Fig. 7. (Color online) XPS spectrum of W–Os–Ru (51 at Fig. 7. (Color online) XPS spectrum of W–Os–Ru (51 at. % W) in the as-deposited state. The inset region for W 4f peaks indicates that the alloy surface is partially oxidized. All peaks for major species are labeled. Other peaks can be attributed to core levels of W, Os, or Ru. Additional W–Os–Ru alloy compositions yielded similar spectra. J. Vac. Sci. Technol. A 33, 021405 (2015); http://dx.doi.org/10.1116/1.4905499 © 2015 American Vacuum Society