 2011

Document Review Summary Cycles 6 [1/2] Document Title Committee Action 4555A Revision to SEMI F57-0301 With Title Change To: Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems Passed as balloted 5189 Revision to SEMI F104-1107 With Title Change To: Particle Test Method Guide for Evaluation of Components Used In Ultrapure Water and Liquid Chemical Distribution Systems Passed as balloted. 5190A Revision to SEMI C22-0306 With Title Change To: Guide for Boron Tribromide NA LChem Report - December 2011

Document Review Summary Cycles 6 [2/2] Document Title Committee Action 5192A Revision to SEMI C38-0306, With Title Change To: Guide for Phosphorus Oxychloride Passed as balloted. Superclean 5298 Revision of SEMI C25-0306, Specification for Dichloromethane (Methylene Chloride) Passed as balloted. 5299 Revision of SEMI C26 With Title Change To: Specification and Guide for Hexamethyldisilazane (HMDS) Failed and reballoted NA LChem Report - December 2011

Technical Ballots to be reviewed at NA Standards Spring 2012 Meetings [1/2] * Voting Period – Cycle 1&2 * Document # Document Title TF / SC 4543A Revision of SEMI C20-1101, Specification and Guidelines for Ammonium Fluoride 40% Analytical Methods TF 4544C Revision of SEMI C24-0301, Specification for n-Butyl Acetate 5299A Revision of SEMI C26-0306, Specification and Guideline for Hexamethyldisilazane (HMDS) 4547C Revision of SEMI C33-0301, Specifications for n-Methyl 2-Pyrrolidone 4957A Revision of SEMI C41-0705, Specifications and Guidelines for 2-Propanol NA LChem Report - December 2011

Technical Ballots to be reviewed at NA Standards Spring 2012 Meetings [2/2] * Voting Period – Cycle 1&2 * Document # Document Title TF / SC 5193 Revision of SEMI C46-0306, Guideline for 25% Tetramethylammonium Hydroxide Analytical Methods TF 5354 Revision of SEMI C47-0706, Guideline for Trans 1, 2 Dichloroethylene 5355 Revision of SEMI C48-0706, Specification and Guideline for 1,1,1-Trichloroethane, Furnace Grade 5356 Revision of SEMI C51-0706, Specifications and Guidelines for Xylenes NA LChem Report - December 2011

Task Force Updates Analytical Test Methods TF Statistical Methods TF Performing 5-year review on following standards C20 (Ammonium Fluoride), C24 (Butyl Acetate), C26 (HMDS), C33 (n-Methyl 2-Pyrrolidone), C41 (2-Propanol), C46 (Tetramethylammonium Hydroxide), C47 (Dichloroethylene), C48 (Trichloroethane), and C51 (Xylenes) Statistical Methods TF Topics of interest: Cross-calibration across counters (doc. 5105) Extrapolation to smaller particle sizes (doc. 5106) NA LChem Report - December 2011

Task Force Updates [continued] F57 Revision TF Ballot 4555A (F57 update) passed TC review. F104 Revision TF Ballot 5189 (F104 revision) updated more closely with F57 in terms of components cited in these documents. Ballot passed TC review. NA LChem Report - December 2011

Task Force Updates [continued] Polymer Surface Roughness TF Drafting doc. 4989, New Standard: Test Method for Determining Surface Roughness in Polymer Components Used in Ultrapure Water and Liquid Chemical Distribution Systems UPW Filtration Efficiency TF formed to address inaccuracy of optical particle counters measuring at very small sizes, specifically in high purity water. Draft ballot (#5188) in progress Round robin testing to start in August with ballot targeted for April 2012 NA LChem Report - December 2011

5-Year Review Documents The committee allowed the following F Standards to go into Inactive status: Standard Document Title SEMI F34 Guide for Liquid Chemical Pipe Labeling NA LChem Report - December 2011

Upcoming Meeting Schedule at SEMI Headquarters, San Jose, CA Monday, April 2 F104 Rewrite TF (1:00 PM to 2:00 PM) F39 & F41 Rewrite TF (2:00 PM to 3:00 PM) Polymer Surface Roughness TF (3:00 PM to 4:00 PM) UPW Filtration TF (4:00 PM to 5:00 PM) Tuesday, April 3 Statistical Methods TF (8:00 AM to 10:00 AM) Analytical Methods TF (10:00 AM to 12 Noon) Liquid Chemicals Committee (1:00 PM to 4:00 PM) NA LChem Report - December 2011

NA Standards Staff Changes Paul Trio Sr. Manager, NA Standards Operations Operations Committees: NARSC / I&C / ATE / MEMS / Microlithography, HB-LED / 3DS-IC Meetings & Events Planning General Information STEPS/Workshops and Sponsorships Kevin Nguyen Manager, NA Standards Committees Committees: Facilities / Gases / PV / PV Automation / PV Materials / Silicon Wafer / Traceability Standards Website Provisional: Contact Paul Trio (ptrio@semi.org) or Kevin Nguyen (knguyen@semi.org) Committees: Compounds Semiconductor Materials / EHS / FPD / Liquid Chemicals / Metrics / PIC Hiring of new NA Standards staff has been completed. Official announcement by the end of the month. NA LChem Report - December 2011

Thank You! NA LChem Report - December 2011