Plasma Chamber Spectrographic Data Acquisition and Archival

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Presentation transcript:

Plasma Chamber Spectrographic Data Acquisition and Archival SFR Workshop November 8, 2000 Timothy D. Duncan, Costas Spanos Berkeley, CA 2001 GOAL: To Provide a growing data archive for ongoing research. 11/8/2000

Motivation OEM Rainbow Plasma Chamber has few metrology sensors. More metrics are needed to better predict effects of recipe parameters on overall wafer processes. Cost of many individualized experiments is prohibitive. Looks forward to APC using feed-forward and feedback control loops. 11/8/2000

The Metrology Equipment Installed PC System SECS Port Cable ZScan Port Cable Fiber-Optic Optical Lens ZScan Sensor 11/8/2000

Labview Interface 11/8/2000

Archival System N E T W O R K Database Registry Database Store Data Gathering Process Data Gathering Process Database Store Data Gathering Process Data Gathering Process Archive User Interface (GUI) Archive User Interface (GUI) Archive User Interface (GUI) Archive User Interface (GUI) Data Gathering Process Data Gathering Process Data Gathering Process Data Gathering Process 11/8/2000

Archive Interface 11/8/2000

System Block Diagram N E T W O R K Data PC Archiving LAM5 Rainbow Advanced Energy ZScan RF Data Capture Data Archiving System PC Data Capture Processes LAM5 Rainbow Plasma Etcher SECS Ocean-Optics Spectroscopic Data Capture 11/8/2000

Provide real-time Advanced Processing Control. AEC/APC Future Goals Provide real-time Advanced Processing Control. Extend the functionality by providing custom run definitions for designed experiments. Provide advanced alarm function reporting utilizing database archive. 11/8/2000

Integrate the system into the networked lab AEC/APC system. 2002 and 2003 Integration Goals Integrate the system into the networked lab AEC/APC system. Provide feedback and feed forward control at factory level of automation. Provide online browsing of advanced alarm reporting of archived database. 11/8/2000