North America Environmental, Health, and Safety Committee April 2011

Leadership and Schedule Committee Leaders Committee Co-chairs Chris Evanston / Salus Engineering Sean Larsen / Cymer Eric Sklar / Safety Guru, LLC James Beasley / ISMI Technical Architect Technical Editors Meeting Schedule Last Meeting: 2011/03/31 at NA Spring 2011 Mtngs Applied Materials Santa Clara, CA Next Meeting: 2011/07/14 at SEMICON West 2011 San Francisco, CA April 2011 NA EHS Liaison Report

Organization Chart North America Environmental, Health, and Safety Committee Manufacturing Equipment Safety Subcommittee (MESSC) AMHS Safety TF S6 Revision TF Ergonomics (S8) TF S7 Evaluator Qualifications TF S2 3.3 Limitations TF (NEW) Fire Protection (S14) TF S13 NA Support TF (Inactive) FPD Safety System Liaison TF (Inactive) S2 Chemical Exposure TF S18 Support TF S2 Interlock Reliability TF Lifting Equipment TF (Inactive) S22 (Safe Electrical Design) TF S2 Ladders & Steps TF S1 Update TF (Inactive) S25 Revision TF (NEW) S2/Mach. Dir. Mapping TF (Inactive) S3 Revision TF E34 Rvsn TF (Disbanded) S2 Non-Ionizing Radiation TF Abate. Systems (F5) TF (Disbanded) S12 Rvsn TF (Disbanded) April 2011 NA EHS Liaison Report

Notable / New Activities S2 3.3 Limitations Task Force Leaders: Lauren Crane (Applied Materials), Cliff Greenberg (Nikon Precision) Intended result: correction of text in 3.3 of SEMI S2 S25 Revision Task Force Leaders: Jean-Marie Collard (Solvay), Steve Dobson (Solvay), Eric Sklar (Safety Guru, LLC) Intended result: line item revisions to S25 April 2011 NA EHS Liaison Report

Published for 0211 Revised: S2-0310b Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions related to electrical safety) S12-0211 Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination (Miscellaneous minor corrections) S22-1110a Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment (Delayed Revisions related to S2, transformers) Withdrawn: S9-0307 (Withdrawn 0211) Guide to Electrical Design Verification Tests for Semiconductor Manufacturing Equipment That Have Been Moved to SEMI S22 April 2011 NA EHS Liaison Report

Committee Activities Ballot Results [1/2] 4316H (1 LI) Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22-1110, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment (Delayed Revision Related to Safe Electrical Design) FAILED 4605D (4 LIs) Line Item Revisions to SEMI S22-1110, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment (Delayed Revisions on Multiple Topics) 1: FAILED 2: APPROVED 3: APPROVED 4: FAILED 4683 (3 LIs) Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Chemical Exposure) All Line Items FAILED APPROVED ballots forwarded for Procedural Review FAILED ballots returned to task force unless noted April 2011 NA EHS Liaison Report

Committee Activities Ballot Results [2/2] 4774 (6 LIs) Delayed Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Revisions Related to Non-Ionizing Radiation) 1: FAILED 2: APPROVED 3: APPROVED 4: APPROVED 5: APPROVED 6: FAILED 4931A Revision to SEMI S7-0310, Safety Guideline for Evaluation Personnel and Evaluating Company Qualifications FAILED 5109 Reapproval of SEMI S25-0306, Safety Guideline for Hydrogen Peroxide Storage & Handling Systems FAILED and transferred to S25 Revision TF APPROVED ballots forwarded for Procedural Review FAILED ballots returned to task force unless noted April 2011 NA EHS Liaison Report

Committee Activities New and Updated TFOFs/SNARFs Correction of text in 3.3 of SEMI S2 S2 3.3 Limitations TF 5-year review of SEMI S25 S25 Revision TF 5170 Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Revisions Related to Section 3.3) 5171 Revision to SEMI S25-0706, Safety Guideline for Hydrogen Peroxide Storage & Handling Systems 5172 Withdrawal of SEMI F15-0308, Test Method (SF6 Tracer Gas) for Enclosures Has Been Moved to SEMI S6 NA EHS TC Updated 5110 Line Item Revisions to SEMI S3-0306, Safety Guidelines for Process Liquid Heating System, and SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment S3 Revision TF April 2011 NA EHS Liaison Report

Committee Activities Upcoming Ballots [1/2] Cycle 3-11 5172 Withdrawal of SEMI F15-0308, Test Method (SF6 Tracer Gas) for Enclosures Has Been Moved to SEMI S6 NA EHS TC Either Cycle 3-11 or Cycle 4-11 3560M New Safety Guideline: Safety Guideline for Semiconductor Manufacturing Equipment Robots, Automation, and Load Ports AMHS Safety TF 4774A Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Non-Ionizing Radiation) S2 Non-Ionizing Radiation TF 5000 Line Item Revisions to SEMI S2-0310 (Delayed Revisions Related to Reliability Requirements) S2 Interlock Reliability TF 5110 Line Item Revisions to SEMI S3-0306, Safety Guidelines for Process Liquid Heating System, and SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment S3 Revision TF 5171 Revision to SEMI S25-0706, Safety Guideline for Hydrogen Peroxide Storage & Handling Systems S25 Revision TF April 2011 NA EHS Liaison Report

Committee Activities Upcoming Ballots [2/2] Cycle 4-11 4316I Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22-1110, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment (Delayed Revision Related to Safe Electrical Design) S22 TF 4449C Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Work at Elevated Locations) S2 Ladders & Steps TF 4605E Line Item Revisions to SEMI S22-1110, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment (Delayed Revisions on Multiple Topics) 4683A Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Chemical Exposure) S2 Chemical Exposure TF April 2011 NA EHS Liaison Report

Committee Activities Subcommittees & Task Forces (1/3) MESSC Discussed various topics, included text of paragraph 3.3 in S2 and the definitions of “fault-tolerant” and “fail-safe”. AMHS Safety TF Completed review of responses to Doc. 3560L; planning to ballot Doc. 3560M in C3-11 or C4-11. Ergonomics TF New leader: Paul Schwab (TI) replaces Mark Harralson (Intel). Continuing work to merge the SESC checklist with the SESC RI section in S8. Fire Protection TF Continuing work on content related to audiovisual notifications. S2 3.3 Limitations TF Starting work on updated text for paragraph 3.3 of S2. April 2011 NA EHS Liaison Report

Committee Activities Subcommittees & Task Forces (2/3) S2 Chemical Exposure TF Issued Doc. 4683 in C2-11; reviewing responses to failed line items and planning to ballot Doc. 4683A in C4-11. S2 Interlock Reliability TF Planning to ballot Doc. 5000 (addition of an RI on interlock reliability to SEMI S2) in C3-11 or C4-11. S2 Ladders & Steps TF Continuing to review responses to Doc. 4449B; planning to ballot Doc. 4449C in C4-11 if possible. S2 Non-Ionizing Radiation TF Issued Doc. 4774 in C2-11; reviewing responses to failed line items and planning to ballot Doc. 4774A in C3-11 or C4-11. S3 Revision TF Continuing work on line items to revise S3; expanded scope to include line items to revise affected content in S2. Planning to ballot Doc. 5110 in C3-11 or C4-11. April 2011 NA EHS Liaison Report

Committee Activities Subcommittees & Task Forces (3/3) S6 Revision TF Continuing to develop line item revisions to S6 and new content for S6 addressing gas detectors. S7 Evaluator Qualifications TF Document 4931A (add business continuity-related criteria to S7) failed; ballot to be re-worked and re-issued. S18 Support TF Continuing to support S18 Revision TF in Japan. S22 (Safe Electrical Design) TF Some line items of Doc. 4605D (misc. line item revisions to S22) approved. Reviewing responses to failed items and Doc. 4316H (alignment of criteria in S2 and S22). Planning to ballot Docs. 4316I and 4605E in C4-11. S25 Revision TF Reviewing responses to S25 reapproval ballot; starting work on revisions to S25. Planning to ballot Doc. 5171 in C4-11. FPD System Safety Liaison, Lifting Equipment TF, S1 Update, S2 Machinery Directive Mapping, and S13 Support – nothing to report or inactive. April 2011 NA EHS Liaison Report

Regional Staff Contact Information Name Ian McLeod E-mail imcleod@semi.org Phone 1.408.943.6996 Office Address SEMI Headquarters (San Jose) Committees etc. Compound Semiconductor Materials Environmental, Health, and Safety Flat Panel Display (inactive) Liquid Chemicals Metrics Physical Interfaces & Carriers Membership April 2011 NA EHS Liaison Report