Korea I & C Committee Liaison Repot April, 2012 Venue, Location, Date

Table of Contents Leadership Organization Chart Meeting Information Subcommittee/TF/WG Updates SEMICON Korea 2012

Leadership Committee Co-chairs Leadership Change Chulhong Ahn/ SK hynix Hyungsu Kim/ Samsung SDS (new) Gunwoo Lee / Miracom Leadership Change S.G Jeong (KC-Tech) stepped down as the co-chairs and Hyungsu Kim appointed as successor. SangSang-Mok Yoo (AMK) stepped down as the GEM300 TF leader and Chang Yul Cho (SEMES) appointed as successor. Hyungsu Kim appointed as DDA TF leader

Organization Chart <Information & Control> Committee C: Chulhong Ahn (SK hynix) C: Hyungsu Kim (Samsung SDS) C: Gunwoo Lee (Miracom Inc.) <GEM300/SECS> TF L: Byoung Min Im (TEL Korea) L: Chang Yul Cho (SEMES) L: Jong Sub Shim (ASM) New <DDA> TF L: Hyungsu Kim (Samsung SDS) Sun set EDA WG L: Hyungsu Kim (Samsung SDS)

Meeting Information Last meeting Next meeting February 8, 2011 @ Coex, Seoul, Korea in conjunction with SEMICON Korea 2012 Next meeting April 13, 2012 @ SEMI Korea, Seoul, Korea (the venue is tentative)

Major Updates Ballot review New Business 4824B (E5 revision) had passed committee review and A&R report has been submitted. New Business Authorized Ballot list 4946 in cycle 3, 2012 5386 in cycle 3 or 4, 2012 Authorized Activity EDA WG was disbanded and Diagnostic Data Acquisition TF was newly formed.

Subcommittee/TF/WG Updates (1/3) GEM300 TF Meeting information Last meeting: March 21, 2012 @ TEL Korea Next meeting: TBD E5 Revision Doc. 4824B (cycle 7) ballot result had been reviewed and it passed committee review. A&R was submitted for procedural review. E116 Revision Doc. 5320 (cycle 1) ballot result was reviewed at the previous meeting and the writer decided to rework it. It will be officially reviewed in next committee meeting.

Subcommittee/TF/WG Updates (2/3) GEM300 TF E87 Revision The TF distribute the final version of Doc 4946 (cycle 3) to JP and NA and waiting for further comments. E94 Revision Drafting Doc 5386 which is about to issue in cycle 3 or 4. EDA WG Disbanded.

Subcommittee/TF/WG Updates (3/3) DDA TF (Newly formed) Leader: Hyungsu Kim (Samsung SDS) Charter: To manage and research the equipment data acquisition (EDA) interface standard suite and related standards, e.g., E139, E157. To develop new SEMI standards regarding to data infrastructure if needed. To collaborate with task forces in other regions with EDA and Data Infrastructure. Scope: The primary focus of the DDA Task Force is to collaborate with task forces in other regions with EDA and Data Infrastructure. The DDA Task Force is also responsible for researching the advanced data infrastructure. Teleconferences will be held as necessary and face-to-face meetings will be held.

FPD Metrology Committee, EHS, I&C, Facilities Regional Staff Contact Information Name Natalie Shim E-mail eshim@semi.org Phone 82.2.531.7808 Office Address #4005 Trade Tower, 159-1 Samsung-dong, Kangman-ku, Seoul, Korea zip:135-729 Committees In charge FPD Metrology Committee, EHS, I&C, Facilities