A Novel Actuator for High-Precision Alignment in a Nano-Imprint Multi-Layers-Interconnection Fabrication Tat Joo Teo1,2, I-Ming Chen1, Guilin Yang2 and.

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A Novel Actuator for High-Precision Alignment in a Nano-Imprint Multi-Layers-Interconnection Fabrication Tat Joo Teo1,2, I-Ming Chen1, Guilin Yang2 and Wei Lin2 1School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 2Mechatronics Group, Singapore Institute of Manufacturing Technology A novel nano-positioning actuator for driving alignment stages in nano-imprint process. With flexural bearings, it offers 3 mm of stroke with ± 10 nm of positioning accuracy. This compact-sized actuator offers 60 N/Amp linear and continuous thrust force. Detailed theoretical and experimental analyses are conducted on this development. A prototype of Flexure-Based Electromagnetic Linear Actuator (FELA)