Yongho Seo Center for Near-field Atom-photon technology, Seoul Nation University, Rep. of Korea & Department of Physics, University of Virginia Kyungho Kim, Hyunjun Jang, Wonho Jhe School of Physics and Center for Near-field Atom-photon technology, Seoul Nation University, Rep. of Korea Magnetic Force Microscopy using Quartz Tuning Fork
- Self actuating - Self sensing - No light - No alignment - optical deflection - laser diode - photo diode - optical alignment - addition actuator Quartz Crystal Tuning fork Quartz Tuning Fork as a Force Sensor Micro-machined Cantilever
Force sensitivity (Qf/k) 1/2 f ~ kHz k ~ N/m Q ~ 10 2 ~ 10 nm dithering f ~ kHz k ~ N/m Q ~ 10 4 (10 6 in vacuum) < 1 nm dithering CantileverTuning Fork Force Sensitivity of Quartz Tuning Fork Low force sensitivity Low thermal noise due to high stiffness High resolution by small dithering amplitude
Hal Edwards, et. al. (1997) Todorovic and Schultz (1998) Previous works : MFM using tuning fork
f = KHz k = 1300 N/m Q = 1300 f = KHz k = 1300 N/m Q = 1300 Tuning Fork based Electrostatic force microscopy -Ferroelectrics -surface charge in Semiconductor L = 2.2 mm, t = 190 m, w = 100 m
7 x 7 m x 0.9 m 2 poling Line drawing EFM images using Tuning Fork Surface polarization images of PZT film 4 x 4 m 2 7 x 7 m 2 Y. Seo, et al, Appl. Phys. Lett , (2002). dot
Frequency shiftPhase shift MFM contrast - magnetic force gradient between tip and sample Lift mode - keep constant gap between tip and sample (~10 nm) - to avoid the strong short range topographic contrast Magnetic force - very weak force (~pN) Force gradient Tuning Fork Based Magnetic Force Microscopy
Shear force Attractive force Approach Curve of MFM Approach Withdraw high S/N ratio high frequency Sensitivity < 3 mHz f = 0.1 Hz 0.01 Hz1 mHz
H 3 PO 4 - Co or Ni wire Pt Co, Ni D = 100 m10 m Tip Manufacture Electrochemical Etching
-Attach the wire to the tuning fork and make a tip -Use home-made micromanipulator Pt Co, Ni H 3 PO 4 Tuning fork Silver paint Tip Attachment
L = 2.2 mm, t = 190 m, w = 100 m spring constant, k = 1300 N/m Co or Ni tip Tip & Tuning Fork epoxy
- Perpendicularly recorded sample -longitudinally polarized tip - monopole approximation Advantage of the shear mode MFM Shear Mode MFM
(a) shear mode, Co tip, perpendicular (b) shear mode, Co tip, parallel dithering (c) shear mode, Ni tip (d) tapping mode (a) shear mode, Co tip, perpendicular (b) shear mode, Co tip, parallel dithering (c) shear mode, Ni tip (d) tapping mode 30 x 30 m Mbit / Inch 2 hard disk 100 Mbit / Inch 2 hard disk Magnetic Force Microscopy Images
Amplitude (a) dependency 3 x 1 m 2 13 x 3 m 2 Lift Height & Dithering Amplitude Height (h) dependency h a Tip Sample
1 Gbit/inch 2 hard disk Dithering Amplitude : 20 nm lift height : 50 nm Spatial resolution : 50 nm 2 x 2 m 2 High Resolution Tuning Fork Based MFM
Summary MFM using Tuning Fork High resolution. low power dissipation at low temperature. No laser : dark environment. Cryogenic experiment (Vortex in superconductor).