North America Liquid Chemicals Committee Liaison Report November 2010

Outline Leadership Organization Chart Meeting Information Notable / New Activities Ballot Results New TFOFs/SNARFs Recent, Current, & Upcoming Ballots Task Forces July 2010 NA Liquid Chemicals

Leadership Committee Co-chairs Frank Flowers (FMC) Frank Parker (ICL) July 2010 NA Liquid Chemicals

Organization Chart North America Liquid Chemicals Committee C: Frank Flowers (FMC) C: Frank Parker (ICL) Liquid Chemicals SC C: Frank Flowers (FMC) C: Frank Parker (ICL) Liquid Chemicals Distribution SC C: (vacant) Analytical Methods TF C: Frank Flowers (FMC) C: Frank Parker (ICL) F57 Revision TF L: James Henry (Arkema) F63 Revision TF L: Slava Libman (MW Zander) Statistical Methods TF Temporary L: Frank Flowers (ICL) Surface Area of Polymer Pellets TF L: Marty Burkhart (Hi Pure Tech) July 2010 NA Liquid Chemicals

Meeting Information Last meeting Next meeting 2010/11/09 at SEMI Stds NA 2010 Fall Meetings San Jose, CA Next meeting TBD Spring 2011; tentatively planned to be held at FMC in Pasadena, TX (Houston area) July 2010 NA Liquid Chemicals

Notable / New Activities Statistical Methods Task Force Two new activities related to particle counters: Cross-calibration (how to take counts from one counter and predict what another counter will give) Extrapolation (a way to use particle counts from a particular counter across all the reported channels to predict counts at channels less than the lowest size on the given counter) Planning to develop new documents for each activity New participants are welcome; please contact Ian McLeod (imcleod@semi.org) or Bob Brill (ICL) (robert.brill@icl-pplp.com) July 2010 NA Liquid Chemicals

Ballot Results Approved/forwarded for procedural review 4953 Revision of SEMI F063-0309, Guide for Ultrapure Water Used in Semiconductor Processing July 2010 NA Liquid Chemicals

New TFOFs/SNARFs 5105 New Standard: Guide for Cross Calibrating Particle Measurement Instruments for Liquid Chemicals Statistical Methods TF 5106 New Standard: Guide for Extrapolating Particle Measurement Data for Liquid Chemicals July 2010 NA Liquid Chemicals

Upcoming Ballots Cycle 1-2011 and later Revision of SEMI F63-0309, Guide for Ultrapure Water Used in Semiconductor Processing Surface Area of Polymer Pellets TF In addition, the following documents are being reviewed, and have been authorized to be balloted for reapproval if no issues with the existing content are identified: SEMI C22-0306, Guideline for Boron Tribromide SEMI C25-0306, Specification for Dichloromethane (Methylene Chloride) SEMI C26-0306, Specification and Guideline for Hexamethyldisilazane (HMDS) SEMI C28-0306, Specifications and Guidelines for Hydrofluoric Acid SEMI C32-0306, Specification for Methyl Ethyl Ketone SEMI C34-0306, Specification and Guideline for Mixed Acid Etchants SEMI C37-0706, Specification for Phosphoric Etchants SEMI C38-0306, Guideline for Phosphorus Oxychloride SEMI F18-95, Guide for Determining the Hydrostatic Strength of, and Design Basis for, Thermoplastic Pipe and Tubing SEMI F31-0698, Guide for Bulk Chemical Distribution Systems July 2010 NA Liquid Chemicals

Task Force Reports Analytical Methods TF F57 Rewrite TF TF is continuing 5-year review activities. F57 Rewrite TF Activity on Method for Determining Surface Roughness In Polymer Components Used In Ultrapure Water and Liquid Chemical Distribution Systems is in progress. F63 Revision TF Document 4953 approved and submitted for procedural review. Surface Areas of Polymer Pellets TF Document 4556A to be issued for balloting in Cycle 1-2011. Statistical Methods TF See “Notable/New Activities” (slide 6) July 2010 NA Liquid Chemicals

Regional Staff Contact Information Name Ian McLeod E-mail imcleod@semi.org Phone 1.408.943.6996 Office SEMI HQ, San Jose, CA Committees etc. Compound Semiconductor Materials Environmental, Health, and Safety Flat Panel Display Liquid Chemicals Metrics Physical Interfaces & Carriers Membership July 2010 NA Liquid Chemicals