Add nitride Silicon Substrate

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Presentation transcript:

Add nitride Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

Add Poly0 Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

1st level mask (Poly0) using Photolithography Patterning through 1st level mask (Poly0) using Photolithography Patterned Photoresist Photoresist Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

Removal of Unwanted Poly0 using Reactive Ion Etching Silicon Substrate Patterned Photoresist Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

1st Oxide Deposition using LPCVD Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

2nd level mask (Dimple) using Photolithography... Patterning through 2nd level mask (Dimple) using Photolithography... and Deep RIE Photoresist Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

3rd level mask (Anchor) using Photolithography Patterning through 3rd level mask (Anchor) using Photolithography and Deep RIE Photoresist Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

Blanket un-doped polysilicon deposition(Poly1) using LPCVD... followed by PSG deposition and annealing Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

using Photolithography... Patterning through 4th level mask (Poly1) using Photolithography... and Deep RIE Photoresist Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

Deposition of 2nd Oxide Layer Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

Patterning through 5th level mask using photolithography and deep RIE Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

Patterning through 6th level mask using photolithography and deep RIE Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

Deposition of undoped polysilicon, followed by PSG hardmask layer, then anneal Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

Patterning through 7th level mask using photolithography and deep RIE Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

Patterning through 8th level mask using photolithography and liftoff, followed by removal of unwanted resist and metal in solvent bath Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved

Release of structures using HF Silicon Substrate Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved