Investigation of Low Temperature Routes to Nitride and Oxide Materials

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Investigation of Low Temperature Routes to Nitride and Oxide Materials Rudolf J. Wehmschulte, Department of Chemistry, Florida Institute of Technology, Melbourne, FL There are several routes for the generation of aluminum oxides under non-hydrolytic conditions. We have focused on siloxanes and recently DMSO which both afford HAlO when reacted with H3Al·NMe3. Using large aryloxy substituents cyclic alumoxanes (ArOAlO·OSMe2)n were isolated. A low melting but sufficiently stable aluminum azide hydride was obtained and it is currently investigated as a precursor for the low temperature generation of aluminum nitride. Me3SiN3 50 - 240 °C H3Al·NMe3 AlN ?