Lecture 1 OUTLINE Semiconductor Fundamentals

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Semiconductor Device Physics
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Reading: Pierret 1.1-1.2, 2.1; Hu 1.1-1.2 Lecture 1 OUTLINE Semiconductor Fundamentals General material properties Crystal structure Crystallographic notation Electrons and holes Reading: Pierret 1.1-1.2, 2.1; Hu 1.1-1.2

What is a Semiconductor? Low resistivity => “conductor” High resistivity => “insulator” Intermediate resistivity => “semiconductor” conductivity lies between that of conductors and insulators generally crystalline in structure for IC devices In recent years, however, non-crystalline semiconductors have become commercially very important polycrystalline amorphous crystalline EE130/230M Spring 2013 Lecture 1, Slide 2

Semiconductor Materials Elemental: Compound: Alloy: EE130/230M Spring 2013 Lecture 1, Slide 3

From Hydrogen to Silicon EE130/230M Spring 2013 Lecture 1, Slide 4

The Silicon Atom 14 electrons occupying the first 3 energy levels: 1s, 2s, 2p orbitals filled by 10 electrons 3s, 3p orbitals filled by 4 electrons To minimize the overall energy, the 3s and 3p orbitals hybridize to form 4 tetrahedral 3sp orbitals Each has one electron and is capable of forming a bond with a neighboring atom EE130/230M Spring 2013 Lecture 1, Slide 5

The Si Crystal Each Si atom has 4 nearest neighbors “diamond cubic” lattice lattice constant = 5.431Å EE130/230M Spring 2013 Lecture 1, Slide 6

How Many Silicon Atoms per cm3? Total number of atoms within a unit cell: Number of atoms completely inside cell: Number of corner atoms (1/8 inside cell): Number of atoms on the faces (1/2 inside cell): Cell volume: (0.543 nm)3 Density of silicon atoms: EE130/230M Spring 2013 Lecture 1, Slide 7

Compound Semiconductors “zincblende” structure III-V compound semiconductors: GaAs, GaP, GaN, etc. important for optoelectronics and high-speed ICs EE130/230M Spring 2013 Lecture 1, Slide 8

Crystallographic Notation Miller Indices: Notation Interpretation ( h k l ) crystal plane { h k l } equivalent planes [ h k l ] crystal direction < h k l > equivalent directions h: inverse x-intercept of plane k: inverse y-intercept of plane l: inverse z-intercept of plane (Intercept values are in multiples of the lattice constant; h, k and l are reduced to 3 integers having the same ratio.) EE130/230M Spring 2013 Lecture 1, Slide 9

Crystallographic Planes and Si Wafers Silicon wafers are usually cut along a {100} plane with a flat or notch to orient the wafer during IC fabrication: EE130/230M Spring 2013 Lecture 1, Slide 10

Crystallographic Planes in Si Unit cell: View in <111> direction View in <100> direction View in <110> direction EE130/230M Spring 2013 Lecture 1, Slide 11

Electronic Properties of Si Silicon is a semiconductor material. Pure Si has relatively high electrical resistivity at room temp. There are 2 types of mobile charge-carriers in Si: Conduction electrons are negatively charged Holes are positively charged The concentration (#/cm3) of conduction electrons & holes in a semiconductor can be changed: by changing the temperature by adding special impurity atoms ( dopants ) by applying an electric field by irradiation EE130/230M Spring 2013 Lecture 1, Slide 12

Electrons and Holes (Bond Model) 2-D representation of Si lattice: Si When an electron breaks loose and becomes a conduction electron, a hole is also created. EE130/230M Spring 2013 Lecture 1, Slide 13

What is a Hole? Mobile positive charge associated with a half-filled covalent bond Can be considered as positively charged mobile particle in the semiconductor Fluid analogy: EE130/230M Spring 2013 Lecture 1, Slide 14

The Hole as a Positive Mobile Charge EE130/230M Spring 2013 Lecture 1, Slide 15

Intrinsic Carrier Concentration, ni conduction At temperatures > 0 K, some electrons will be freed from covalent bonds, resulting in electron-hole pairs. For Si: ni  1010 cm-3 at room temperature EE130/230M Spring 2013 Lecture 1, Slide 16

Definition of Terms n ≡ number of electrons/cm3 p ≡ number of holes/cm3 ni ≡ intrinsic carrier concentration In a pure semiconductor, n = p = ni EE130/230M Spring 2013 Lecture 1, Slide 17

Summary Crystalline Si: 4 valence electrons per atom diamond lattice (each atom has 4 nearest neighbors) atomic density = 5 x 1022 atoms/cm3 intrinsic carrier concentration ni = 1010 cm-3 Miller indices are used to designate planes and directions within a crystalline lattice In a pure Si crystal, conduction electrons and holes are formed in pairs. Holes can be considered as positively charged mobile particles. Both holes and electrons can conduct current. EE130/230M Spring 2013 Lecture 1, Slide 18