European Equipment Automation Committee Liaison Report for: Physical Interfaces & Carriers Metrics Information & Control Updated June 14, 2010 Venue, Location, Date

Leadership Committee Co-chairs Alfred Honold / InReCon Co-chair of: I&C, PIC, Metrics Massimo Carrubba / Numonyx Co-chair of: I&C and PIC Lothar Pfitzner / FhG IISB Co-chair of: Metrics Frank Petzold / Trustsec Vice-chair of: I&C

Current Committee Structure Equipment Automation Committee C: Alfred Honold / InReCon (I&C, PIC, Metrics) C: Massimo Carrubba / Numonyx (I&C, PIC) C: Lothat Pfitzner / FhG IISB (Metrics) VC: Frank Petzold / Trustsec (I&C) New leadership, new activity International Environmental Contamination Control TF L: M. Furukawa / SEP L: R. Henderson / Yield Services L: M. Otto / FhG IISB SANPRO (Sensor Actuator Network Communication Standard for PROFInet) TF L: R. Enderes / Inficon Metrics I&C Integrated Measurement TF L: G. Roeder / FhG IISB PCS TF L: A. Schels / Infineon L: M. Schellenberger / FhG IISB New activity Review of existing standards Work completed and TF disbanded International E84 Revision TF L: J. Rothe / GlobalFoundries L: M. Otani / Asyst-Shinko PIC

Meeting Information Last meeting Next meeting 9 June 2010, Munich, Germany, in conjunction with Intersolar Next meeting October 2010, Dresden, Germany in conjunction with SEMICON Europa

Metrics Committee (1/2) International Environmental Contamination Control (IECC) TF Leader: Michael Otto/Fraunhofer Charter: Extend existing test methods for the determination of particulate, inorganic, and airborne molecular contamination in minienvironments Current Activities Contamination control in carriers for masks (MEDEA+ 2T30 CRYSTAL Project; ANNA Project) Contamination control in carriers and equipment for 450 mm wafers – Definition of contamination standards (Contacts with ISMI to be intensified) VDI/SEMI-Projekt "Mini-Environments" for a new standard (Fraunhofer, VDI, Infineon, InReCon, MCRT, Semisol, GloFo,…)

Metrics Committee (2/2) Integrated Measurement Task Force Leader: Georg Roeder/Fraunhofer IISB Current Activity: 5 years review of E104 and E141 SEMI E141-0705 - Guide for Specification of Ellipsometer Equipment for Use in Integrated Metrology SEMI E104-0303 - Specification for Integration and Guideline for Calibration of Low-Pressure Particle Monitor Working to get PV industry involved in E141 (integrated ellipsometer) reapproval/revision

Information and Control Committee (1/2) SANPRO TF: Leader: Rolf Enderes/Inficon Working on two ballots for Cycle 6, to be reviewed at SEMICON Europa (October 2010) 4992: New Standard: Specific Device Model for Pressure Control Valves 4987: New Standard: Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges Next activity will be to review upcoming SEMI E54.x Standard drafts for Sensor Actuator Network Communications.

Information and Control Committee (2/2) Process Control Systems Task Force Charter: To define an online Process Control System (PCS) Architecture Framework inclusive of run to run, fault detection and classification, and statistical process control capabilities Leaders: Martin Schellenberger (Fraunhofer IISB) Dr. Armin Schels, Infineon Current Activity: Virtual Metrology Prediction of physical and electrical parameters of wafers and devices from information collected from the manufacturing tools and from other available sources, e.g., production context information and up-stream metrology.

Physical Interfaces and Carriers Committee (1/2) Completed ballot for withdrawal of E103: Mechanical Specification for a 300 mm Single-Wafer Box System that Emulates a FOUP, was developed by the European Equipment Automation Committee Ballot review performed at June 9 meeting. E103 will be withdrawn pending A&R procedural review. 9 1/18/2019 Event, Venue information

Physical Interfaces and Carriers Committee (2/2) E84 Revision TF Successfully published SEMI E84-1109: Specification for Enhanced Carrier Handoff Parallel I/O Interface TF disbanded

Thank You! For more information or to participate in any EU Equipment Automation Committee activities, please contact James Amano at SEMI (jamano@semi.org)