Laboratory: A Typical Evaporation Process

- Open evaporator.

- Remove wafer holder.

- This is where the wafers will be during the evaporation process.

- Remove the bell jar.

- Prepare metal: e. g., use metal wire.

- The metal will be placed in a "basket".

- Some evaporators use a "coil" instead of a "basket".

- Both metal and basket/coil should be cleaned.

- They should then be dried in the dehydration oven.

- The basket/coil should be installed between the two electrodes, and the metal placed inside the basket or around the coil.

- Move shutter to cover the filament.

- Put on the bell jar.

- Carefully load the wafers onto the wafer holder.

- One of the wafers may be a "test" wafer for measuring the metal layer thickness.

- Replace the wafer holder back on top of the bell jar.

- Place the cover back onto the bell jar.

- Lower pressure ( ~ 10-6 Torr ).

- Heat the filament to evaporate the metal.

- Cool and remove wafers.

- The test wafer allows measurement of film thickness.