The development process Arno Sprengers Senior Team leader Precision Mechanics, ASML 21 October 2017

Verification and Validation The development process Detail model NXE machine Standaard V-model Verification and Validation System Level specification V Concept of operations Operation and maintenance System validation From system to component It begins with writing the system specifications. From there, step by step lower so that a (group) developer (s) can start to turn this into a design. Requirements and architecture System verification and validation NXE Waferstage (Sub)system Specification Integration test and verification (Sub)system integration Detail design NXE Positioning Module Implementation Module level specification Module level integration V-model The V model is used to visualize and structure the relationship between all phases within the development process. It is important to close each phase, because it must be a base for the next phase. Assy >> Mono Mono component level

Proper cooperation gives the best quality. Specification phase Performance Specification It starts with defining all the specifications. Describe all the necessary specifications of the machine, assembly and component. Think about: Performance Cost Values to be tested Reliability Manufacturability Serviceability

Proper cooperation gives the best quality. Design phase KNOWLEDGE SHARING Knowledge sharing: Process improvement through knowledge sharing. The way to a First time right design. Engineering Constrains Cost Constrains New Manufacturing Constrains Measuring Constrains Testing Constrains Manufacturability : Choose the correct manufacturing process and use the correct design constraints of the chosen process. Use design constrains of chosen manufacturing process Manufacturability >> Specification Design Check on Manufacturability: Software check from CAD program. Concept Detail Dimensions DfX Conceptueel design: First ideas, sketches of the design. - Design Review - Detail design: Define all details of the design. - Critical Design Review - Detailing: Add all dimensions. Make drawing? Add all dimensions in the model. - Detailing Review -

Proper cooperation gives the best quality. Producing phase Engineering Constrains Cost Constrains Manufacturing Constrains Sourcing Supply chain Manufacturability : Input experienced knowledge in the KSC campus. Measuring Constrains Testing Constrains Use design constrains of chosen manufacturing process Select supplier Manufacturability >> Manufacturability proto Specification Design Proto Concept Detail Dimensions DfX Information Produce Measure Supplier Forward Information : Consulting the information with the chosen supplier. - Review Acceptance by Supplier - Producing: Produce first products and record possible problems. - Review Evaluation Report - Measuring: Measuring all dimensions of the product. - Review Evaluation Report -

Proper cooperation gives the best quality. Test and R4V phase KNOWLEDGE SHARING Engineering Constrains Cost Constrains Manufacturing Constrains Sourcing Supply chain Measuring Constrains Testing Constrains Use design constrains of chosen manufacturing process Select supplier Manufacturability >> Manufacturability proto Specification Design Proto Testing Production Concept Detail Dimensions DfX Information Produce Measure Supplier Ready For Volume Testing: Testing first products and see if everything meets the requirements. - Review Test Results - Produce Volume: After producing product meet R4V requirements. - Review R4V requirements -

Proper cooperation gives the best quality. Pricing KNOWLEDGE SHARING Engineering Constrains Cost Constrains Manufacturing Constrains Sourcing Supply chain Measuring Constrains Testing Constrains Use design constrains of chosen manufacturing process Select supplier Manufacturability >> Manufacturability proto Specification Design Proto Testing Production Concept Detail Dimensions DfX Information Produce Measure Supplier Ready For Volume Spec Designer estimate Cost calculation Supplier offer Cost specification: It is very important to start a design phase with a thoughtful price budget. So the designer can choose the right process for his design. Costing is defined during the design phase, see the influence in the picture. Designer estimate: The designer has to choose the right manufacturing process so afterwards the specification price and the design estimate looks the same. Cost calculation: It is wise to make a cost calculation so you can judge the offer from the supplier.

Proper cooperation gives the best quality. Pricing KNOWLEDGE SHARING Engineering Constrains Cost Constrains Manufacturing Constrains Sourcing Supply chain Measuring Constrains Testing Constrains Use design constrains of chosen manufacturing process Select supplier Manufacturability >> Manufacturability proto First time right: It is a challenge to end up with a first time right design, but going through all the steps is not easy. Certainly all the steps will help you to reach your goal. Specification Design Proto Testing Production Concept Detail Dimensions DfX Information Produce Measure Supplier Ready For Volume Spec Designer estimate Cost calculation Supplier offer First time to market: Sometime it is very important to be the first on the market with a new machine. In that case risks have to be taken. First time to market First time right Continues improvement Continues improvement: In case of ‘first time to market’ continues improvement will bring you to a right design .

Knowledge Sharing Centre To bring the design process closer to the manufacturing process we try to setup the Knowledge Sharing Centre Join and share info@knowledgesharingcentre.com www.knowledgesharingcentre.com