North America Information & Control Committee Liaison Report June 2011 NA I&C Report - June 2011

Outline Leadership Organization Chart Meeting Information Ballot Results Upcoming Ballot Subcommittee & Task Force Reports Upcoming Meeting Schedule STEP/Workshop NA I&C Report - June 2011

Task Force and Leadership Changes Sensor Actuator Bus SC Rich Gwizdak (Canton Control Solutions) stepped down as Sensor Bus SC co-chair James Moyne (AMAT) remains as co-chair NA I&C Report - June 2011

Leadership Committee Co-chairs Technical Architect David Bricker / Applied Materials Jack Ghiselli / Ghiselli Consulting Lance Rist / Consultant Technical Architect Gino Crispieri / ISMI NA I&C Report - June 2011

Current Committee Structure Information & Control Committee Sensor Actuator Bus Subcommittee AMHS IBSEM TF Diagnostic Data Acquisition (DDA) TF Process Control Systems (PCS) Architecture TF Data Quality (DQ) TF Sort Map TF GEM 300 TF NA I&C Report - June 2011

Meeting Information Last meeting Next meeting March 30 for NA Spring 2011 Meetings San Jose, California Next meeting July 13 for SEMICON West 2011 Meetings San Francisco, California NA I&C Report - June 2011

Document Review Summary Cycles 1 & 2 Superclean Passed as Balloted Passed with Editorial Changes Failed – Returned to Task Force Failed – Discontinued - - - 5101-LI1 4998A-LI 5102 Cycle 1 Cycle 2 E5/E30 revs Correct max item size E157 rev Recipe step clarification New E54.x Vacuum Pressure Gauges NA I&C Report - June 2011

Technical Ballots to be reviewed at SEMICON West 2011 Meetings [1/3] * Voting Period – Cycle 4 * Document # Document Title TF / SC 5176 Revisions to SEMI E151, Guide for Understanding Data Quality and SEMI E160, Specification for Communication of Data Quality Data Quality TF 4829 Revision to SEMI E139.3, XML/SOAP Binding for Recipe and Parameter Management. SOAP 1.2 Support for SEMI E139.3 DDA TF 5002 New Standard for Common EDA Metadata 5177 Revision to SEMI E145, Classification for Measurement Unit Symbols in XML 5178 Reapproval of SEMI E121, Guide for Style & Usage of XML for Semiconductor Manufacturing Applications 5179 Revision to SEMI E90.1-0706, Provisional Specification for SECS-II Protocol Substrate Tracking GEM300 TF 5180 Reapproval of SEMI E40.1-1106, SECS-II Support for Processing Management Standard NA I&C Report - June 2011

Technical Ballots to be reviewed at SEMICON West 2011 Meetings [2/3] * Voting Period – Cycle 4 * Document # Document Title TF / SC 5182 Reapproval of SEMI E54.10-0600 (Reapproved 1106), Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device Sensor Bus SC 5183 Reapproval of SEMI E54.11-1106, Specific Device Model for Endpoint Devices 5184 Reapproval of SEMI E54.12-0701E (Reapproved 1106), Specification for Sensor/Actuator Network Communications for CC-Link 5185 Reapproval of SEMI E54.16-1106, Specification for Sensor/Actuator Network Communications for LONWORKS 5187 Reapproval of SEMI E54.17-0706, Specification of Sensor/Actuator Network for A-LINK 5186 Reapproval of SEMI E54.18-1106, Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device NA I&C Report - June 2011

Technical Ballots to be reviewed at SEMICON West 2011 Meetings [3/3] * Voting Period – Cycle 4 * Document # Document Title TF / SC 5004 Revision to SEMI E54.4-0704, Standard for Sensor/Actuator Network Communication Specification for DeviceNet. Sensor Bus SC 5005 Revision to SEMI E54.13-0303, Standard for Sensor/Actuator Network Communication Specification for EtherNet/IP NA I&C Report - June 2011

Ballots to be submitted at a later cycle [1/2] * Voting Period – Cycle 4 * Document # Document Title TF / SC 4507A Revision to SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS). For fault detection enhancements PCS TF 4828 Info [ Informational Ballot ] Revision to SEMI E133, Provisional Specification for Automated Process Control Systems Interface. Line item changes to E133 to provide specification for virtual metrology. 5102A New E54.x Standard: Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges EU SANPro TF 5181 New E54.x Subordinate Standard, Standard for Sensor/Actuator Network Communication Specification for CC-Link Industrial Ethernet (IE) Field Network. Sensor Bus SC NA I&C Report - June 2011

Ballots to be submitted at a later cycle [2/2] * Voting Period – Cycle 4 * Document # Document Title TF / SC 4824B Revision to SEMI E5, Equipment Communications Standard Part 2 (SECS-II). Dynamic Equipment Variable Request GEM300 TF 5104 Revisions to: SEMI E142, Specification for Substrate Mapping SEMI E142.1, XML Schema for Substrate Mapping SEMI E142.2, SECS-II Protocol for Substrate Mapping SEMI E142.3, Web Services for Substrate Mapping Sort Map TF NA I&C Report - June 2011

I&CC Standards to Inactive Status At the March 30, 2011 NA I&C meeting, the committee approved the following documents to go into inactive status: Standard Document Title SEMI E81-0600 (Reapproved 0307) Provisional Specification for CIM Framework Domain Architecture SEMI E96-1101 (Reapproved 0307) Guide for CIM Framework Technical Architecture SEMI E97-0200A (Reapproved 0307) Provisional Specification for CIM Framework Global Declarations and Abstract Interfaces SEMI E102-0600 (Reapproved 0706) Provisional Specification for CIM Framework Material Transport and Storage Component NA I&C Report - June 2011

Task Force Updates Data Quality TF New SNARF for E151 and E160 revisions (#5176) Submitted for C4-11 Diagnostic Data Acquisition (DDA) TF New SNARFs for E145 revision (#5177) and E121 reapproval (#5178) Submitted for Cycle 4, 2011 together with New Standard for Common EDA Metadata (#5002) E139.3 revision to add SOAP 1.2 (#4829, from RaP TF) Recommended to NA I&CC that CIM Framework standards due for 5-Year Review should be moved into inactive status: E81, E96, E97, and E102 NA I&C Report - June 2011

Task Force Updates [continued] GEM300 TF New SNARFs + Balloted for C4-11 E90.1 revision (#5179) to remove provisional status E40.1 reapproval (#5180) SEMI E95 (Specification for Human Interface for Semiconductor Manufacturing Equipment) is due for 5-Year Review Gather input and discuss again at SEMICON West Action Items 4998A  Address what should happen if the stepcount integer limit is reached TF discovered that changes proposed by a ballot in 2007 on PORTACCESS in S3F21 was not applied to E5 due to possible publication error. TF leaders discussing ballot action with another E5 revision activity from Japan NA I&C Report - June 2011

Task Force Updates [continued] Process Control Systems (PCS) TF E133.1 revision (#4507A) for fault detection enhancements E133 revision (#4828) to add Related Information section on virtual metrology to be issued as an informational ballot Ballots 4507A and 4828 to be submitted at a later cycle, Cycle TBD Sort Map TF E142.x revisions (#5104) to be balloted at a later cycle, Cycle TBD NA I&C Report - June 2011

Task Force Updates [continued] Sensor Actuator Bus SC Rich Gwizdak stepped down as Sensor Bus SC co-chair New E54 subordinate standard SNARF for CC-Link Industrial Ethernet Field Network (#5181) To be submitted for Cycle 6, 2011 Ballot 5102A (Vacuum Pressure Gauges) to be submitted at a later cycle since the TF needs more time to finalize document 5-Year Review Docs + C3/C4-11 Revisions: E54.4 (DeviceNet), E54.13 (EtherNet/IP) Reapprovals: E54.10 (In-Situ Particle Monitor Device) E54.11 (Endpoint Devices) E54.12 (CC-Link) E54.16 (LONWORKS) E54.17 (A-Link) E54.18 (Vacuum Pump Device) NA I&C Report - June 2011

Other Discussions [1/2] Document 4946 New Standard: Specification for Carrier Transport Prediction. Activity originally proposed from Korea Automation & Information WG. NA I&C approved the transfer of Carrier Transport Prediction activity to Korea now that the Korea I&C Committee has been formed. New Standard Proposal on Idle Mode Communication Idle mode intent is to reduce energy consumption while equipment is not processing wafers Activity scope will involve EHS-related discussions/considerations Idle Mode Communication WG session will be scheduled during SEMICON West meeting NA I&C Report - June 2011

Other Discussions [2/2] Ballot 4824A (E5 revision) New NA I&CC SNARFs NA I&CC recognizes that SEMI E5 is used in other industries such as FPD and PV and that changes made to the standard may affect certain implementations. However, NA I&CC also anticipates future revisions to SEMI E5 as this document serves as a “library” for equipment communication messages. NA I&CC Leadership to discuss with FPD and PV co-chairs on how E5 revisions should properly be communicated and handled. New NA I&CC SNARFs Japan I&CC co-chairs requested that new SNARF's be distributed for review prior to approval.  NA I&CC co-chairs will ask all Task Forces to submit SNARF's in advance wherever possible.  SNARF's submitted in advance will be provided to GCS members for review. NA I&C Report - June 2011

NA I&CC SEMICON West 2011 Meeting Schedule [DRAFT] Monday, July 11 I&C GCS (9:00 AM to 10:30 AM) I&C Leadership (10:30 AM to 12:00 noon) PCS (1:00 PM to 3:00 PM) GEM300 (1:00 PM to 6:00 PM) Data Quality (3:00 PM to 6:00 PM) Tuesday, July 12 DDA (8:00 AM to 12:00 noon) Sensor Bus (1:00 PM to 3:00 PM) Sort Map (3:00 PM to 5:00 PM) Wednesday, July 13 I&C Committee (8:00 AM to 5:00 PM) Meetings to be finalized AMHS IBSEM TF Idle Mode Communication WG session San Francisco Marriott Marquis Hotel San Francisco, CA NA I&C Report - June 2011

NA Standards Staff Changes Paul Trio Sr. Manager, NA Standards Operations Operations Committees: I&C, ATE, NARSC, 3DS-IC, HB-LED Meetings & Events Planning General Information New: MEMS Microlithography STEPs/Workshops and Sponsorships Ian McLeod Manager, NA Standards Committees Committees: Compounds Semiconductor Materials / EHS / FPD / Liquid Chemicals / PIC Metrics Membership Kevin Nguyen Committees: Facilities / Gases / PV / PV Automation / Silicon Wafer Traceability NA I&C Report - June 2011

Thank You! For more information or participate in any NA I&C activities, please contact Paul Trio at SEMI (ptrio@semi.org) NA I&C Report - June 2011

Back-up NA I&C Report - June 2011

NA I&CC Discussion of Japan I&CC (March 31,2010) Liaison Report [1/2] Japan I&CC provided a liaison report for the NA I&CC meeting on March 31, 2010 Slide 10 of the Japan I&CC report provided a status update of old business items Upon review of slide 10 of the Japan I&CC liaison report, the NA I&CC committee has provided the response on the next page NA I&C Report - June 2011

NA I&CC Discussion of Japan I&CC (March 31,2010) Liaison Report [2/2] “…interest in EDA is fading” Perhaps the Japan I&CC meant “…interest in EDA Standards development is fading”? The EDA standards are very mature and a new freeze is anticipated that will take advantage of improvements made to the standards. Additional change to the core EDA requirements is unnecessary Capabilities have been added to the EDA standards suite to ease the transition to a new generation of data collection. This includes the recently approved ballots to map SECS IDs to EDA and to improve the trace data collection capability The only anticipated work is more guidance toward complete and uniform equipment metadata – content rather than format and structure. The legacy implementation of SECS/GEM is unique to our industry and a dead end. EDA represents a move to modern and more powerful technology needed to support future generations of fab applications. Fab deployment of EDA is well underway with OEMs that have ready to deploy implementations. Interest in EDA deployment is actually accelerating due to new fab construction triggered by the end of the recent industry slowdown. NA I&C Report - June 2011