Different composition of AgCu alloy

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Presentation transcript:

Different composition of AgCu alloy The Study of Material and Electrical Properties of Ag-Cu alloy thin films applied on RRAM Sample Different composition of AgCu alloy V AgCu SiO2 TiN XRD Ag(111) Ag(111) Cu(111) Cu(111) TiN AgCu SiO2 Switching layer Ag42Cu58 Ag49Cu51 Electrical results XPS Ag49Cu51 Ag Cu specimen1 42 58 specimen2 49 51 specimen3 (25) (75) Ag49Cu51 & Ag42Cu58 &Ag25Cu75 Ag42Cu58 Preliminary summary 1.The more Cu in composition, the more stable in I-V sweep. 2.The coexistence of unipolar and bipolar I-V sweep appears in all three composition. (Ag25Cu75) C.C. 5mA