PROPERTIES OF THIN FILMS

Slides:



Advertisements
Similar presentations
Sputtering Eyal Ginsburg WW46/02.
Advertisements

FABRICATION PROCESSES
Comparative Study of Diamond- like Carbon Films Deposited from Different Hydrocarbon Sources Se Jun Park, Kwang-Ryeol Lee Future Technology Research Division.
Diamond like carbon Muresan Mihai. Carbon Carbon is the fourth most abundant chemical element in the universe by mass The structures of eight allotropes.
1 EFFECTS OF CARBON REDEPOSITION ON TUNGSTEN UNDER HIGH-FLUX, LOW ENERGY Ar ION IRRADITAION AT ELEVATED TEMPERATURE Lithuanian Energy Institute, Lithuania.
L.B. Begrambekov Plasma Physics Department, Moscow Engineering and Physics Institute, Moscow, Russia Peculiarities, Sources and Driving Forces of.
Metal-free-catalyst for the growth of Single Walled Carbon Nanotubes P. Ashburn, T. Uchino, C.H. de Groot School of Electronics and Computer Science D.C.
Study of sputtering on thin films due to ionic implantations F. C. Ceoni, M. A. Rizzutto, M. H. Tabacniks, N. Added, M. A. P. Carmignotto, C.C.P. Nunes,
The Deposition Process
INTEGRATED CIRCUITS Dr. Esam Yosry Lec. #5.
Thin Film Deposition Prof. Dr. Ir. Djoko Hartanto MSc
McGill Nanotools Microfabrication Processes
S. J. Parka),b) K.-R. Leea), D.-H. Kob), J. H. Hanc), K. Y. Eun a)
BIAS MAGNETRON SPUTTERING FOR NIOBIUM THIN FILMS
Comparison of Field Emission Behaviors of Graphite, Vitreous Carbon and Diamond Powders S. H. Lee, K. R. Lee, K. Y. Eun Thin Film Technology Research Center,
Bringing nanomechanical
Metal photocathodes for NCRF electron guns Sonal Mistry Loughborough University Supervisor: Michael Cropper (Loughborough University) Industrial Supervisor:
1 of xx Diamond-like Carbon Thin Film with Controlled Zeta Potential for Medical Application [Nitta et. al., Diamond & Related Materials 17 (2008) ]
반도체 제작 공정 재료공정실험실 동아대학교 신소재공학과 손 광 석 隨處作主立處開眞
VTS Sputter Roll Coater
KVS 2002 Activated Nitrogen Effect in Vertically Aligned CNT Tae-Young Kim, Kwang-Ryeol Lee, Kwang-Yong Eun * Future Technology Research Division, Korea.
Progress in CsI & Diamond thin film photocathodes 5 th International Workshop on Ring Imaging Cherenkov Counters (RICH 2004) Playa del Carmen, Mexico Playa.
Sputter deposition.
Reminders Quiz#2 and meet Alissa and Mine on Wednesday –Quiz covers Bonding, 0-D, 1-D, 2-D, Lab #2 –Multiple choice, short answer, long answer (graphical.
Synthesis of diamond-like carbon films with super-low friction and wear properties A. Erdemir, O.L. Eryilmaz, and G. Fenske J. Vac. Sci. Technol. A 18(4),
Ш.Results and discussion Ш. Results and discussion a) W Composition b) Stress and Mechanical Properties c) TEM-microstructures ШІІІ C Si substrate Ar W.
Meta-stable Sites in Amorphous Carbon Generated by Rapid Quenching of Liquid Diamond Seung-Hyeob Lee, Seung-Cheol Lee, Kwang-Ryeol Lee, Kyu-Hwan Lee, and.
C. Ziebert, J. Ye, S. Ulrich, Institute for Materials Research, Forschungszentrum Karlsruhe GmbH, Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen,
Center for Materials for Information Technology an NSF Materials Science and Engineering Center Substrate Preparation Techniques Lecture 7 G.J. Mankey.
Topic: Investigation of nanocrystalline diamond films for artificial photosynthesis Patras, Greece   Violeta Popova, Christo Petkov 1.
Secondary Ion Mass Spectrometry A look at SIMS and Surface Analysis.
S. A. Giamini. Graphene A hexagonal honeycomb lattice of carbon. In its basic form it is a one-atom thick (2D) sheet. Interesting properties: Better electric.
10th ITPA conference, Avila, 7-10 Jan Changes of Deuterium Retention Properties on Metals due to the Helium Irradiation or Impurity Deposition M.Tokitani.
M.S. Hossain, N.A. Khan, M. Akhtaruzzaman, A. R. M. Alamoud and N. Amin Solar Energy Research Institute (SERI) Universiti Kebangsaan Malaysia (UKM) Selangor,
The Development of the Fabrication Process of Low Mass circuits Rui de Oliveira TS-DEM.
Carbon Nanotube Growth Enhanced by Nitrogen Incorporation Tae-Young Kim a), Kwang-Ryeol Lee, Kwang Yong Eun and Kyu-Hwan Oh a) Future Technology Research.
1 ADC 2003 Nano Ni dot Effect on the structure of tetrahedral amorphous carbon films Churl Seung Lee, Tae Young Kim, Kwang-Ryeol Lee, Ki Hyun Yoon* Future.
IV. Results and Discussion Effect of Substrate Bias on Structure and Properties of W Incorporated Diamond-like Carbon Films Ai-Ying Wang 1, Kwang-Ryeol.
Korea Institute of Science and Technology Seung-Hyeob Lee, Churl-Seung Lee, Seung-Cheol Lee, Kyu-Hwan Lee, and Kwang-Ryeol Lee Future Technology Research.
Curious stress reduction with W incorporation of WC-C nanocomposite films by hybrid ion beam deposition A. Y. Wang a), H. S. Ahn a), K. R. Lee a), J. P.
2-D Nanostructure Synthesis (Making THIN FILMS!)
K. GANAPATHI RAO (13031D6003) Presence of Mr. Sumair sir.
SPES Target Group Data…… INFN-CISAS-CNR collaboration The Ablation Ion Source for refractory metal ion beams A preliminary design.
Carbon film for electron cloud mitigation deposited by PLD.
Giuseppe Celentano, Fabio Fabbri, Angelo Vannozzi
DC Sputtering Disadvantage #1 Low secondary electron yield
P. Chaiyabin1, J. Lomon1, Prayoon Songsiriritthigul1. , P
Progress report on the internal target
Jari Koskinen, Sami Franssila
Thin film depositions: the Ion Plating technique
Preliminary R&D on Resistive DLC in China
Coatings for neutron conversion for n_TOF
Institute of Electronics, Bulgarian Academy of Sciences,
Atomic Structure Analysis of Diamond-like Carbon Films
Lecture 4 Fundamentals of Multiscale Fabrication
A.V. Rogov1, Yu.V. Martynenko1,2, Yu.V. Kapustin1, N.E. Belova1
What is XPS? XPS (x-ray photoelectron spectroscopy) is also known as ESCA (electron spectroscopy for chemical analysis). XPS provides chemical information.
PVD & CVD Process Mr. Sonaji V. Gayakwad Asst. professor
Study of vacuum stability at cryogenic temperature
Carbon-Foil for reducing first strike issues
Jung-Hae Choi, Hyo-Shin Ahn, Seung-Cheol Lee & Kwang-Ryeol Lee
Prototype Diamond-like Carbon (DLC) Stripper Foils for NPAs
1.6 Magnetron Sputtering Perpendicular Electric Magnetic Fields.
금속이 혼입된 DLC 박막의 응력감소 거동 ; 제일원리계산
Ai-Ying Wang, Hyo-Shin Ahn, Kwang-Ryeol Lee*
IC AND NEMS/MEMS PROCESSES
Department of Mathematics and Physics “E. De Giorgi”
A DLC μRWELL with 2-D Readout
Progress of DLC Resistive Electrode
Presentation transcript:

PROPERTIES OF THIN FILMS MADE BY ION BEAM DEPOSITION Resistive Coating for Gaseous Detectors May 13-14 Bari – Italy Diamond-Like Carbon and related resistive coatings for Micro-Pattern Gaseous Detectors Antonio Valentini

Ion – Solid Interactions SPUTTERING PROCESS Ion Target RCGD - Bari, May 13-14 A. Valentini

Simulated Trajectories Computer simulation: Displacement of Cu atoms due to the impact of 1.5 keV Argon ions (a) Trajectories within the entire volume of collision cascade for 10 incident particles (b,c) Transport of target atoms out of and into the designated layer (20 incident particles) (d) Trajectories of sputtered atoms (50 incident particles) 0 1 2 3 4 5 6 7 2 3 0 12 1.5 KeV Ar+ RCGD - Bari, May 13-14 A. Valentini

Ion incidence angle effects emitted particles from the target Less efficiency More efficiency Cone angle exit particles Uniform direction exit particles RCGD - Bari, May 13-14 A. Valentini

DUAL ION BEAM SPUTTERING SCHEME   DUAL ION BEAM SPUTTERING SCHEME Ar PUMPING GROUP ION BEAM SOURCE 1 (Ar/H2/O2) ASSISTANCE ION SOURCE TARGET 1 SUBSTRATE QCM TARGET 2 ION BEAM SOURCE 2 RCGD - Bari, May 13-14 A. Valentini

High Energy High Current DUAL GRIDS ION SOURCE GRIDLESS ION SOURCE High Energy High Current e- ION BEAM RCGD - Bari, May 13-14 A. Valentini

DIAMOND-LIKE CARBON (DLC) Metastable form of amorphous carbon, containing a significant fraction of sp3 bonds, which gives the structure properties similar to those of diamond. Variable features with % of sp2 bonds RCGD - Bari, May 13-14 A. Valentini

DLC IBS PREVIOUS ACTIVITY 2007-2008 IB SPUTTERING ASSISTANCE   IB SPUTTERING ASSISTANCE Temp I beam (mA) V beam (V) Ar (sccm) CH4 (sccm) I beam (mA) H2 (sccm) T (°C) 0745 60 1200 2,5 / 18,8 100 1 4 905 0752 800 20 700 0753 19,1 900 0801 off 300 0803 2 0804 600 0805 Amb 0806 0807 90 0808 0809 25 3 0810 0853 0854 150 RCGD - Bari, May 13-14 A. Valentini

CHEMICAL ANALYSIS RESULTS XPS DLC CVD DIAMOND Campioni sp2 sp3 F4 - 82 F5 81 F6 86 SAMPLES sp2 sp3 0803 17 48 0805 14 51 0807 28 40 0808 22 54 0810 20 49 0853 23 Ib Vb Ar / Ia Va CH4 Tsub 0808 60 800 2,5 / 20 90 2 900 RCGD - Bari, May 13-14 A. Valentini

APPLICATIONS In order to stabilize the photoemissive properties of the CsI 1,5 nm of IBS DLC on 20 nm of Thermal Evaporated CsI Conductive Silicon substrate RCGD - Bari, May 13-14 A. Valentini

Conductive Layer for CsI – Head-On APPLICATIONS Conductive Layer for CsI – Head-On 2016 Ion Beam Sputtering Sample Material Thickness (nm) 1532 ITO 10 1533 5 1533ox ITOox 1534 Ni C 1535 3 1536 NiC+ Ni 3+0.5 1537 C+Ni 2.5+0.5 1538 1 RCGD - Bari, May 13-14 A. Valentini

Conductive layer UV Transmittance RESULTS Conductive layer UV Transmittance Selected Layer (C 2.5 nm + Ni 0.5 nm) RCGD - Bari, May 13-14 A. Valentini

Good adhesion of DLC on Kapton Sheet Resistance of about 100 M APPLICATIONS ION BEAM SPUTTERING APPLIED FOR DLC FORMATION ON KAPTON The goals! Good adhesion of DLC on Kapton Sheet Resistance of about 100 M RCGD - Bari, May 13-14 A. Valentini

Good adhesion of DLC on Kapton To improve adhesion: Chemical surface cleaning Surface pretreatment with Ion Beam: Vb=150V - Ib=1A - (5 sccm Ar + 4 sccm H2) Scotch tape test results: Copper on Kapton DLC on Kapton No Pretreatment Pretreatment Pretreatment Scotch tape Scotch tape RCGD - Bari, May 13-14 A. Valentini

ION BEAM SPUTTERING DEPOSITION PARAMETERS Vbeam = 600 -1200 V Ibeam = 50 - 60 mA Sputtering gas: Ar (2.5 sccm) ---------------------- Vass = 50 – 150 V Iass = 0.05 – 1.2 A Assistance gas : Ar – Ar+N2 – Ar+H2 --------------------------- Film thickness = 50 – 100 nm Dep. rate = 0.010  0.017 nm/sec --------------------------------- Sample size 6x6 cm2 At now 22 samples and Parameter values have been setted for each one Starting from The Sheet Resistance values obtained on previous samples RCGD - Bari, May 13-14 A. Valentini

SHEET RESISTANCE MEASUREMENTS Two Probe Cu-bars: 6 x 0.5 x 0.5 cm3 D = 6 cm; L = 5 cm Sample on soft tissue (mouse pad) to increase contact under pressure. Orientations: Horizontal & Vertical. Insulation Tester: Megger MIT 410 Multimeter: Agilent 34401° Four Point Probe S=2 mm Circular Tool Radii r1=1 cm & r2= 2 cm RCGD - Bari, May 13-14 A. Valentini

Sheet Resistance _ Results RCGD - Bari, May 13-14 A. Valentini

Chemical Analysis _ Results XPS 1928 280 282 284 286 288 290 292 294 296 298 Binding Energy (eV) 1929 280 282 284 286 288 290 292 294 296 298 Binding Energy (eV) Sputt. 800 V 50 mA Assist. 80 V 70 mA Gas assist. (sccm) 2.1 Ar 1 H2 1928 1929 BE /eV ± 0.1 Abb% C–C (sp3) 284.7 79 C– O 285.9 13 286.0 12 C=O 287.2 5 287.3 COOH 288.6 3 288.5 4 RCGD - Bari, May 13-14 A. Valentini

Chemical Analysis _ Results XPS %C %O %N %Si %Ar %Cu 1928 78.8 14.5 2.5 3.1 1.1 -- 1929 75.1 16.4 3.4 1.0 Surface contaminations Any (or very low) contribution of Csp2 at the surface RCGD - Bari, May 13-14 A. Valentini

IB contribution in DLC formation Csp3-Csp3 or Csp3-H1s The carbon atoms Ion Sputtered from Graphite target are more likely to form sp2-hybridezed carbon bonding The Nitrogen in Assistance Beam encreases sp2- hybridized carbon bonding encreases the localized states at the Fermi level that favor the cunduction by hopping mechanisms Higher content of sp2-hybridized carbon bonding and hopping will reduce the film resistivity !! ----------------- The Hydrogen in Assiatance Beam facilitates the formation of sp3 carbon strucuture as sum of bonds Csp3-Csp3 or Csp3-H1s As the energy of Ar ions used for sputtering encreases the graphite sputtering rate encreases RCGD - Bari, May 13-14 A. Valentini

Sheet Resistance Values and Film Properties Preliminary results from Raman Analysis Rs = 0.5 M/Square  > 50 G/Square Higher Sputtering Energy Increases sp3/sp2 Higher Rs N2 assistance Does not change significantly sp3/sp2 The Lowest Rs H2 assistance Control sp3/sp2 Control Rs * Rs values nearest the 100 M/Square RCGD - Bari, May 13-14 A. Valentini

400mm in diameter substrates 16cm RF deposition source Large Area Ion Beam Deposition System 400mm in diameter substrates 16cm RF deposition source and RF neutralizers 12cm RF assist ion source. 6 x 22/30 cm RF Ion Beam Source RCGD - Bari, May 13-14 A. Valentini

Summary DLC films with controlled properties Next Step Assisted Ion Beam Sputtering has many indipendent parameters to be set and More tests are necessary but The technique is promising to grow DLC films with controlled properties Next Step Tests on the reproducibility Chemical Analysis on DLC deposited on Kapton (Raman) XPS in depth analysis Tests on the effects of CH4 in the Assistance Beam RCGD - Bari, May 13-14 A. Valentini

Thanks for the attention RCGD - Bari, May 13-14 A. Valentini