Silicon wafer fabrication

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Presentation transcript:

Silicon wafer fabrication Taken from www.egg.or.jp/MSIL/english/index-e.html

Silicon wafer fabrication – slicing and polishing Taken from www.egg.or.jp/MSIL/english/index-e.html

LPCVD Systems

IBM 7-Level Cu Metallization

Micromachining Ink Jet Nozzles Microtechnology group, TU Berlin

TI Digital Micromirror Device

MEMS Gyroscope Chip 1mm Drive 0.01Å Sense J. Seeger, X. Jiang, and B. Boser

Single chip six-degree-of-freedom inertial measurement unit (uIMU) designed by IMI principals and fabricated by Sandia National Laboratories

Gene chips, proteomics arrays.

NEMS: TOWARD PHONON COUNTING: Quantum Limit of Heat Flow. Roukes Group Cal Tech Tito

Biological Nanomotor

What is a Microswitch? Surface Micromachined 5-500 Micron Size 5-300 V Actuation

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