PURE Mid-Semester Project Report Mark Kraman Qingyi Wang Wen Huang’s Research Group

General Ambition of the Research Develop Self-Rolled Up Membrane Nanotubes Passive RFIC applications Inductors, Capacitors, Transformers Use the slap bracelet analogy to explain how this 3D structure is fabricated using an ingenious 2D method Explain the broad goal of Wen’s research Briefly introduce my personal place within the research group

Specific Goals to Accomplish Reduce pinhole count in SiNx layer Integrate inductor core by deposition of ferromagnetic permalloy (Ni/ Fe/ Mo/ Mn) Integrate graphene contact pads Explain in depth the specific tasks I am to accomplish, explaining the purpose of each tasks within the greater goal of the research of my mentor

Progress to Date Gain access to MNTL and MRL tools Preliminary Trials For all processes in nanofabrication Lithography Deposition Etching Preliminary Trials Follow group members to learn processes Work through process to create inductors

Cu Thin Film Resistivity vs. Nano-morphology Goals Increase the conductivity of Cu Thin Film --Reduce the energy loss --Speed up the transmission of signals

Progress Gaining Accesses to MNTL Cleanroom and MRL Gaining Accesses to Deposition Machines Thermal Deposition (Cooke) E-beam Evaporator ----

Understanding the properties of Cu thin film Pure Copper Thickness Deposition pressure Deposition rate Composite Copper Multiple Metal layers(CuI thin films) Doping(Partial Oxidation)