North America Automated Test Equipment Committee Liaison Report June 2011

Current Committee Structure Automated Test Equipment Committee C: Ajay Khoche / Consultant Standard Test Data Format (STDF) TF L: Ajay Khoche / Consultant Test Cell Communications TF L: Len van Eck / LTX Credence L: Mark Roos / Roos Instruments June 2011 NA ATE Committee

Leadership Committee Co-chairs Ajay Khoche (Consultant) June 2011 NA ATE Committee

Meeting Information Last meeting Next meeting July 14, 2010 at SEMICON West San Francisco, California Next meeting July 13, 2011 at SEMICON West San Francisco, California June 2011 NA ATE Committee

Task Force Updates Standard Test Data Format (STDF) TF Ballot #4782B was submitted for the Cycle 3, 2011 voting period and achieved the 60% return rate Both ballots #4782 and #4782A previously failed to reach the 60% return rate requirement Ballot #4782B will be adjudicated at SEMICON West 2011 Teradyne has granted a world-wide royalty-free license of STDF and any intellectual property rights, to SEMI to use, distribute, modify and support STDF June 2011 NA ATE Committee

Task Force Updates Test Cell Communications TF No recent Standards activities June 2011 NA ATE Committee

NA ATE Standards due for Five-Year Review SEMI Document Title Status G79 Specification for Overall Digital Timing Accuracy Two NA ATE committee members volunteered to review and determine whether this standard needs to be revised. Update: No responses have been received by SEMI staff to date. Committee to discuss next step/action for G79 and G80 at SEMICON West. G80 Test Method for the Analysis of Overall Digital Timing Accuracy for Automated Test Equipment G84 Specification for Strip Map Protocol NA ATE allowed G84 and G85 to go into inactive status. G85 Specification for Map Data Format G78 Test Method for Comparing Automated Wafer Probe Systems Utilizing Process-Specific Measurements Ballot 5011A was submitted for the Cycle 3 voting period and achieved the 60% return rate requirement. Ballot 5011A will be adjudicated at SEMICON West. June 2011 NA ATE Committee

Thank You! For more information or participate in any NA ATE activities, please contact Paul Trio at SEMI (ptrio@semi.org) June 2011 NA ATE Committee

Back-up June 2011 NA ATE Committee

NA ATE Standards due for Five-Year Review SEMI Document Title Status G79 Specification for Overall Digital Timing Accuracy Two NA ATE committee members volunteered to review and determine whether this standard needs to be revised. G80 Test Method for the Analysis of Overall Digital Timing Accuracy for Automated Test Equipment G84 Specification for Strip Map Protocol NA ATE suggested to contact Dave Huntley, Sort Map TF leader, for inputs. Dave Huntley recommended that G84 and G85 be allowed to go into inactive status since E142 offers clear and preferred alternative. Also recommended for G81 to go into inactive status. NA ATE to determine course of action at SEMICON West meeting. G85 Specification for Map Data Format G78 Test Method for Comparing Automated Wafer Probe Systems Utilizing Process-Specific Measurements NA ATE suggested to contact PIC and I&C Committees to determine whether there is interest in updating this document. If there is no interest, the committee suggested to withdraw this standard. June 2011 NA ATE Committee

Task Force Updates Standard Test Data Format (STDF) TF TF Leader: Ajay Khoche (Consultant) Charter: Extend the Standard Test Data Format to enable a new fail datalog standard for storing Structural test fail datalog for yield enhancements June 2011 NA ATE Committee

Task Force Updates Standard Test Data Format (STDF) TF (cont’d) Scope: Definition: Complete the definition and review of Memory fail datalog Facilitate maintenance and evolution of the format with emerging needs Validation: Validation test case generation Facilitating validation of the standard through beta sites Deployment Development of standard API for Reading/Writing STDF V4-2007 records Development of reference flow specification Development of tools for interoperability certification of readers and writers Optimization: Development of Benchmarks and tools for interoperability certification of readers and writers Enabling information generation and propagation through the diagnosis loop for optimal flow enablement using STDF June 2011 NA ATE Committee

NA ATE Committee Meeting February 23 TC Meeting Highlights: Approved formation of the Test Cell Communications Task Force Standard Test Data Format (STDF) Task Force Updates Discussed NA ATE documents due for Five-Year Review Japan ATE Committee Updates Staff Report June 2011 NA ATE Committee

New NA ATE Task Force Test Cell Communications Task Force Charter: To develop and define standard communications methods with in the test cell Scope: The task force will examine existing methods of communication, define data sources and data consumers within the test cell with the intent to streamline and standardize the way equipment creates and shares data Initial activity will include the examination of the following documents: For the low level comm (ethernet): SEMI E37 and E37. For message format: SEMI E5 For message content: SEMI E39 For the model: SEMI E30,E122 Leadership: Len van Eck (LTX) Mark Roos (Roos Instruments) June 2011 NA ATE Committee

NA ATE Meeting at SEMICON West 2009 Attendance: 10 Discussion topics included: Overview of the SEMI Standards process Overview of the SEMI Special Interest Group (CAST) and its role in SEMI Standards Background information on its working groups and current activities Formation of the Standard Test Data Formation (STDF) Task Force and approval of Memory STDF activity (SNARF #4782) New standard proposal on ATE Test Programs Management Staff and liaison reports June 2011 NA ATE Committee