전자와 시편의 상호작용(비탄성산란) 2θ Incident Beam (Primary electron) Backscattered electron Auger electron Secondary electron(SEM) Cathodoluminescence X-ray Absorbed electron Specimen 2θ Transmitted electron(TEM)

전자와 시편의 상호작용 Types of Signal Produced Electrons: SE, BE, Auger-E Secondary Electron: from the specimen surface(below 50eV) Backscattered Electron: from the specimen(more than 50eV) Auger Electron: created after the absorption of X-rays Electromagnetics Radiation: X-ray

Elastic and Inelastic Scattering

Elastic and Inelastic Scattering Elastic scattering: backscattered electron beam electron interacts with the electrical field of the nucleus resulting in a change in the direction of the beam without a significant change in the energy of the beam Inelastic scattering: secondary electron, Auger electron beam electron interacts with the electric field of electron(c.b electron) resulting in a transfer of energy to the specimen atom Change in the direction of the beam

Dimensions of the Specimen interaction Volume Shape of the specimen-beam interaction volume depends on: 1. Energy of the beam electron: the higher the energy of the beam electron is, the greater the penetration

Dimensions of the Specimen interaction Volume 2. Atomic Number of the Specimen:

Secondary Electron Both Beam Electrons and Backscattered Electrons Generate Secondary Electrons 3-4 times more SE are generated by BE

Bohr Model of the Atom The relationship between energy and state Ground state and Excited state

X-ray Generation X-rays are electromagnetic radiation(10-3 ~ 10nm wl.) Characteristic X-ray: -result when the primary electron ejects electrons from the inner shells of the spc. Atom

K X-ray Generation

L X-ray Generation

Types of X-rays Produces

Auger Electron

전자와 시편의 상호작용