SEM Pictures of Wafers Without Photoresist

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Presentation transcript:

SEM Pictures of Wafers Without Photoresist Nancy’s Personal Fancy Presentation of … SEM Pictures of Wafers Without Photoresist Wafers from dates 7/22/08 and 5/20/08

Wafer from 7/22/08

Comments: SEM Image Dots for Nancy 7/22/08 User: Date: Sample ID: Sample Description: Location on Wafer:* * All orientations given assuming the flat of the wafer is down, or facing you Comments: Lili Hsu 7/25/08 7/22/08 Etched, no photoresist DEEP 10 min Center The sides of all these dots are straighter than they appear in the pictures. A combination of the angle of the wafer and a very slow slide (due possible to the wafer slowly charging up?) makes the dots look shorter and the sides more tapered than they acutally are.

Comments: SEM Image Dots for Nancy 7/22/08 User: Date: Sample ID: Sample Description: Location on Wafer:* * All orientations given assuming the flat of the wafer is down, or facing you Comments: Lili Hsu 7/25/08 7/22/08 Etched, no photoresist DEEP 10 min Right

Comments: SEM Image Dots for Nancy 7/22/08 User: Date: Sample ID: Sample Description: Location on Wafer:* * All orientations given assuming the flat of the wafer is down, or facing you Comments: Lili Hsu 7/25/08 7/22/08 Etched, no photoresist DEEP 10 min Top

Comments: SEM Image Dots for Nancy 7/22/08 User: Date: Sample ID: Sample Description: Location on Wafer:* * All orientations given assuming the flat of the wafer is down, or facing you Comments: Lili Hsu 7/25/08 7/22/08 Etched, no photoresist DEEP 10 min Left

Comments: SEM Image Dots for Nancy 7/22/08 User: Date: Sample ID: Sample Description: Location on Wafer:* * All orientations given assuming the flat of the wafer is down, or facing you Comments: Lili Hsu 7/25/08 7/22/08 Etched, no photoresist DEEP 10 min Bottom

Wafer from 5/20/08

Comments: SEM Image Dots for Nancy 5/20/08 User: Date: Sample ID: Sample Description: Location on Wafer:* * All orientations given assuming the flat of the wafer is down, or facing you Comments: Lili Hsu 7/25/08 5/20/08 Etched, no photoresist DEEP 10 min Center

Comments: SEM Image Dots for Nancy 5/20/08 User: Date: Sample ID: Sample Description: Location on Wafer:* * All orientations given assuming the flat of the wafer is down, or facing you Comments: Lili Hsu 7/25/08 5/20/08 Etched, no photoresist DEEP 10 min Right

Comments: SEM Image Dots for Nancy 5/20/08 User: Date: Sample ID: Sample Description: Location on Wafer:* * All orientations given assuming the flat of the wafer is down, or facing you Comments: Lili Hsu 7/25/08 5/20/08 Etched, no photoresist DEEP 10 min Top

Comments: SEM Image Dots for Nancy 5/20/08 User: Date: Sample ID: Sample Description: Location on Wafer:* * All orientations given assuming the flat of the wafer is down, or facing you Comments: Lili Hsu 7/25/08 5/20/08 Etched, no photoresist DEEP 10 min Left

Comments: SEM Image Dots for Nancy 5/20/08 User: Date: Sample ID: Sample Description: Location on Wafer:* * All orientations given assuming the flat of the wafer is down, or facing you Comments: Lili Hsu 7/25/08 5/20/08 Etched, no photoresist DEEP 10 min Bottom