Status of ALD on (8”x8”) MCPs/Substrates Jan

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Presentation transcript:

Status of ALD on (8”x8”) MCPs/Substrates Jan 17 2012 Anil Mane, Jeffrey Elam Go to ”Insert (View) | Header and Footer" to add your organization, sponsor, meeting name here; then, click "Apply to All"

Issues: No. Items Comments 1 Process uniformity Resolved 2 Rs tuning On going 3 Deposition time 6-7 hrs 4 Precursor consumption Need constant baby sitting 5 Bare MCP substrate cleaning TBD 6 Bare MCP Rs measurement (if electrode deposited) 1 hrs 7 ALD MCP Rs measurement 1-2 hrs

MCP photo after chem. -2 thickness NU issue resolved Technically: Right range of Rs To conducting recipe Looks very uniform deposition appearance Go to ”Insert (View) | Header and Footer" to add your organization, sponsor, meeting name here; then, click "Apply to All"

MCP photo after chem. -2 thickness NU issue resolved When measured fully shows conducting? MCP cut and re-measured (electrode ?)

MCP photo after chem. -2 thickness NU issue resolved When measured fully shows conducting? Pore arrangement, corner pores

MCP photo after chem. -2 thickness NU issue resolved When measured fully shows conducting? MCP cut and re-measured (electrode ?)

IV data Dimension = 6.5”x6” MCP cut and re-measured (electrode ?) Resistance = 17.8 M for 251cm2 MCP 11 M for 400cm2 MCP MCP area = 251 cm2

IV data Courtesy: UCB Resistance = 17.8 M for 251cm2 MCP Resistivity = 3.8e8 -cm 11 M for 400cm2 MCP I think we are going in right range of Rs for MCP Try more and more depositions