MCP Parameters Bulk Material Borosilicate glass Dielectric Const 5.8 Al2O3+ZnO Table 1: Dielectric constants [1] and resistivities [2] for Al2O3/ZnO ALD films % DEZ* exposures 10 25 33 50 Dielectric Constant 6.8 ± 0.5 6.5 ± 0.4 6.9 ± 0.3 7.2 ± 0.2 6.6 ± 0.3   Resistivity (W cm) ~1016 5x1015 5x1014 1014 1013 *) DEZ -- Diethylzinc (Zn(CH2CH3) 1. Herrmann et al, Proc. of SPIE Vol. 5715 (2005) p.159. 2. Elam et al, J. Electrochem. Soc. 150, pp. G339-G347, 2003. Bulk Material Borosilicate glass Dielectric Const 5.8 Channel Resistive Layer Material 30% Al2O3, 70% ZnO

MCP conductivity MCP resistance: R = 18-100 MW N = 5106 pores R1=R*N = (18-100 MW)x5x106 = (90-500)1012 W R1