ION ENERGY DISTRIBUTIONS TO PARTICLES IN CORONA DISCHARGES

Slides:



Advertisements
Similar presentations
STARTING MECHANISMS FOR HIGH PRESSURE METAL HALIDE LAMPS * Brian Lay**, Sang-Hoon Cho and Mark J. Kushner University of Illinois Department of Electrical.
Advertisements

PLASMA ETCHING OF EXTREMELY HIGH ASPECT RATIO FEATURES:
REACTION MECHANISM AND PROFILE EVOLUTION FOR CLEANING AND SEALING POROUS LOW-k DIELECTRICS USING He/H 2 AND Ar/NH 3 PLASMAS Juline Shoeb a) and Mark J.
ION ENERGY DISTRIBUTIONS IN INDUCTIVELY COUPLED PLASMAS HAVING A BIASED BOUNDARY ELECTRODE* Michael D. Logue and Mark J. Kushner Dept. of Electrical Engineering.
CONTROL OF ELECTRON ENERGY DISTRIBUTIONS AND FLUX RATIOS IN PULSED CAPACITIVELY COUPLED PLASMAS* Sang-Heon Song a) and Mark J. Kushner b) a) Department.
CONTROL OF ELECTRON ENERGY DISTRIBUTIONS IN INDUCTIVELY COUPLED PLASMAS USING TANDEM SOURCES* Michael D. Logue (a), Mark J. Kushner (a), Weiye Zhu (b),
MODELING OF H 2 PRODUCTION IN Ar/NH 3 MICRODISCHARGES Ramesh A. Arakoni a), Ananth N. Bhoj b), and Mark J. Kushner c) a) Dept. Aerospace Engr, University.
OPTIMIZING THE PERFORMANCE OF PLASMA BASED MICROTHRUSTERS* Ramesh A. Arakoni, a) J. J. Ewing b) and Mark J. Kushner c) a) Dept. Aerospace Engineering University.
MULTISCALE SIMULATION OF FUNCTIONALIZATION OF SURFACES USING ATMOSPHERIC PRESSURE DISCHARGES * Ananth N. Bhoj a) and Mark J. Kushner b) a) Department of.
NUMERICAL INVESTIGATION OF WAVE EFFECTS IN HIGH-FREQUENCY CAPACITIVELY COUPLED PLASMAS* Yang Yang and Mark J. Kushner Department of Electrical and Computer.
EFFECT OF PRESSURE AND ELECTRODE SEPARATION ON PLASMA UNIFORMITY IN DUAL FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS * Yang Yang a) and Mark J. Kushner.
SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS* Sang-Heon Song a) and Mark J. Kushner b) a) Department of Nuclear Engineering.
FUNCTIONALIZATION OF SURFACES BY PLASMAS AT LOW AND HIGH PRESSURE* Ananth N. Bhoj, a) Natalia Babaeva, b) and Mark J. Kushner b) a) Dept. of Chemical and.
1 Particle-In-Cell Monte Carlo simulations of a radiation driven plasma Marc van der Velden, Wouter Brok, Vadim Banine, Joost van der Mullen, Gerrit Kroesen.
WAVE AND ELECTROSTATIC COUPLING IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMAS UTILIZING A FULL MAXWELL SOLVER* Yang Yang a) and Mark J. Kushner b) a) Department.
FLUORINATION WITH REMOTE INDUCTIVELY COUPLED PLASMAS SUSTAINED IN Ar/F 2 AND Ar/NF 3 GAS MIXTURES* Sang-Heon Song a) and Mark J. Kushner b) a) Department.
SiO 2 ETCH RATE AND PROFILE CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS* Sang-Heon Song a) and Mark J. Kushner b) a) Department of Nuclear.
THE WAFER- FOCUS RING GAP*
PLASMA DISCHARGE SIMULATIONS IN WATER WITH PRE-EXISTING BUBBLES AND ELECTRIC FIELD RAREFACTION Wei Tian and Mark J. Kushner University of Michigan, Ann.
WAFER EDGE EFFECTS CONSIDERING ION INERTIA IN CAPACITIVELY COUPLED DISCHARGES* Natalia Yu. Babaeva and Mark J. Kushner Iowa State University Department.
MAGNETICALLY ENHANCED MULTIPLE FREQUENCY CAPACITIVELY COUPLED PLASMAS: DYNAMICS AND STRATEGIES Yang Yang and Mark J. Kushner Iowa State University Department.
EDGE EFFECTS IN REACTIVE ION ETCHING: THE WAFER- FOCUS RING GAP* Natalia Yu. Babaeva and Mark J. Kushner Iowa State University Department of Electrical.
 Poisson’s equation, continuity equations and surface charge are simultaneously solved using a Newton iteration technique.  Electron energy equation.
STREAMER DYNAMICS IN A MEDIA CONTAINING DUST PARTICLES* Natalia Yu. Babaeva and Mark J. Kushner Iowa State University Department of Electrical and Computer.
LOW-k DIELECTRIC WITH H2/He PLASMA CLEANING
INVESTIGATIONS OF MAGNETICALLY ENHANCED RIE REACTORS WITH ROTATING (NON-UNIFORM) MAGNETIC FIELDS Natalia Yu. Babaeva and Mark J. Kushner University of.
MODELING OF MICRODISCHARGES FOR USE AS MICROTHRUSTERS Ramesh A. Arakoni a), J. J. Ewing b) and Mark J. Kushner c) a) Dept. Aerospace Engineering University.
MODELING OF MICRODISCHARGES FOR USE AS MICROTHRUSTERS Ramesh A. Arakoni a), J. J. Ewing b) and Mark J. Kushner c) a) Dept. Aerospace Engineering University.
Aspect Ratio Dependent Twisting and Mask Effects During Plasma Etching of SiO2 in Fluorocarbon Gas Mixture* Mingmei Wang1 and Mark J. Kushner2 1Iowa State.
STREAMER INITIATION AND PROPAGATION IN WATER WITH THE ASSISTANCE OF BUBBLES AND ELECTRIC FIELD INITIATED RAREFACTION Wei Tian a) and Mark J. Kushner b)
OPTIMIZATION OF O 2 ( 1  ) YIELDS IN PULSED RF FLOWING PLASMAS FOR CHEMICAL OXYGEN IODINE LASERS* Natalia Y. Babaeva, Ramesh Arakoni and Mark J. Kushner.
SIMULATION OF POROUS LOW-k DIELECTRIC SEALING BY COMBINED He AND NH 3 PLASMA TREATMENT * Juline Shoeb a) and Mark J. Kushner b) a) Department of Electrical.
VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE*
PLASMA DYNAMICS OF MICROWAVE EXCITED MICROPLASMAS IN A SUB-MILLIMETER CAVITY* Peng Tian a), Mark Denning b), Mehrnoosh Vahidpour, Randall Urdhal b) and.
TRIGGERING EXCIMER LASERS BY PHOTOIONIZATION FROM A CORONA DISCHARGE* Zhongmin Xiong and Mark J. Kushner University of Michigan Ann Arbor, MI USA.
Yiting Zhangb, Mark Denninga, Randall S. Urdahla and Mark J. Kushnerb
OPTIMIZING PULSE WAVEFORMS IN PLASMA JETS FOR REACTIVE OXYGEN SPECIES (ROS) PRODUCTION* Seth A. Norberg a), Natalia Yu. Babaeva b) and Mark J. Kushner.
SPACE AND PHASE RESOLVED MODELING OF ION ENERGY ANGULAR DISTRIBUTIONS FROM THE BULK PLASMA TO THE WAFER IN DUAL FREQUENCY CAPACITIVELY COUPLED PLASMAS*
SiO2 ETCH PROPERTIES AND ION ENERGY DISTRIBUTION IN PULSED CAPACITIVELY COUPLED PLASMAS SUSTAINED IN Ar/CF4/O2* Sang-Heon Songa) and Mark J. Kushnerb)
ATMOSPHERIC PRESSURE PLASMA TRANSFER OF JETS AND BULLETS ACROSS DIELECTRIC TUBES AND CHANNELS* Zhongmin Xiong (a), Eric Robert (b), Vanessa Sarron (b)
EXCITATION OF O 2 ( 1 Δ) IN PULSED RADIO FREQUENCY FLOWING PLASMAS FOR CHEMICAL IODINE LASERS Natalia Babaeva, Ramesh Arakoni and Mark J. Kushner Iowa.
PLASMA SURFACE INTERACTIONS FOR ATMOSPHERIC PRESSURE FUNCTIONALIZATION OF POLYMERS Mark J. Kushner Iowa State.
DEVELOPMENT OF ION ENERGY ANGULAR DISTRIBUTION THROUGH THE PRE-SHEATH AND SHEATH IN DUAL-FREQUENCY CAPACITIVELY COUPLED PLASMAS* Yiting Zhanga, Nathaniel.
CONTROL OF ELECTRON ENERGY DISTRIBUTIONS THROUGH INTERACTION OF ELECTRON BEAMS AND THE BULK IN CAPACITIVELY COUPLED PLASMAS* Sang-Heon Song a) and Mark.
DRY ETCHING OF Si 3 N 4 USING REMOTE PLASMA SOURCES SUSTAINED IN NF 3 MIXTURES* Shuo Huang and Mark J. Kushner Department of Electrical Engineering and.
PROPERTIES OF UNIPOLAR DC-PULSED MICROPLASMA ARRAYS AT INTERMEDIATE PRESSURES* Peng Tian a), Chenhui Qu a) and Mark J. Kushner a) a) University of Michigan,
Consequences of Implanting and Surface Mixing During Si and SiO 2 Plasma Etching* Mingmei Wang 1 and Mark J. Kushner 2 1 Iowa State University, Ames, IA.
An Estimation of Critical Electron Density at Just Starting Breakdown in Gases Mase. H Professor Emeritus of Ibaraki University.
HIGH FREQUENCY CAPACITIVELY COUPLED PLASMAS: IMPLICIT ELECTRON MOMENTUM TRANSPORT WITH A FULL-WAVE MAXWELL SOLVER* Yang Yang a) and Mark J. Kushner b)
Chenhui Qu, Peng Tian and Mark J. Kushner
INVESTIGATING THE ROLE PROCESS NON-IDEALITY IN THE ATOMIC LAYER ETCHING OF HIGH ASPECT RATIO FEATURES* Chad Huard and Mark J. Kushner University of Michigan.
PLASMA DYNAMICS AT THE IONIZATION FRONT OF HIGH
University of Michigan, Ann Arbor, MI, 48109, USA
DOE Plasma Science Center Control of Plasma Kinetics
Yiting Zhang and Mark J. Kushner
Amanda M. Lietza and Mark J. Kushnerb
Sang-Heon Songa) and Mark J. Kushnerb)
ENGINEERING THE FOCUS RING*
PLASMA PROPAGATION THROUGH POROUS BONE SCAFFOLDING*
Amanda M. Lietz, Seth A. Norberg, and Mark J. Kushner
IONIZATION WAVE DYNAMICS OF A PLASMA JET IN CONTACT WITH LIQUID WATER*
CONTROLLING REACTIVE OXYGEN AND NITROGEN SPECIES (RONS) PRODUCTION BY ATMOSPHERIC PRESSURE PLASMA JETS USING GAS SHIELDS* Seth A. Norberga), Ansgar Schmidt-Blekerb),
Flux and Energy of Reactive Species Arriving at the Etch Front in High Aspect Ratio Features During Plasma Etching of SiO2 in Ar/CF4/CHF3 Mixtures* Soheila.
Z. Andy Xiong and Mark J. Kushner University of Michigan
MODELING OF MICRO-DIELECTRIC BARRIER DISCHARGES
SURFACE CORONA-BAR DISCHARGES
ELECTRON CURRENT EXTRACTION
CONTROL OF ION ACTIVATION ENERGY TO SURFACES IN ATMO-
BREAKDOWN CHARACTERISTICS
Presentation transcript:

ION ENERGY DISTRIBUTIONS TO PARTICLES IN CORONA DISCHARGES Natalia Yu. Babaeva and Mark J. Kushner University of Michigan Department of Electrical Engineering and Computer Science Ann Arbor, MI 48109 USA http://uigelz.eecs.umich.edu mjkush@umich.edu nbabaeva@umich.edu 36th IEEE International Conference on Plasma Science San Diego, California May 31 – June 5, 2009  ICOPS2009_Natalie_01

University of Michigan Institute for Plasma Science & Engr. AGENDA Ion energy and angular distributions (IEADs) to particles and surfaces in corona discharges Description of the model IEAD on particles Effects of particles on streamer dynamics Particle permittivity Streamer polarity IEADs to polymer surfaces Summary University of Michigan Institute for Plasma Science & Engr. ICOPS2009_Natalie_02

ION ENERGY AND ANGULAR DISTRIBUTIONS (IEAD) There is interest in adapting commodity corona-streamer discharges to high value processing – including functionalization of polymer beads for biomedical applications. Ion energy and angular distributions (IEAD) to particles suspended in atmospheric pressure plasma are important to activating surface chemistry. Example: Biodegradable porous beads are used for drug delivery and gene therapy. Beads are 10s µm in diameter Functionalized Porous Bead for Protein Binding sites (www.ciphergen.com) University of Michigan Institute for Plasma Science & Engr. ICOPS2009_Natalie_03

University of Michigan Institute for Plasma Science & Engr. GOALS OF PRESENT STUDY Evaluate ability of atmospheric pressure corona streamer discharges to activate surfaces through ion bombardment. Investigate typical ion activation energies (i.e., IEADS) delivered to surfaces of particles and polymer sheets. “Particle” can be in the form of a bacterium…Required ion energies for sterilization typically  3 eV(?) Investigation performed with results from 2-dimensional plasma hydrodynamics model with kinetic simulation of ion transport. C. violaceum bacterial cells exposed to plasma K. G. Vandervoort, N. Abramzon and G. Brelles-Mariño, Trans. Plasma Science 36 1236 (2008) University of Michigan Institute for Plasma Science & Engr. ICOPS2009_Natalie_04

MODELING PLATFORM: nonPDPSIM Poisson’s equation: Transport of charged and neutral species: Surface Charge: Electron Temperature Radiation transport and photoionization: University of Michigan Institute for Plasma Science & Engr. ICOPS2009_Natalie_05 5 5

DESCRIPTION OF THE PCMC MODULE IEADs to surfaces are derived using the Plasma Chemistry Monte Carlo Module – a kinetic simulation of ion transport. Pseudo-particles (ions and neutrals) are launched from sites near the particle in the streamer channel determined by electron impact and heavy particles production rates. Monte Carlo techniques are used to advance their trajectories in time varying electric fields while accounting for elastic and inelastic collisions. The energy and angles of particles as they strike surfaces are recorded to provide a time averaged IEAD. Electric potentials computed on the unstructured nonPDPSIM mesh are interpolated onto a rectilinear structured mesh that overlays the unstructured mesh. University of Michigan Institute for Plasma Science & Engr. ICOPS2009_Natalie_06

GEOMETRY AND CONDITIONS 0.5 mm 50 µm Positive and negative corona - rod (rc= 0.07 cm) to grounded metal (gap = 2 mm), 2-d unstructured mesh. Humid air: N2/O2/H2O = 79.5/19.5/1.0 , particle: 45 m University of Michigan Institute for Plasma Science & Engr. ICOPS2009_Natalie_07

POSITIVE STREAMER INTERSECTING PARTICLE Space Charge (2 x 1013 cm-3,1 dec) Close-up Positive streamer is a conductive channel outlined by positive space charge. Streamer envelopes small particle. Some amount of charge is removed from the streamer by particle. Positive corona, N2/O2/H2O = 79.5/19.5/1.0, particle: 45 m, /0=2 1 mm [O2+] (5 x 1013 cm-3, 3 dec) Close-up MIN MAX Cathode Animation Slide-GIF University of Michigan Institute for Plasma Science & Engr. 0-2.5 ns 0.9-2.4 ICOPS2009_Natalie_08

CHARGE ON PARTICLE AND E-FIELD LINES (/0=2) Charge (-2x1014 to 4x1013 cm-3) CHARGE ON PARTICLE AND E-FIELD LINES (/0=2) E-field Double layer of negative and positive charge is formed at the bottom of the particle. Electric field lines terminate at the bottom negative charges until positive and negative charges dissipate. Wake forms above particle. Positive corona, N2/O2/H2O = 79.5/19.5/1.0, particle: 45 m, /0=2 Animation Slide-GIF MIN MAX 1.5-2.5 ns University of Michigan Institute for Plasma Science & Engr. ICOPS2009_Natalie_09

IEAD ALONG PARTICLE SURFACE O2+ Flux Lines O2+ Upper surfaces receive higher ion energy. Two group of ions: Thermalized (low energy and high angle) and fast (up to 8-10 eV, accelerated by corona fields near local normal). Grazing angles for ions to bottom surfaces. Positive corona in air, particle 45 m, /0=2 Animation Slide-GIF University of Michigan Institute for Plasma Science & Engr. MIN MAX ICOPS2009_Natalie_10

University of Michigan Institute for Plasma Science & Engr. /0 = 2 Close-up PARTICLE DYNAMICS /0 = 2 vs /0 = 80 E/N (8 to 800 Td) 1 mm Low permittivity particle is enveloped by streamer. Secondary streamers can be launched from underside of high /0 particle due to high polarization. Positive corona, N2/O2/H2O = 79.5/19.5/1.0, particle: 45 m /0 = 80 Close-up Animation Slide-GIF MIN MAX University of Michigan Institute for Plasma Science & Engr. ICOPS2009_Natalie_11 0-2.5 ns 0.9-2.4 ns

CHARGE ON PARTICLE AND E-FIELD LINES (/0= 80) Charge (-2x1014 to 4x1013 cm-3) E-field CHARGE ON PARTICLE AND E-FIELD LINES (/0= 80) For high /0 particle positive charges envelope the particle partially shielding electric field. High refraction of electric field lines at the particle boundary. Double layer of positive and negative charge is formed at the bottom of the particle. Positive corona, N2/O2/H2O = 79.5/19.5/1.0, particle: 45 m, /0=80 Animation Slide-GIF MIN MAX University of Michigan Institute for Plasma Science & Engr. 1.5-2.5 ns ICOPS2009_Natalie_12

University of Michigan Institute for Plasma Science & Engr. IEAD on PARTICLE /0=2 vs /0=80 O2+ Flux /0=2 /0=80 More energetic and more symmetric distribution of ions for particle /0=80. Effect is attributed to ion striking the surface at near normal angles . Positive corona, N2/O2/H2O = 79.5/19.5/1.0, particle: 45 m O2+ O2+ 1.5-2.5 ns Animation Slide-GIF University of Michigan Institute for Plasma Science & Engr. MIN MAX ICOPS2009_Natalie_13

NEGATIVE STREAMER INTERSECTING PARTICLE Charge (-4x1014 to 7x1013 cm-3) E-field [O2+ ] (4x1013 cm-3 , 3 dec) 1 mm More diffusive and wider negative streamer. Wake forms underneath the particle. All process are analogous but in reverse direction to positive corona. Negative corona, N2/O2/H2O = 79.5/19.5/1.0, particle: 45 m, /0=2 Animation Slide-GIF 1.1-2.4 ns University of Michigan Institute for Plasma Science & Engr. MIN MAX ICOPS2009_Natalie_14

IEADs FROM NEGATIVE AND POSITIVE STREAMERS O2+ flux O2+ IEAD, Positive corona, /0=2 IEAD, negative corona, /0=2 O2+ flux Animation Slide-GIF O2+ Mirror distributions of ion energies. University of Michigan Institute for Plasma Science & Engr. MIN MAX ICOPS2009_Natalie_15

University of Michigan Institute for Plasma Science & Engr. CORONA DISCHARGE TREATERS Pulsed atmospheric corona discharges treat commodity polymers [e.g., poly-propylene] Low capital cost High volume Low product value High reliability Tantec, Inc. Streamers 10s – 100s mm (Ref: Enercon) University of Michigan Institute for Plasma Science & Engr. ICOPS2009_Natalie_16

POSITIVE CORONA POLYMER TREATMENT Geometry [O2+ ] (5x1013 cm-3 , 3 dec) 1 mm /0=2.2 Streamer plasma is filamentary and treats surface uniformly only due to the spatial averaging of many discharges. Streamer spreads on polymer as charges shield potential. Positive corona, N2/O2/H2O = 79.5/19.5/1.0 Animation Slide-GIF University of Michigan Institute for Plasma Science & Engr. MIN MAX ICOPS2009_Natalie_17

IEAD ON POLYMER SURFACE Electric field (kV/cm) 1 2 3 High energy ions (up to 30 eV) strike the polymer surface due to compression of potential and surface charges. Positive corona, N2/O2/H2O = 79.5/19.5/1.0 Animation Slide-GIF University of Michigan Institute for Plasma Science & Engr. MIN MAX ICOPS2009_Natalie_18

University of Michigan Institute for Plasma Science & Engr. CONCLUDING REMARKS The IEAD on particles in the channel of positive and negative corona discharges in humid air were investigated. Large sheath potential generated as the streamer passes the particle. Two groups of ions strike the particle: Thermal low energy-high angle ions Energetic ions up to 10 eV can strike the particle The polarity of discharge and permittivity of particle determine the character of the IEAD. The ion energy to polymer surfaces can be as high as 30 eV due to sheath formation…large enough for surface activation. University of Michigan Institute for Plasma Science & Engr. ICOPS2009_Natalie_19