个人简历 美国大学工程学学士、硕士、博士 美国德州电子仪器公司芯片测试工程师，芯片生产工程师，开发部经理。 美国阿肯色大学电子工程学教授。 发表论文170多篇。 完成多项研究项目，价值超过美金1500万。

个人简历 博士生导师，指导过65位博士和硕士生。 获得伦敦城市行业教育学会的“CGIA”文凭。 写了关于开关电源技术方面的书一本，书名为“Power Switching Converters” 美国电解化学协会委员。 微电子封装研究所主任。

University of Arkansas

Micro-Electro-Mechanical Devices Simon S Micro-Electro-Mechanical Devices Simon S. Ang Professor of Electrical Engineering University of Arkansas USA

What is Micro-Electromechanical Device or MEMs? Imagine machines so small they are imperceptible to the human eye. Imagine working machines with gears no bigger than a grain of pollen.

What is MEMS? Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common substrate using micro-fabrication technology.

MEMS Applications Air Bag Sensor - crash-bag deployment in automobile (accelerometer) Ink Jet Printer Bio-MEMS – Polymerase Chain Reactor (PCR) for DNA amplification and identification

(From Silicon Design Inc.,) MEMS Accelerometer Automotive --  Testing, Suspension, Air Bags Agricultural --  Harvesting shock & vibration, Production line monitoring Manufacturing -- Testing, Production line monitoring, Shipping monitoring Transportation  --  Rail-car sensing, Shipping monitoring, Testing Down Hole Drilling -- Tilt/Attitude sensing, Machinery health NASA -- Vibration Monitoring, Testing (From Silicon Design Inc.,)

A Portable PCR Device Biological Detection Technology for Counter – Terrorism (Lawrence Livermore Laboratory)

Sandia’s Micro-Mirror

Spider Mite on a Sandia’s Micro-Mirror

Spider Mite Approaching a Sandia’s Micro-Gear Assembly

Micro Spacecrafts

Microthruster

Microcombustion testing Microthruster Microcombustion testing

Microthruster Microthruster firing sequence

Basic Surface Micromachining Process Sequence I. Deposit Sacrificial Layer IV. Pattern Mechanical Layer II. Pattern Sacrificial Layer V. Release Mechanical Layer +V III. Deposit Mechanical Layer VI. Test Device

Microelectronic Fabrication Photomask Fabricated Devices

Processing Equipment

Processing Equipment

Processing Equipment

Processing Equipment

Processing Equipment

Processing Equipment

Processing Equipment

Aluminum Wire Bonder

Gold Wire Bonder

Wire Bond Pull Tester

Measurement Equipment

Microelectronic Cleanroom Operation

Microelectronic Cleanroom Operation

Microelectronic Cleanroom Operation

Microelectronic Cleanroom Operation

Microelectronic Cleanroom Operation

Microelectronic Cleanroom Operation

Wire Bonding

Microfluidic Devices Microfluidic devices are MEMS devices with micro-scale (10-6m) or nano-scale (10-9m) flow channels They come with valves, electrodes, heaters, and other features These microfluidic devices can be used as tiny chemical processing or reaction system, consuming only tiny amount of chemical – micro-TAS (micro total analysis system)

Post-type Filter

Comb-Type Filter

Weir-type Filter Glass cover Silicon plate Inlet Outlet 50µm

Weir-type Filter 50µm

In Chip Immunofluorescent Cell Detection Glass cover Labeling Detection Fluorescent Microscope Silicon Plate Cell Fluorescent labeled antibody Labeled cell

Beads in the Microchannels Deep channel (before filter chamber) Shallow channel (After filter chamber)

Confocal Images of Microchannel Shallow channel Deep Channel

Fluent Simulations of Microfilter Chip 1μm weir gap Flow rate=2 mm/s 3μm weir gap Flow rate=2mm/s 6μm weir gap Flow rate=2mm/s 9μm weir gap Flow rate=2mm/s

Fluent Simulations of Microfilter Chip 1μm weir gap Depth=30μm Depth=10μm 50µm Flow rate=0.5mm/s Depth=50μm Flow rate=1mm/s

Labeling efficiency along the weir

Trapping Efficiency

Comparison with the conventional detection on slides 9 steps Takes more than 1 h Consumes 20µl cells solution and 25 µl labeling reagent Within filter chip 3 steps Takes less than 0.5h Consumes 2 µl cells solution and labeling reagent

Pillar-Type Microfludic Filter Chip

Future work Next generation chip: Comb-type chip Multiplex Application in DNA array Application in ELISA Incorporate QD

Other Related Work Quantum dot labeling Bacteria sensors Brain probes Recording integrated circuitries Microelectronics Packaging

Quantum Dots Detection System

Quantum Dots Labeling of C. parvum (red) and G. Lamblia (Green) “Quantum Dots as a Novel Immunofluorescent Detection System for Cryptosporidium parvum and Giardia lamblia,” L. Zhu, S. Ang, & Wen-Tso Liu, in Applied and Environmental Microbiology. Quantum dots labeling of multiple pathogens: Semiconductor quantum dots conjugated antibodies were successfully developed to label Cryptosporidium parvum and Giardia lamblia. This novel fluorescence system exhibited superior photostability, gave 1.5-9 folds higher signal to noise ratios than traditional organic dyes in detecting C. parvum, and allowed dual-color detection for C. parvum and G. lamblia. (to be published in Environmental and Applied Microbiology). Interdigitated electrode sensor for E-coli detection: The sensing electrode senses the presence of e-coli bacteria by its change in impedance across the electrode.

Interdigitated Electrode Sensor Quantum dots labeling of multiple pathogens: Semiconductor quantum dots conjugated antibodies were successfully developed to label Cryptosporidium parvum and Giardia lamblia. This novel fluorescence system exhibited superior photostability, gave 1.5-9 folds higher signal to noise ratios than traditional organic dyes in detecting C. parvum, and allowed dual-color detection for C. parvum and G. lamblia. (to be published in Environmental and Applied Microbiology). Interdigitated electrode sensor for E-coli detection: The sensing electrode senses the presence of e-coli bacteria by its change in impedance across the electrode.

What is a Bio-Sensor? Biologically sensitive Material Antibodies Enzymes DNA Probes Transducing Element/System Electrochemical Optical mass Direct Interfacing Fluorescent Chemiluminescent Enzymatic substrate Indirect

E-coli Sensing Principle Charge transfer is blocked Fe[(CN)6]3-/4- E. coli O157:H7 cells Streptavidin Self Assembled Monolayer Au Electrode

Scanning Electron Micrograph of E-Coli on Bio-Sensor E-coli cells on the surface of bio-sensor before washing away non-specific binding - 65 x 100 μm window size 1000 X Magnification

Surface of Electrode (AFM)

Brain Sensors Multi-site potential and chronoamperometry brain probes Neural Signal Recording Electrodes Nano Interdigitated Array Electrochemical Recording Electrode Potential Electrode We have developed the brain probes for the last 12 years. The main objectives of these brain probes are to study the brain electrical (such as neuronal spikes when brain is active!) and chemical activities (such as dopamine). Our novel brain probes are able to perform combined potential and chemical sensing simultaneously.

Brain Sensors A brain probe mounted and wire bonded on a circuit board carrier We have developed the brain probes for the last 12 years. The main objectives of these brain probes are to study the brain electrical (such as neuronal spikes when brain is active!) and chemical activities (such as dopamine). Our novel brain probes are able to perform combined potential and chemical sensing simultaneously.

Brain Sensors SEM Photo of a multi-site potential and chrono-amperometry brain probe We have developed the brain probes for the last 12 years. The main objectives of these brain probes are to study the brain electrical (such as neuronal spikes when brain is active!) and chemical activities (such as dopamine). Our novel brain probes are able to perform combined potential and chemical sensing simultaneously.

Brain Sensors SEM Photo of a multi-site potential and chrono-amperometry brain probe We have developed the brain probes for the last 12 years. The main objectives of these brain probes are to study the brain electrical (such as neuronal spikes when brain is active!) and chemical activities (such as dopamine). Our novel brain probes are able to perform combined potential and chemical sensing simultaneously.

Silicon Microprobe Process Flow

Silicon Microprobe Process Flow

Brain Probe Recording in Rat’s Brain

Extracellular Field Potentials in Olfactory Bulb of A Male Rat Match in evoked potential amplitude and waveform across the four recording sites when occupying the same position in the olfactory bulb Sharp reversal of polarity as each recording site across the mitral cell later, indicating that crosstalk between channels is minimal. Stainless steel microwires - 100µm diameter, enamel-insulated 16-site brain microprobe

Recording Integrated Circuit

Microelectronic Packaging

Microelectronic Packaging

Microelectronic Packaging

Microelectronic Packaging

Microelectronic Packaging

Thank You Questions ?