Ceramic Material Grades CERAMIC Materials SiC Si3N4 AlN Y2O3 Al2O3-TiC ZrO2 SiO2 Si3N4,TiN Al2O3,TiC ZrO2,Y ZrO2,M 998 990 960 99.99 Density g/cm3 3.18 3.4 3.5 3.3 5 4.25 6.05 5.7 3.98 3.85 3.7 2.2 Hardness HV 2500 1600 1500 1100 600 2100 1250 1200 1700 1350 900 Bending Strength MPa 450 850 950 330 140 800 700 400 350 300 90 Compression Strength 3500 4000 3000 N/A 1800 2300 Fracture Toughness MPam1/2 5.2 5.5 3 1.4 6 9 Young’s Modulus Gpa 430 290 310 170 410 200 390 360 320 74 Poisson’s ratio 0.16 0.28 0.22 0.31 0.2 0.3 0.23 0.17 Thermal Conductivity W/(mK) 100 25 40 14 35 30 1.38 CTE 10-6/K 4.0 3.0 9.1 7.5 11 10 7.9 Thermal Shock ΔT 150 250 Maximum temp °C 1300 1400 500 Grain size Μm 0.7 1 2.5 Volume Resistivity Ω㎝ 105 1012 - 1014 1012- 1014- Chemical Durability Acid Excellent Good Normal Alkali Poor

Properties of SiC Grades Items CVD SIC (Directed) RBSC(Si-SiC) Measuring method Grade M T P A100 A200 A300 Density (g/cm3) 3.20 3.15 3.18 3.02 3.07 2.95 3.08 3.11~3.16 Archimedes’ method Component (wt%) SiC < 100 SiC ~ 99 B,C ~1 SiC ~90 Si ~ 15 SiC ~80 Si ~ 20 SiC ~ 90 Si ~ 10 SiC ~ 92 Si ~ 8 EDS, XRD, Density Crystal Size(um) 3 ~ 10 5~30 50~200 10 SEM Hardness (Hv) 2700 2500 1900 1500 2000 <2100 <2200 Vickers 9.8N Fracture Toughness (MPa×m1/2) 3.5 ±0.1 3.5 2.5 Indention method Bending Strength (MPa) 480 450 550 270 250 350 4 point MOR Volume Resistivity (ohm-cm) 10-1 105 101 10-2 3X10-2 2X10-1 102 4points probe, ASTM Thermal Expansion Coeff. (10-6/K) 4.0 4.3 4.5 ASTM C372 Thermal Conductivity (W/m.k) 200 150 180 100 130 ASTM C408