1 st MEMS Commercial Tuning Fork Gyroscope Draper Labs M. Weinberg, J. Bernstein, S. Cho, A. T. King, A. Kourepenis, P. Ward, and J. Sohn, A micromachined comb-drive tuning fork gyroscope for commercial applications, in Proc. Sensor Expo, Cleveland, OH, 1994, pp. 187–193. Area 1mm 2 !

A Quartz Tuning Fork Gyroscope

Economy of Scale to Lower Cost A Critical Review of MEMS Gyroscopes Technology and Commercialization Status Steven Nasiri, x108, 3150A Coronado Drive, Santa Clara, California high volume occurred once unit prices achieved $3 target prices.

Automotive: vehicle stability control, rollover detection, navigation, load leveling/suspension control, event recording, collision avoidance Consumer: computer input devices, handheld computing devices, game controllers, virtual reality gear, sports equipment, camcorders, robots Industrial: navigation of autonomous (robotic) guided vehicles, motion control of hydraulic equipment or robots, platform stabilization of heavy machinery,human transporters, yaw rate control of wind-power plants Aerospace/military: platform stabilization of avionics, stabilization of pointing systems for antennas, unmanned air vehicles, or land vehicles, inertial measurement units for inertial navigation Applications A Critical Review of MEMS Gyroscopes Technology and Commercialization Status Steven Nasiri, x108, 3150A Coronado Drive, Santa Clara, California 95054

UI Research Project- Using AUVs to Measure Magnetic Signature of Naval Vessels

IMU DAU Magnetometer

Archangel IM3 Data Resolution Body Rates 200 Hz Accelerations Hz Data Accuracy (Gyro IMU Mode) Random Walk 2.5°/hour (C1) 5.2°/hour (C2) Bias Drift 15°/hour Stability 50°/hr/year Scale Factor Accuracy 0.1% of Full Scale Scale Factor Drift 300 ppm, 1 sigma Cross Axis 0.13% maximum Data Accuracy (Accelerometer) Bias Drift 0.2 mg Scale Factor Accuracy 0.10% of Full Scale Scale Factor Drift 500 ppm, 1 sigma Cross Axis 0.13% maximum Dynamic Range - C1 ±150°/s ±10 g (Linear) - C2 ±300°/s ±10 g Bandwidth (3 db) Rates 40 Hz Maximum Accelerations 50 Hz Maximum IMU Specifications