アトラスシリコン半導体飛跡検出器：ATLAS Silicon-strip Tracking Detector

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Presentation transcript:

アトラスシリコン半導体飛跡検出器：ATLAS Silicon-strip Tracking Detector SCT-v1, http://atlas.kek.jp/sub/poster/index.html アトラスシリコン半導体飛跡検出器：ATLAS Silicon-strip Tracking Detector ATLAS SCT Collaboration: Australia, Czech, Germany, Japan, Netherlands, Norway, Poland, Russia, Slovania, Spain, Sweden, Switzerland, UK, US, CERN Specifications (Barrel part only) Sensor: 8448 Sensors, 63.56 x 63.96x 0.285 mm3, p-in-n single sided strip pitch 80 mm, implant width 16-20 mm, total area = 34.4 m2 full depletion < 150V (initial), <350V (after 3x1014p/cm2) Module: 2112 modules, Stereo angle: 40 mrad TPG thermal conductor (UK), Flexible hybrid circuit (Japan) 12 ABCD chips (BiCMOS ASIC)/module, 1536 ch, 5000 bondings assembly accuracy < 5-1 mm control Cylinder: 4 cylinders, r = 30-52cm , |η|<1.4 Radiation: 3×1014 n/cm2 (10 years), Operating Temperature: -7C Fabrications: 2600 modules by 980 Japan, UK, US and Scandinavia 1996-2000 Testing of radiation hardness using KEK PS beams 1996-1998 Cooling test at KEK Radiation damage estimation Instrumentations at KEK clean room 2001 Final sensor design Japan provided 6000 sensors Design and fabrication of the readout hybrid Module assembly (2001-2004) High precision assembly fixtures by KEK KEK designed the flexible Cu/Polyimide circuit with Nippon Mektron LTD Hybrid assembly in Seiko Precision LTd. Automatic wire bonding, about 5000 bonding/module at Hamamatsu/Seiko 3D measurement station for alignment at Hamamatsu/Seiko. Pattern of glue points on the VHCPG base-board 3-axis dispensing workstation Assembly microscope unit for sensor alignment developed by KEK Alignment accuracy between front and back sensor planes versus module number. Best achievement among 4 regions !! Leakage current distribution after module assembly at 350 V. >95% yield, the best among 4 regions !! Japan made 980 modules Module production took full 3 years System assembly and commissioning (2004-2006) 2000.12 Module mounting robots tested by KEK 2004-05 Modules mounted on 4 cylinders at Oxford University using KEK robots 2006.2 SCT-TRT docking successfully done at CERN SR1using assembly tools designed and fabricated by KEK 2006.5 cosmic-ray track observed at SR1 ! SCT-v1, http://atlas.kek.jp/sub/poster/index.html