NA Facilities and Gases Committees Liaison Report Updated February 26, 2013

Gases Co-chair Tim Volin - Parker Hannifin

Phil Naughton - Applied Materials Facilities Co-chairs Steve Lewis - CH2M Hill Phil Naughton - Applied Materials

Gases Committee C: Tim Volin – Parker Hannifin Components SC Mohamed Saleem – Fujikin Materials & Process SC Tim Volin – Parker Hann. Contamination SC Tim Volin – Parker Hann. Mass Flow TF Mohamed Saleem - Fujikin Materials of Construction Gas Delivery Systems TF Tim Volin – Parker Hann. Filters & Purifiers TF Mohamed Saleem – Fujikin Pressure Measurement TF Justin Hough – AMAT David Colquhoun – BriskHeat Heater Jacket TF David Colquhoun – BriskHeat Gas Specifications TF Mark Ripkowski – CONSCI

Facilities Committee C: Phil Naughton – Applied Materials C: Steve Lewis – CH2M Hill Building Information Modeling (BIM) for Semiconductor Capital Equipment TF Ben Bruce – Applied Materials F51 (Elastomer) Revision TF Dalia Vernikovsky - Applied Seals

Meeting Information Last meeting Next meeting Tuesday, Oct 30, 2012, NA Fall Standards Meeting SEMI HQ in San Jose, CA Next meeting Tuesday, April 2, 2013, NA Spring Standards Meeting Check www.semi.org/standards for the latest update

New SNARFs [1] Gas Specifications TF Mass Flow TF Doc. 5504, Revision to SEMI E52-0611, Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow Controllers Additional gas codes requested Gas Specifications TF Doc. 5505, Revision of SEMI C58-0305 (Reapproved 0211) - Specifications and Guidelines for Hydrogen Correct table 1 for total ppm

New SNARFs [2] Filters and Purifiers TF Doc. 5516, Reapproval of SEMI F43-0308 Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters Doc. 5517, Reapproval of SEMI F59-0302 (Reapproved 1108) - Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves Doc. 5518, Reapproval of SEMI F67-1101 (Reapproved 1108) - Test Method for Determining Inert Gas Purifier Capacity Doc. 5519, Reapproval of SEMI F68-1101 (Reapproved 1108) - Test Method for Determining Purifier Efficiency Doc. 5520, Reapproval of SEMI F69-0708 - Test Methods for Transport and Shock Testing of Gas Delivery Systems

Ballot Results Summary Doc. 5443, Line Item Revision of SEMI C3-0812, Specifications for Gases Passed as balloted, being processed for publication

Upcoming Ballots- Cycle 1 & 2, 2013 Doc. 5446, New Standard: Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Continuous Wave Cavity Ring-Down Spectroscopy (CW-CRDS) Doc. 5504, Revision to SEMI E52-0611, Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow Controllers Doc. 5505, Revision of SEMI C58-0305 (Reapproved 0211) - Specifications and Guidelines for Hydrogen Doc. 5516, Reapproval of SEMI F43-0308 Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters Doc. 5517, Reapproval of SEMI F59-0302 (Reapproved 1108) - Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves Doc. 5518, Reapproval of SEMI F67-1101 (Reapproved 1108) - Test Method for Determining Inert Gas Purifier Capacity Doc. 5519, Reapproval of SEMI F68-1101 (Reapproved 1108) - Test Method for Determining Purifier Efficiency Doc. 5520, Reapproval of SEMI F69-0708 - Test Methods for Transport and Shock Testing of Gas Delivery Systems

Gas Specification TF Gas Specification TF/ Mark Ripkowski (CONSCI) Drafting Doc. 5505, Revision of SEMI C58-0305 (Reapproved 0211) - Specifications and Guidelines for Hydrogen To correct total impurities for grade 5.5 and 5.7 in table 1 Ballot issued in cycle 2-2013

Components Subcommittee Mass Flow TF/Mohamed Saleem (Fujikin) TF is investigating on updating the Ethernet Protocol standards for MFCs

Components Subcommittee Pressure Measurement TF/Justin Hough (Applied Materials) and David Colquhoun (BriskHeat) Drafting doc. 3440B, New Standard: Test Method For Pressure Transducers In Gas Delivery Systems Ballot will be issued for cycle 3-2013 for review at SEMICON West meeting

Contamination Subcommittee Filters & Purifiers TF/Mohamed Saleem (Fujikin) Drafting: Doc. 5446, Test Method For Determination Of Moisture Dry-Down Characteristics Of Surface-Mounted &Conventional Gas Delivery Systems By Continuous Wave Cavity Ring-Down Spectroscopy (CW-CRDS) Issued in cycle 2-2013 for review at NA Spring meeting Doc. 5244B, Revision of SEMI F21-1102 Classification of Airborne Molecular Contaminant Levels in Clean Environments TF discussed adding Dimensional specification for Sandwich filters for SEMI F36, Guide for Dimensions and Connections of Gas Distribution Components Reviewing constraints for 450 mm gas box (height). Contacting OEM (TEL, LAM) for feedback

Materials & Processes Subc Materials of Construction Gas Delivery Systems TF/ Tim Volin(Parker Hannifin) [1] TF is reviewing standards: SEMI F6-92 Guide For Secondary Containment Of Hazardous Gas Piping Systems SEMI F13-1101 Guide For Gas Source Control Equipment SEMI F14-93 (Reapproved 0699) Guide For The Design Of Gas Source Equipment Enclosures

Materials & Processes Subc Materials of Construction Gas Delivery Systems TF/ Tim Volin(Parker Hannifin) [2] Drafting: Doc. 5444, Revision of SEMI F72, Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Payer of Wetted Surfaces of Passivated 316L Stainless Steel Components Doc. 5445, Revision of SEMI F60, Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components

Materials & Processes Subc Heater Jacket TF/David Colquhoun (BriskHeat) Published SEMI F109-0212 Guide for Heater Systems Requirements The TF will start working on a different standard New Guide for Material with Temperature Range Concern on heaters have a vapor component emitted while heating, and that is being protested in Europe under Reach standards.

Facilities Committee [1] SEMI F51 Revision Task Force/Dalia Vernikovsky (Applied Seals NA) Drafting doc. 5080, Revision of SEMI F51-0200 - Guide for Elastometric Sealing Technology A review of possibilities to ‘assign’ a code of possible levels of acceptance of what o-rings can be suited for ( a rating system ) was proposed Meeting monthly End user is encouraged to participate Progress is being made.

Facilities Committee [2] Building Information Modeling (BIM) for Semiconductor Capital Equipment TF/Ben Bruce (Applied Materials) A 3-D model will work with multiple different software applications and needs to reflect true dimensions of the semiconductor fabrication tool with its location and interface point. Drafting doc. 5155, Guide for Building Information Modeling (BIM) for Semiconductor Capital Equipment Minutes posted on https://sites.google.com/a/semi.org/bim-tf/

Contact For more information, please contact Kevin Nguyen at knguyen@semi.org