European Equipment Automation Committee Liaison Report for: Physical Interfaces & Carriers Metrics Information & Control Updated October 25, 2011 Venue, Location, Date

Leadership Committee Co-chairs Alfred Honold / InReCon Co-chair of: I&C, PIC, Metrics Massimo Carrubba / Numonyx Co-chair of: I&C and PIC Lothar Pfitzner / FhG IISB Co-chair of: Metrics Frank Petzold / Trustsec Vice-chair of: I&C

Current Committee Structure Equipment Automation Committee C: Alfred Honold / InReCon (I&C, PIC, Metrics) C: Massimo Carrubba / Numonyx (I&C, PIC) C: Lothat Pfitzner / FhG IISB (Metrics) VC: Frank Petzold / Trustsec (I&C) International Environmental Contamination Control TF L: M. Furukawa / SEP L: R. Henderson / Yield Services L: M. Otto / FhG IISB SANPRO (Sensor Actuator Network Communication Standard for PROFInet) TF L: R. Enderes / Inficon Metrics I&C Integrated Measurement TF L: G. Roeder / FhG IISB PCS TF L: M. Schellenberger / FhG IISB Int’l SMIF Pod & Load Port Interoperability TF L: A. Gettel / GlobalFoundries PIC

Meeting Information Last meeting Next meeting October 12, 2011, Dresden, Germany in conjunction with SEMICON Europa Next meeting October 2012, SEMICON Europa, Dresden Germany

Ballot Results from SEMICON Europa No ballots were reviewed.

Metrics Committee (1/2) International Environmental Contamination Control (IECC) TF Leaders: L: M. Furukawa / SEP, R. Henderson / Yield Services, M. Otto / FhG IISB. Coach - Lothar Pfitzner/Fraunhofer Charter: Extend existing test methods for the determination of particulate, inorganic, and airborne molecular contamination in minienvironments Current Activities Contamination control in carriers for masks (MEDEA+ 2T30 CRYSTAL Project; ANNA Project) Contamination control in carriers and equipment for 450 mm wafers – Definition of contamination standards (Contacts with ISMI to be intensified) VDI/SEMI-Projekt "Mini-Environments" for a new standard (Fraunhofer, VDI, Infineon, InReCon, MCRT, Semisol, GloFo,…) Did not meet at SEMICON Europa.

Metrics Committee (2/2) Integrated Measurement Task Force Leader: Georg Roeder/Fraunhofer IISB Current Activity: 5 years review of E104 and E141 SEMI E141-0705 - Guide for Specification of Ellipsometer Equipment for Use in Integrated Metrology SEMI E104-0303 - Specification for Integration and Guideline for Calibration of Low-Pressure Particle Monitor Both passed superclean Continuation of discussions to extend metrology standards to PV applications and E141 also for stand-alone ellipsometry is planned

Metrics Standards due for five-year review Currently Published Designation # Standard Title Referenced Standards Committee SEMI E45-1101 (Reapproved 0307) TEST METHOD FOR THE DETERMINATION OF INORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING VAPOR PHASE DECOMPOSITION/TOTAL REFLECTION X-RAY FLUORESCENCE SPECTROSCOPY (VPD/TXRF), VPD/ATOMIC ABSORPTION SPECTROSCOPY (VPD/AAS) OR VPD/INDUCTIVELY COUPLED PLASMA-MASS SPECTROMETRY (VPD/ICP-MS) C28, C35, E19, M1 Equipment Automation (Metrics) SEMI E46-0307 TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS) E19, E108 SEMI E108-0307 TEST METHOD FOR THE ASSESSMENT OF OUTGASSING ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING GAS CHROMATOGRAPHY MASS SPECTROSCOPY E46, F21 Staff Report - October 6 2011

Information and Control Committee (1/2) SANPRO TF: Leader: Rolf Enderes/Inficon Working on two ballots for adjudication at NA Spring Meeting. Will seek ballot authorization at NA Fall Meeting 4992: New Standard: Specific Device Model for Pressure Control Valves 4987: New Standard: Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges Second activity will be revising SEMI E54.8 Standard for Sensor Actuator Network Communications for PROFIBUS SEMI E54.14 Standard for Sensor Actuator Network Communications for PROFINET with new upcoming Device Specific Models and to correct any defects if found. Third activity will be to review upcoming SEMI E54.x Standard drafts for Sensor Actuator Network Communications.

Information and Control Committee (2/2) Process Control Systems Task Force Charter: To define an online Process Control System (PCS) Architecture Framework inclusive of run to run, fault detection and classification, and statistical process control capabilities Leaders: Martin Schellenberger (Fraunhofer IISB) Dr. Armin Schels, Infineon Current Activity: Virtual Metrology Prediction of physical and electrical parameters of wafers and devices from information collected from the manufacturing tools and from other available sources, e.g., production context information and up-stream metrology.

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Information and Control Committee (4/4) IMA Survey Scope on virtual metrology extensions to PCS on application of APC to new markets such as solar and display Topics for VM Definitions Capabilities Requirements Expected benefits If anyone is interested to participate, please contact: Martin Schellenberger, martin.schellenberger@iisb.fraunhofer.de

Physical Interfaces and Carriers Committee (1/2) International Reticle SMIF Pod and Load Port Interoperability Task Force Charter: will work on reticle SMIF pod and related LP standards to specify: (1) Carrier Placement Sensing Pad locations, sizes and heights (2) Info Pad for lockout features locations, sizes and heights (3) Ports (e.g. used for purging) – locations, sizes 13 1/16/2019 Event, Venue information

Physical Interfaces and Carriers Committee (2/2) Charter: (Con’t) Furthermore, TF will review the referenced documents of the LP and pod standards – a recent ballot comment has revealed missing or outdated references in the document. It is the goal of the TF to make as small changes as possible to limit the impact of any of the changes for the industry. The intent is to affect future implementations, not existing implementations. Leader: Astrid Gettel/GLOBALFOUNDRIES

Thank You! For more information or to participate in any EU Equipment Automation Committee activities, please contact Yann Guillou at SEMI (yguillou@semi.org)