North America Liquid Chemicals Committee Liaison Report April 2012 NA LChem Report - April 2012

Outline New TFOFs and SNARFs Leadership Organization Chart Meeting Information Ballot Results Upcoming Ballots Task Force Reports Upcoming Meeting Schedule NA SEMI Standards Staff Change NA LChem Report –April 2012

New TFOFs and SNARFs TFOFs SNARFs None. Revision to SEMI F63, Guide for Ultrapure Water Used in Semiconductor Processing (#5415) Revision of SEMI F104-0312, Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems (#5416) NA LChem Report - April 2012

Leadership Committee Co-chairs Frank Flowers / FMC Frank Parker / ICL NA LChem Report - April 2012

Current Committee Structure NA LChem Report - April 2012

Meeting Information Last meeting Next meeting April 03, 2012 @ NA Spring 2012 Meetings SEMI Headquarters, San Jose, CA Next meeting July 10, 2012 @ SEMICON West 2012 San Francisco Marriott Marquis Hotel, San Francisco, CA NA LChem Report - April 2012

Document Review Summary Cycle 1-2012 [1/3] Document Title Committee Action 4543A Revision to SEMI C20-1101, Specification and Guidelines for Ammonium Fluoride 40%, with title change to: Specification and Guide for Ammonium Fluoride 40% Passed as balloted 4544C Revision to SEMI C24-0301, Specification for n-Butyl Acetate Failed and reballoted 4547C Revision to SEMI C33-0301, Specifications for n-Methyl 2-Pyrrolidone NA LChem Report - April 2012

Document Review Summary Cycle 1-2012 [2/3] Document Title Committee Action 5191A Revision to SEMI C34-0306, Specification and Guideline for Mixed Acid Etchants, with title change to: Specification and Guide for Mixed Acid Etchants Failed and reballoted 5193 Revision to SEMI C46-0306, Guideline for 25% Tetramethylammonium Hydroxide, with title change to: Guide for 25% Tetramethylammonium Hydroxide Passed as balloted 5299A Revision of SEMI C26-0306 with title change to: Specification and Guide for Hexamethyldisilazane (HMDS) NA LChem Report - April 2012

Document Review Summary Cycle 1-2012 [3/3] Document Title Committee Action 5354 Revision to SEMI C47-0706, Guideline for Trans 1, 2 Dichloroethylene with title change to: Guide for Trans 1, 2 Dichloroethylene Passed as balloted 5355 Revision to SEMI C48-0706, Specification and Guideline for 1,1,1-Trichloroethane, Furnace Grade with title change to: Specification and Guide for 1,1,1-Trichloroethane, Furnace Grade 5356 Revision to SEMI C51-0706, Specifications and Guidelines for Xylenes with title change to: Specifications and Guide for Xylenes Failed and reballoted NA LChem Report - April 2012

Technical Ballots to be reviewed at SEMICON West 2012 Document # Document Title TF / SC Cycle 3 or Cycle 4, 2012 4544D Revision to SEMI C24-0301, Specification for n-Butyl Acetate Analytical Methods TF 4547D Revision to SEMI C33-0301, Specifications for n-Methyl 2-Pyrrolidone 5188 New Standard: Guide to Evaluate the Performance of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems UPW Filtration Efficiency TF NA LChem Report - April 2012

Technical Ballots to be reviewed at SEMICON West 2012 [continued] Document # Document Title TF / SC Cycle 3 or Cycle 4, 2012 5191B Revision to SEMI C34-0306, Specification and Guideline for Mixed Acid Etchants, with title change to: Specification and Guide for Mixed Acid Etchants Analytical Methods TF 5299B Revision of SEMI C26-0306 with title change to: Specification and Guide for Hexamethyldisilazane (HMDS) 5356A Revision to SEMI C51-0706, Specifications and Guidelines for Xylenes with title change to: Specifications and Guide for Xylenes NA LChem Report - April 2012

Task Force Updates Analytical Test Methods TF Statistical Methods TF Reviewing documents for 5 year review SEMI C27, Specifications and Guidelines for Hydrochloric Acid SEMI C31, Specifications and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) SEMI C35, Specifications and Guideline for Nitric Acid SEMI C36, Specifications for Phosphoric Acid Statistical Methods TF Considering to disband at SEMICON West if there is no further interest on existing TF discussions (e.g., ship-to-control) NA LChem Report - April 2012

Task Force Updates [continued] F57 Revision TF Ballot 4555A passed technical committee and procedural reviews and is now published as SEMI F57-0312 Possible further alignment of F57 with ITRS (International Technology Roadmap for Semiconductors ) risk factors, to be discussed at next meeting during SEMICON West 2012 F104 Revision TF Newly approved SNARF # 5416 Revision of SEMI F104-0312, Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems NA LChem Report - April 2012

Task Force Updates [continued] Polymer Surface Roughness TF Continue drafting of ballot 4989 New Standard: Test Method for Determining Surface Roughness in Polymer Components Used in Ultrapure Water and Liquid Chemical Distribution Systems UPW Filtration Efficiency TF Continuing development of Doc. 5188. Ballot submission planned for Cycle 4, 2012 New Standard: Guide for Validation of the Efficiency of Final Filtration in Ultrapure Water Production Used in Semiconductor Processing NA LChem Report - April 2012

Task Force Updates [continued] F63 Revision TF New SNARF # 5415 Revision to SEMI F63, Guide for Ultrapure Water Used in Semiconductor Processing F31, F39, and F41 Rewrite TF TFOF revised to include F31 Will look into the following documents due for 5-Year Review: SEMI E49.2, Guideline for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment SEMI E49.4, Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment SEMI E49.5, Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment SEMI E49.7, Purity Guide for the Design and Manufacture of Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment NA LChem Report - April 2012

Proposed Meeting Schedule at SEMICON West 2012 Monday, July 9 F104 Rewrite TF (1:00 PM to 2:00 PM) F39, F31& F41 Rewrite TF (2:00 PM to 3:00 PM) Polymer Surface Roughness TF (3:00 PM to 4:00 PM) UPW Filtration TF/ F63 TF (4:00 PM to 5:00 PM) Tuesday, July 10 F57 Discussion/ITRS Alignment (8:00 AM to 10:00 AM) Analytical Methods TF (10:00 AM to 12 Noon) Liquid Chemicals Committee (1:00 PM to 4:00 PM) NA LChem Report - April 2012

NA Standards Staff Changes New NA Standards staff: Michael Tran mtran@semi.org Paul Trio Sr. Manager, NA Standards Operations Operations Committees: NARSC / I&C / ATE / EHS / HB-LED / 3DS-IC Meetings & Events Planning General Information STEPS/Workshops and Sponsorships Kevin Nguyen Manager, NA Standards Committees Committees: Facilities / Gases / PV / PV Automation / PV Materials / Silicon Wafer / Traceability Standards Website Michael Tran Senior Standards Engineer Committees: Compound Semiconductor Materials / FPD / Liquid Chemicals / MEMS / Metrics / Microlithography / PIC Standards Membership NA LChem Report - April 2012

Thank You! For more information or participate in any NA Liquid Chemical activities, please contact Michael Tran at SEMI (mtran@semi.org) NA LChem Report - April 2012