Industrialization of the DLC deposition process Atsuhiko Ochi Kobe University RCGD2019@Bari 14/05/2019

Need for industrialization Prototype  Mass production Large size production Two way for industrialization Plan A: Prototype production in institute, and then mass production in industrial company Pros: Many trial for various condition can be done in short term and low cost Cons: It is not easy to find industrial company to make it to industrialization. (Some times, we need to make new company by ourselves) Technology transfer is not so easy Plan B From prototype, made by industrial company Technology transfer is already done from beginning If we cannot find the industrial company that can make prototype, it doesn’t work Try and error cycle is slow, and it takes many costs A. Ochi, RCGD2019@Bari 14/05/2019

DLC production in China Lanzhou institute has their own spattering machine (case of plan A) Many trial and results in various case have been reported in short term It is not clear that the possibility of mass production Also, the most of industrialization process from CERN seems to be case of plan A A. Ochi, RCGD2019@Bari 14/05/2019

DLC production in JAPAN We have already use industrial process (case of plan B) Be-Sputter Co, Ltd., (Industrial company) Their sputtering chamber is made by themselves The sputtering equipment is very large There are several sputtering chambers Usually, they are work on metal sputtering For electronics devices, optical devices, surface treatment … Usually, they have not used carbon for sputtering We have collaborated with Be-Sputter for preparing carbon target and improving C sputter quality. Max size … 1m x 4.5m (foil) Be-Sputter Co. Ltd. (Kyoto Japan) A. Ochi, RCGD2019@Bari 14/05/2019

Product of Be-Sputter ITO transparent conductive film Faraday cage on plastic Etc … A. Ochi, RCGD2019@Bari 14/05/2019

For micro patterning of DLC Photo resist (reverse pattern of surface strips) We need industrial company with PCB process Photo lithography process is needed for making mask of DLC In our case, we used RAYTECH co. ltd. for patterning. @PCB company (Laytech inc.) Substrate (polyimide) Metal/Carbon sputtering @Sputtering company (Be-Sputter inc.) Substrate (polyimide) Developing the resists @PCB company (Laytech inc.) Substrate (polyimide) A. Ochi, RCGD2019@Bari 14/05/2019

Most serious problem for industrialization Most serious problem for Japanese industrial company (in our case, those are small company) is communication problem! Both Be-sputter and RAYTECH cannot trade with oversea clients They cannot make English documents Most of all engineer/technician cannot communicate with English Providing DLC materials to foreign institute, we need trading company, that is familiar with those product. In our case, REPIC is used now. For technical feedback, I have been a contact person. A. Ochi, RCGD2019@Bari 14/05/2019

Industrialization in my case I am belonging in University Kobe University is not large institute, and it is very difficult to have a production facilities When I have some idea or issues for prototype production … I look for the industrial companies to do that There is many industrial companies those who have attractive techniques. However, it is important to us that how to find it. In many case, the companies, who can take on our prototype order, is small companies. Then it is very important to survey the industrial companies Industrial exhibition is important place to find new technology and to find who can do that Keeping touch with technician and business staff of industrial companies to get news and connection for other companies After finding the industrial companies We have to keep in mind that we need costs But it is cheaper than buying all equipment for new production by our selves We have to applying external budget very often Sometimes, we arrange the special materials by our selves In the case of mass production From start, we have to estimate the ability of mass production of the industrial companies. If the company is too small to do mass production, they have some knowledge that how it works using other companies. A. Ochi, RCGD2019@Bari 14/05/2019

In our case of DLC collaboration We have both Plan A and Plan B Plan A: Prototype production in institute, and then mass production in industrial company Plan B From prototype, made it by industrial company We can proceed industrialization process (for large size production, mass production) for new technology using complementary of both plan A and B ! A. Ochi, RCGD2019@Bari 14/05/2019