NanoSource Evaporation system with flow control APPLICATIONS Analysis: Evaporation of liquid analytes, solvents, H2O... Precursor supply for vapor deposition (CVD, LPCVD, PECVD, ALD), surface treatments Operating principle : For R&D applications, low to very low flow rates (Full scale from less than SCCM to a few hundred SCCM depending on the species to be vaporized and the size of the valve) The species to be vaporized is heated in order to increase the saturation vapor pressure to a value sufficient to allow a flow rate in the process chamber. The flow rate is adjusted by means of a micrometric control valve guaranteeing good reproducibility. High operating dynamics 1:100 Temperature of the vaporized species: up to 120°C No carrier gas required Complete set directly connectable to the process chamber Compact, robust and economical system For this purpose, the pressure upstream of the valve is kept constant by a digital control loop. Two parameters can be used to influence the flow rate: the inlet pressure (set by the temperature of the species to be vaporized in relation to its vapor pressure curve) and the opening of the valve. The combination of these two settings gives the NanoSource a high flow dynamics of 1:100 Operation under vacuum or atmospheric pressure Suitable for corrosive, toxic, pyrophoric species The quantification of the flow rate is based on nitrogen-referenced charts, other more precise methods are possible: gravimetric calibration, measurement of the rate of increase of the pressure in the chamber (Rate Of Rise) Performance

Measurements : contact@omicron-technologies.com Depending on the volume characteristics, species and length of the line, some optional modules are required. Pump Electronics Purge plate ( optional) Purge gas inlet Container Purge module Spray module Heated line Process Chamber Purge plate Measurements : Flow control valve Source isolation valve Purge valve Container isolation valve To define the material, please specify: Chemical species* Chemical formula Process pressure Max/min flow rate Container volumes 50mL 200mL 400mL to be specified Length of the line 300mm 500mm 800mm to be specified Fittings ¼ ’’ compression fittings 6mm compression fittings ¼ ’’ VCR 3/8’’ – ½’’ VCR *If possible, provide us with the saturation vapor pressure curve contact@omicron-technologies.com