North America Environmental, Health, and Safety (EHS) Committee December 2011

Outline Leadership Organization Chart Meeting Information Ballot Results Upcoming Ballots Task Force Reports Upcoming Meeting Schedule December 2011 NA EHS Liaison Report

Task Force and Leadership Changes Disbanded Task Force AMHS Safety TF December 2011 NA EHS Liaison Report

Leadership Committee Co-chairs Technical Architect Technical Editors Chris Evanston / Salus Engineering Sean Larsen / LAM Research AG Eric Sklar / Safety Guru, LLC James Beasley / ISMI Technical Architect Technical Editors December 2011 NA EHS Liaison Report

Organization Chart North America Environmental, Health, and Safety Committee Manufacturing Equipment Safety Subcommittee (MESSC) Disbanded AMHS Safety TF S6 Revision TF Ergonomics (S8) TF S13 NA Support TF (Inactive) Fire Protection (S14) TF S2 3.3 Limitations TF S18 Support TF FPD Safety System Liaison TF (Inactive) S2 Chemical Exposure TF S22 (Safe Electrical Design) TF S2 Interlock Reliability TF Lifting Equipment TF (Inactive) S25 Revision TF S2 Ladders & Steps TF S1 Update TF (Inactive) Section & Paragraph Symbol WG S2/Mach. Dir. Mapping TF S3 Revision TF S2 Non-Ionizing Radiation TF December 2011 NA EHS Liaison Report

Meeting Information Last Meeting: Next Meeting: October 27 at NA Standards Fall 2011 Meetings Santa Clara, CA (Applied Materials) Next Meeting: April 5 at NA Standards Spring 2012 Meetings [Tentative] San Jose, CA (SEMI Headquarters) December 2011 NA EHS Liaison Report

Published for 1011 * New * Document # Description S28-1011 Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment (formerly SEMI Draft Document 3560M) December 2011 NA EHS Liaison Report

Published for 0811 * REVISED * Document # Description S26-0811 Environmental, Health, and Safety Guideline for FPD Manufacturing System (Revisions related to § 8, “Evaluation for Design Review and Inspection”) * REAPPROVED * Document # Description SEMI S24-0306 (Reapproved 0811) Safety Guideline for Multi-Employer Work Areas December 2011 NA EHS Liaison Report

Published for 0611 * REVISED * Document # Description S2-0310c Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Non-Ionizing Radiation) S22-1110b Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment (Delayed Revisions related to electrical shock vs burn, transformers) December 2011 NA EHS Liaison Report

Committee Activities Document Review Summary * Cycle 6 * Doc # Description TC Action 4449C (2 LIs) Delayed Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Line Item Revisions related to Work at Elevated Locations and to Removal of Burrs and Sharp Edges 1: FAILED 2: APPROVED 4605E Line Item Revisions to SEMI S22-1110, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment Delayed Revisions on Multiple Topics 1: APPROVED 4774B Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Non-Ionizing Radiation APPROVED ballots forwarded for Procedural Review FAILED ballots returned to task force unless noted December 2011 NA EHS Liaison Report

Committee Activities New and Updated TFOFs/SNARFs New SNARF (#5357) Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment Delayed Revisions Related to Non-Ionizing Radiation To continue the efforts of the S2 Non-Ionizing Radiation Task Force as all line items in the last ballot were approved. December 2011 NA EHS Liaison Report

Committee Activities Ballots to be reviewed at NA Spring 2012 Meetings * Cycle 1 or 2 * Doc # Description TF / SC 5000 Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment Delayed Revisions Related to Interlock Reliability and Selection S2 Interlock Reliability TF 5171 Revision to SEMI S25-0706, Safety Guideline for Hydrogen Peroxide Storage & Handling Systems S25 Revision TF December 2011 NA EHS Liaison Report

Committee Activities Ballots to be reviewed at NA Spring 2012 Meetings * Cycle 2 * Doc # Description TF / SC 5009 Revisions to SEMI S8-0308, Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment (Revisions related to the SESC checklist) Ergonomics TF 5357 Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment Delayed Revisions Related to Non-Ionizing Radiation S2 Non-Ionizing Radiation TF 5170 Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment Revisions Related to Section 3.3 S2 3.3 Limitations TF December 2011 NA EHS Liaison Report

Committee Activities Subcommittees & Task Forces [1/3] SC / TF Updates AMHS Safety TF TF disbanded. Ergonomics TF Ongoing discussions to update the SESC. Reviewed a proposed new approach to handle use & evaluation. C2-12 as the earliest possible ballot attempt. S2 3.3 Limitations TF Draft revisions created during NA Fall meetings. Ballot 5170 for C2-12. S2 Chemical Exposure TF Continuing work on line items to revise S2 (air sampling, applying S6 definitions). Future discussion: 1 & 25% Thresholds. S2 Interlock Reliability TF Ballot 5000 for C1 or C2-12. S2 / EU Mach. Dir. Mapping TF Continuing discussions to address machinery directive criterions. December 2011 NA EHS Liaison Report

Committee Activities Subcommittees & Task Forces [2/3] SC / TF Updates S2 Ladders & Steps TF Rework ballot 4449C-LI1 (work at elevated locations). NA committee “straw poll” suggested in favor of changing direction to mainly informative rather than normative. S2 Non-ionizing Radiation TF New SNARF 5357 to continue TF work. To revise the optical radiation criteria to align with the changes in the external referenced standards. S6 Revision TF Continuing to develop line item revisions to S6. S25 TF Ballot 5171 for C1-12 § and ¶ Symbol WG Continuing investigation on the proper use of section and paragraph symbols in S2. December 2011 NA EHS Liaison Report

Committee Activities Subcommittees & Task Forces [3/3] Manufacturing Equipment Safety Subcommittee (MESSC) From NA Fall meetings: “NA EHS TC adopts a preference that S8 be a delayed revision document synchronized with S2.” S13 Support TF From NA Fall meetings: “NA EHS TC recommends to the S13 TF that RIs 2-8 in S13 be deleted because we cannot indicate in S13 whether the information is current or not in the RIs and so people would have to check the source documents anyway.” December 2011 NA EHS Liaison Report

NA Standards Spring 2012 Meetings April 2-5 SEMI Headquarters in San Jose, California Inviting local companies willing and able to host some of the meetings to maintain one-week format Final schedule, including meeting/hosting locations, to be announced soon December 2011 NA EHS Liaison Report

NA Standards Spring 2012 Meetings April 2-5 Sunday Monday Tuesday Wednesday Thursday Friday Saturday 1 2 3 4 5 6 7 NARSC EH&S Facilities & Gases Liquid Chemicals Information & Control MEMS/NEMS HB-LED Schedule -at-a-glance Metrics PV Materials Physical Interfaces & Carriers Silicon Wafer Traceability ATE 3DS-IC December 2011 NA EHS Liaison Report

NA Standards Staff Changes Paul Trio Sr. Manager, NA Standards Operations Operations Committees: NARSC / I&C / ATE / MEMS / Microlithography, HB-LED / 3DS-IC Meetings & Events Planning General Information STEPS/Workshops and Sponsorships Kevin Nguyen Manager, NA Standards Committees Committees: Facilities / Gases / PV / PV Automation / PV Materials / Silicon Wafer / Traceability Standards Website Provisional: Contact Paul Trio (ptrio@semi.org) or Kevin Nguyen (knguyen@semi.org) Committees: Compounds Semiconductor Materials / EHS / FPD / Liquid Chemicals / Metrics / PIC Hiring of new NA Standards staff has been completed. Official announcement by the end of the month. December 2011 NA EHS Liaison Report

Thank You! For more information or participate in any NA EHS activities, please contact Paul Trio at SEMI (ptrio@semi.org) December 2011 NA EHS Liaison Report