Information & Control Committee Japan Liaison Report Rev 0.2 April 4, 2012 To: North America Information & Control Committee

Outline Leadership and Structure Change Committee Leadership Current Committee Structure Document Review Summary Approved SNARFs Technical Ballots to be reviewed Task Force Update Meeting Information

Leadership and Structure Change Vice Chair Takehiko Ishikawa (TEL) stepped down as Japan I&C Committee Vice Chair. 3

Committee Leadership Technical Architect Committee Co-chairs Advisor Takayuki Nishimura / DNS Mitsuhiro Matsuda / Hitachi Kokusai Electric Advisor Mitch Sakamoto / TEL Technical Architect Hiroshi Kondo / Muratec Automation Tadashi Mochizuki / TEL Technical Editor TBA 4 4

Current Committee Structure Advisor M. Sakamoto (TEL) JRSC Technical Architect H. Kondo (Muratec Automation) T. Mochizuki(TEL) I&C Committee T. Nishimura (DNS) M. Matsuda (Hitachi Kokusai) Technical Editor TBA 各々の説明を入れる SEMICON/J の委員会で ・・・ これらのTFは活動がないので解散することにしました。 AMHS SEM TF H. Kondo (Muratec Automation) M. Ago (Daifuku) GEM 300 TF T. Mochizuki (TEL) M. Matsuda (Hitachi Kokusai) Equipment Information System Security (EISS) TF M. Sakamoto (TEL) Sensor Bus TF H. Ogihara (MKS Japan) New! New! 5

Document Review Summary [1/2] * Cycle 7, 2011 * Doc # Description TC Action 5194 (4 LIs) Revisions to: Line Item Revisions to SEMI E5-0611E, SEMI Equipment Communications Standard 2 Message Content (SECS-II). Correcting some errors. LI1: Correct a mismatch about ALCD’s alarm set/clear usage. LI2: Correct Message Detail of “S3,F21 Port Group Definition”. LI3: Correct reference error between “Message Detail“ and “Data Item Dictionary” LI4: Clarify usage of “S2,F37 Enable/Disable Event Report (EDER)”. 1: Passed as balloted. 2: Passed as balloted. 3: Passed as balloted. 4: Passed as balloted.

Document Review Summary [2/2] * Cycle 7, 2011 * Doc # Description TC Action 5227 Reapproval of SEMI E82-1106, Specification for Interbay/Intrabay AMHS SEM (IBSEM) Superclean 5228 Reapproval of SEMI E88-0307, Specification for AMHS Storage SEM (Stocker SEM)

Approved SNARFs at Japan Standards Meetings in conjunction with SEMICON Japan 2011 Sensor Bus TF Revision to SEMI E54.17-0706 (Reapproved 1211) Specification of Sensor/Actuator Network for A-LINK 5369 I&C Committee Reapproval of SEMI E118-1104E Specification for Wafer ID Reader Communication Interface ― The Wafer ID Reader Functional Standard: Concepts, Behavior and Service and SEMI E118.1-1104 Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards 5368 GEM300 TF Line item revision to E87-0709, SPECIFICATION FOR CARRIER MANAGEMENT (CMS). Load Port Transfer Error Indication. 5367 TC Description Doc #

Technical Ballots to be reviewed at Japan Standards Spring 2012 Meetings * Voting Period – Cycle 2 * Document # Document Title TF 5368 Reapproval of SEMI E118-1104E Specification for Wafer ID Reader Communication Interface ― The Wafer ID Reader Functional Standard: Concepts, Behavior and Service and SEMI E118.1-1104 Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards I&C Committee 5369 Revision to SEMI E54.17-0706 (Reapproved 1211) Specification of Sensor/Actuator Network for A-LINK Sensor Bus TF

Task Force Updates [1/4] Equipment Information System Security (EISS) Task Force New task force Charter This task force will develop and propose standards that define concept and required capabilities to maintain security of information system on semiconductor manufacturing equipment. Scope Develop standards for controllers of semiconductor manufacturing equipment such as process equipment, metrology equipment, material transfer equipment and so on. The standard will define; Common perception of security problems induced by malware or illegal access. Concept for protection against those security problems. Guide for required capabilities for the protection. SNARF to be proposed at Japan Spring Meeting on April 19 Guide for Equipment Information System Security

Task Force Updates [2/4] Sensor Bus Task Force New task force Charter We need to maintain existing Sensor Actuator standards originally proposed by Japan region, and also need to discuss related issues about Sensor Actuator Bus standard to get along with NA Sensor Bus TF. Scope Maintenance of existing E54 sub-documents Talking newly required or possibility to revise Sensor Actuator Bus issues. Ballot #5368 submitted to Cycle 2-12 and to be reviewed at Japan Spring Meeting on April 19 Revision to SEMI E54.17-0706 (Reapproved 1211) Specification of Sensor/Actuator Network for A-LINK Appending the ¶ 9.5 Vacuum Pump (VPD) to § 9 Specific Device Model Mappings.

Task Force Updates [3/4] GEM 300 TF Working on #5367 “Line item revision to E87- 0709, Specification for Carrier Management (CMS). Load Port Transfer Error Indication.” To issue Informational Ballot. To discuss the issues from AMHS TF (problems when AMHS deliver a carrier and internal buffer equipment execute CarrierOut.) SNARF to be proposed at Japan Spring Meeting on April 19 In E40.1, Mapping of RecID Current mapping is only RCPSPEC PPID to be added to this mapping

Task Force Updates [4/4] AMHS TF I&C Committee None. I&C Committee Ballot #5369 submitted to Cycle 2-12 and to be reviewed at Japan Spring Meeting on April 19 Reapproval Ballot of E118 and E118.1 for Cycle 2-2012 SEMI E118-1104E – Specification for Wafer ID Reader Communication Interface – The Wafer ID Reader Functional Standard: Concepts, Behavior and Service SEMI E118.1-1104 – Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards 13

Meeting Information - Japan Last Meeting Japan 2011 Winter Meeting in conjunction with SEMICON Japan December 9, 2011 13:00-17:00 @ Makuhari Messe, Chiba, Japan Next Meeting Japan 2012 Spring Meeting April 19, 2012 15:00-17:30 @ SEMI Japan Office, Tokyo, Japan Yearly schedule of Japan I&CC meeting June, September and December 7 (tentative) 14

Japan I&CC Liaison Report End of Japan I&CC Liaison Report Thank You 15