The Thermal Annealing Effect on The Residual Stress and Mechanical Property in The Compressive stressed DLC Film H. W. Choi, M. -W. Moon, T. -Y. Kim2,

Slides:



Advertisements
Similar presentations
Residual Stress Behavior of DLC Film in Humid Environment Young-Jin Lee a),b), Tae-Young Kim a), Kwang-Ryeol Lee a), In-Sang Yang b) a)Future Technology.
Advertisements

Humidity Dependence of Tribological Behavior of DLC Film Se Jun Park *#, Kwang-Ryeol Lee *, Seung-Cheol Lee * and Dae-Hong Ko # * Korea Institute Science.
Environmental Dependence on Tribological Behavior of Diamond-like Carbon Films with Nano-undulated Surface Jin Woo Yi a,b, Se Jun Park a, Kwang-Ryeol Lee.
Comparative Study of Diamond- like Carbon Films Deposited from Different Hydrocarbon Sources Se Jun Park, Kwang-Ryeol Lee Future Technology Research Division.
Be/FS joining for ITER TBM Ryan Matthew Hunt FNST Meeting August 18, 2009 A collaboration between UCLA, SNL-Livermore, Brush-Wellman, Axsys Inc. and Bodycote.
Kwang Yong Eun, Ki Hyun Yoon b)
Introduction SiC substrate Process Expitaxial graphene on Si – face Expitaxial graphene on C – face Summary Graphene synthesis on SiC.
Techniques of Synthesizing Wafer-scale Graphene Zhaofu ZHANG
Metal-free-catalyst for the growth of Single Walled Carbon Nanotubes P. Ashburn, T. Uchino, C.H. de Groot School of Electronics and Computer Science D.C.
Effect of Environmental Gas on the Growth of CNT in Catalystically Pyrolyzing C 2 H 2 Minjae Jung*, Kwang Yong Eun, Y.-J. Baik, K.-R. Lee, J-K. Shin* and.
of Diamond-like Carbon Thin Film
CYCLIC LOAD CAPACITY AND ENDURANCE LIMIT OF MULTI-RING MASONRY ARCHES Clive Melbourne, Adrienn Tomor Jinyan Wang School of Computing, Science and Engineering,
KIT – University of the State of Baden-Wuerttemberg and National Research Center of the Helmholtz Association Thermal stability of the ferromagnetic in-plane.
Uncertainties in Thermal Barrier Coating Life Prediction by Karl A. Mentz A Thesis Submitted to the Graduate Faculty of Rensselaer Polytechnic Institute.
S. J. Parka),b) K.-R. Leea), D.-H. Kob), J. H. Hanc), K. Y. Eun a)
Comparison of Field Emission Behaviors of Graphite, Vitreous Carbon and Diamond Powders S. H. Lee, K. R. Lee, K. Y. Eun Thin Film Technology Research Center,
For example, adhesive wear occurs frequently during tribo-test under aqueous condition. Residual Stress of a-C:H Film in Humid Environment Young-Jin Lee.
Alban REMILLIEUX3 rd ILIAS-GW Annual General Meeting. London, October 26 th -27 th, New coatings on new substrates for low mechanical loss mirrors.
Comparison of Elastic Modulus of Very Thin DLC Films Deposited by r. f
In this study, it has been found that annealing at ambient air at 500 ˚C of DC sputtered Mo bilayer produce MoO x nanobelts. Evolution of MoO x nanobelts.
Li-Mn-O Thin Film Cathode prepared at Room Temperature Thin Film & Battery Materials Lab. National Research Lab. Kangwon Nat’l Univ. Jeong-Kyu Lim a, Hyeon-Young.
Comparative Study of Diamond- like Carbon Films Deposited from Different Hydrocarbon Sources Se Jun Park, Kwang-Ryeol Lee Future Technology Research Division.
Effect of hemocompatibility on the surface properties of Si incorporated diamond like carbon films. R. K. Roy*, S. J. Park*, K.-R. Lee*, D. K. Han**, J.-H.
Stability of Diamond-like Carbon Films in Aqueous Environment Kwang-Ryeol Lee, Se Jun Park and Young Jin Lee Korea Institute of Science and Technology,
Residual Compressive Stress of Diamond-like Carbon Films : Control and Usage 이 광 렬 한국과학기술연구원 미래융합기술연구소 제이엔엘테크 세미나, 2007.
Environmental Dependence of Tribological Behavior of DLC Films Se-Jun Park and Kwang-Ryeol Lee Future Technology Research Division Korea Institute of Science.
Introduction P. Chelvanathan 1, Y. Yusoff 2, M. I. Hossain 1, M. Akhtaruzzaman 1, M. M. Alam 3, Z. A. AlOthman 3, K. Sopian 1, N. Amin 1,2,3 1 Solar Energy.
6 Advisor : 戴子堯 Advisee : 張博翔 Department of Mechanical Engineering & Institute of Nanotechnology, Southern Taiwan University of Science and Technology,
Ш.Results and discussion Ш. Results and discussion a) W Composition b) Stress and Mechanical Properties c) TEM-microstructures ШІІІ C Si substrate Ar W.
Meta-stable Sites in Amorphous Carbon Generated by Rapid Quenching of Liquid Diamond Seung-Hyeob Lee, Seung-Cheol Lee, Kwang-Ryeol Lee, Kyu-Hwan Lee, and.
Friction Behavior of DLC film with Environmental Changes Copyright, 1997 © Dale Carnegie & Associates, Inc. S. J. Park*, K.-R. Lee*, D.-H. Ko +, K. Y.
Characterization of Mechanical Properties of Thin Film Using Residual Compressive Stress Sung-Jin Cho, Jin-Won Chung, Myoung-Woon Moon and.
1 ICPMSE 2015 : 17th International Conference on Polymer Materials Science and Engineering Istanbul, Turkey, July 29-30, 2015 Authors : H.BABOU, R. FERHOUM,
Ho-Gun Kim, Seung-Ho Ahn, Jung-Gu Kim, *Se-Jun Park, *Kwang-Ryol Lee, **Rizhi Wang SungKyunKwan University, Korea *Korea Institute of Science and Technology,
From: S.Y. Hu Y.C. Lee, J.W. Lee, J.C. Huang, J.L. Shen, W.
1 Friction behaviour of diamond-like carbon films with varying mechanical properties The International Conference on Metallurgical Coatings and Thin Films.
Carbon Nanotube Growth Enhanced by Nitrogen Incorporation Tae-Young Kim a), Kwang-Ryeol Lee, Kwang Yong Eun and Kyu-Hwan Oh a) Future Technology Research.
1 ADC 2003 Nano Ni dot Effect on the structure of tetrahedral amorphous carbon films Churl Seung Lee, Tae Young Kim, Kwang-Ryeol Lee, Ki Hyun Yoon* Future.
IV. Results and Discussion Effect of Substrate Bias on Structure and Properties of W Incorporated Diamond-like Carbon Films Ai-Ying Wang 1, Kwang-Ryeol.
Korea Institute of Science and Technology Seung-Hyeob Lee, Churl-Seung Lee, Seung-Cheol Lee, Kyu-Hwan Lee, and Kwang-Ryeol Lee Future Technology Research.
1. EXPERIMENTAL  We used n-type GaN epilayers on sapphire with carrier concentration of ~3 x cm -3.  Native oxide was removed in the NH 4 OH: H.
The International Conference of Metallurgical Coating and Thin Films ICMCTF 2003 Tae-Young Kim a)b), Kwang-Ryeol Lee a), Seung-Cheol Lee a), Kwang Yong.
Jin-Won Chung *+, Kwang-Ryeol Lee *, Dae-Hong Ko +, Kwang Yong Eun * * Thin Film Technology Research Center, Korea Institute of Science and Technology.
Curious stress reduction with W incorporation of WC-C nanocomposite films by hybrid ion beam deposition A. Y. Wang a), H. S. Ahn a), K. R. Lee a), J. P.
Thermal annealing effect of tetrahedral amorphous carbon films deposited by filtered vacuum arc Youngkwang Lee *†,Tae-Young Kim*†, Kyu Hwan Oh†, Kwang-Ryeol.
Tribological Behavior of DLC Film in Aqueous Environment Se-Jun Park, Kwang-Ryeol Lee, and Dae-Hong Ko Korea Institute of Science and Technology, P.O.Box.
ALD Oxides Ju Hyung Nam, Woo Shik Jung, Ze Yuan, Jason Lin 1.
Cathodoluminescence Properties of Silicon Thin Films Crystallized by Electron Beam Exposure P47 Advanced Display Research Center, Kyung Hee University.
Testing the adhesion of thin film to substrate
Calorimetric Studies of Fe/Pt Multilayer Thin Films Ysela L. Chiari Prof. K. Barmak David C. Berry September 16, 2005.
II. Fabrication process
Thin film depositions: the Ion Plating technique
THE EFFECT OF SPIN COATING RATE ON MICROSTRUCTURES OF CUPROUS OXIDE THIN FILM PREPARED BY SOL-GEL TECHNIQUE DEWI SURIYANI BT CHE HALIN School of Material.
A Study on Aluminum Oxide (Al2O3) Insulator Deposited by Mist-Chemical Vapor Deposition based on atmospheric pressure Dong-Hyun Kim1,Hyun-Jun Jung1 and.
Properties of hot compacted sheets from polypropylene films or fabrics
Calorimetric Studies of Fe/Pt Multilayer Thin Films
Residual Stress of a-C:H Film in Humid Environment
금속이 혼입된 비정질 탄소막 (Me-DLC)에서의 응력감소 거동 ;실험적 분석과 제일원리계산
Jung-Hae Choi, Hyo-Shin Ahn, Seung-Cheol Lee & Kwang-Ryeol Lee
금속이 혼입된 DLC 박막의 응력감소 거동 ; 제일원리계산
Stability of DLC film on stainless steel investigated by tensile-test
Ai-Ying Wang, Hyo-Shin Ahn, Kwang-Ryeol Lee*
Characterization of Mechanical Properties of Diamond-like Carbon Films by Using Residual Compressive Stress Sung-Jin Cho, Jin-Won Chung, Myoung-Woon.
압축잔류응력을 이용한 극미세 DLC박막의 탄성계수 평가
Tae-Young Kim*, Seung-Hyup Lee, Churl Seung Lee,
분자동역학 모사를 통한 비정질 탄소 필름의 원자구조 해석 : RDF를 중심으로
S15-O-13 10~14, Sep., 2006 Jeju, Korea IUMRS-ICA-2006
Jay C. Amicangelo, Ian Campbell, and Joshua Wilkins
IRG-2: MAPLE of Polymer Films for Morphology Control (DMR ) Craig Arnold, Lynn Loo, Rodney Priestley, Princeton University Substrate (Si) crystal.
Presentation transcript:

The Thermal Annealing Effect on The Residual Stress and Mechanical Property in The Compressive stressed DLC Film H. W. Choi, M. -W. Moon, T. -Y. Kim2, K. -R. Lee2, K. H. Oh 1. Materials Science and Engineering, Seoul National University 2. Future Technology Research Division, Korea Institute of Science and Technology Introduction Experimental condition Purpose of this work Deposition Annealing Intrinsic compressive stress of DLC - Prevent the growth of thick films - Cause a buckling and delamination Temperature Rapid Thermal Processing : 200-600°C R.F.PACVD + CH4 2min One of method to reduce residual stress, we studied thermal annealing effect and thermal cyclic annealing. We revealed the relation between the Thermal annealing and residual stress with mechanical properties change and interface adhesion of DLC films. + Thermal cycling annealing Tem.: 200, 300°C Time : 10, 60 min (Holding time) Si 500 μm Ar cleaning 1 min a-c:H 1400Å Time Delamination of DLC 1 min 10 min 1 min Stress reduction by cycling annealing Raman spectroscopy Experimental Results (a) as-deposited (b) 600 ° C Stress reduction by annealing Conclusion Adhesion reduction Evolution of delamination As increasing annealing temperature, • sp2 bond were progressively increased with D band to a higher and G band shift to a lower wave number. • Stress reduction were observed with adhesion deterioration until 500°C while maintained its mechanical properties. By Thermal cyclic annealing, • A Stress reached its minimum value within 1cycling or 2hour • A higher and shortest holding annealing temperature is more effective than lower and longest holding annealing temperature.