Experimental Set-Up & Result Fabrication Process & Results MEMS-ENABLED MICRO-ELECTRO-DISCHARGE MACHINING (M3EDM) USING MICROELECTRODE ACTUATION BY HYDRODYNAMIC FORCE C. R. Alla Chaitanya and Kenichi Takahata University of British Columbia, Vancouver, Canada ABSTRACT: This paper reports a photolithography compatible micro-electro-discharge machining (µEDM) technique that is performed with microelectrode actuators driven by flow of machining fluid. The movable copper electrodes are microfabricated directly on the workpiece using a dry-film photoresist process. The suspended microelectrodes are actuated towards the workpiece using the downflow of dielectric machining fluid, initiating and sustaining the machining process. The parasitic (built-in) capacitance of the suspended device is used to form the pulse control circuit. Micromachining of stainless-steel is experimentally demonstrated with the machining voltage of 90V, achieving removal depth of 20 µm with an average surface roughness of 520 nm. Machining Principle Experimental Set-Up & Result (Left) A set-up for device characterization and µEDM test. (Below left) An optical image of the spark light captured through electrode’s holes. (Below right) Measured pulses of discharge current with an inset of single pulse close-up. M3EDM method using movable microelectrodes actuated by hydrodynamic force. Fabrication Process & Results (Left) Measured built-in capacitance vs. fluid flow velocity obtained with a fixed-fixed device. (Bottom) µEDMed structures with optical geometry obtained with a cantilever electrode. (Top) Fabrication process flow. (Right) SEM images of fixed-fixed and cantilever electrodes. Funding: Partial support by a NSREC grant Contact: takahata@ece.ubc.ca