Lecture 12 Power Devices (2)

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Presentation transcript:

Lecture 12 Power Devices (2) Si Power MOSFET VMOSFET UMOSFET DMOSFET LDMOSFET V=Vertical

DMOSFET D: Diffused

UMOSFET U=U-groove

Forward blocking capability - Gate is short to source; no surface channel p-base-n-drift-layer junction become revers-biased and supports the positive drain voltage The peak p-base doping controls VT. Typical 2-3 V. nAP=1E17/cm3

Threshold voltage (2-3V) Ideal Model: More realistic model:

Channel Resistance Pinch off at VD=VG-VT >>>>> Saturation

Specific on-resistance (DMOSFET) The ideal Ron,sp for 50 V could be 0.1 mΩ-cm2

Si LDMOSFET For wireless base-station RF power amplifier a few GHz 10-100 W power output Motorala is the primary supplier

Rscont Rp-ch-cont Rdcont RLDD Rch Rshunt Rp+-sub SiO2 n+ p-channel n p- epi p+ sub p-channel SiO2 n 1u

Equivalent Circuit of RF LDMOSFET Rd Cgd Rg GmVgs Cds Vout Cgs Vin Rs Feature Low Rg(thicker TiSi2), Rshunt(enhanced p-channel), Rs(heavier n+ source & thinner substrate) Low Cgs in ARF4 (0.6u); Low Cgd due to less gate/LDD area & shallow LDD junction; Low Cds due to buffered drain Reduced Hot-carrier effect due to lower E-field in channel, improved gate oxide, and buffered drain

Layout of Single Metal Approach (Approach1-2) 1,330um 5,400um

Approach 3-4: 2-layer metal with gate strapping L60u &L100u 1,330um 5,400um

Package of AGR19090 LDMOS Package Output Capacitor Integrated Standoff LDMOS Die Input Capacitor

Handle approach devices Si (200 m) Polyimid Si (7-50 m) Cu heat sink Solder Layouts: 50u gate finger structure 50u gate finger structure with V-groove outside the active area 3x100u gate finger with metal stack and rotated gate strips(Mot.) 5x100u with our approach

Simulation of Dummy Gated LDMOS Equal-potential line contours of conventional LDMOS (ARF3, ARF4, Motorola) Equal-potential line contours of dummy gated LDMOS

Simulation of Dummy Gated LDMOS Electric field contours of conventional LDMOS (ARF3, ARF4, Motorola) Electric field contours of dummy gated LDMOS

Electric field distribution along the surface of LDMOS, and DG-LDMOS Channel LDD LDMOS DG-LDMOS Electric field distribution along the surface of LDMOS, and DG-LDMOS

MRF284 DCIV pre/post HCI

Homework: Read and study Chapter 4 Power Device pp Homework: Read and study Chapter 4 Power Device pp.203-220 “Modern Semiconductor Device Physics”