Multilayer Microfluidics ENMA490 Fall 2003 Brought to you by: S. Beatty, C. Brooks, S. Dean, M. Hanna, D. Janiak, C. Kung, J. Ni, B. Sadowski, A. Samuel, K. Thaker Add picture (Anne)

Problem Definition Motivation Goal BioMEMS research is growing rapidly, but restricted to single layer microfluidics Development of a multilayer microfluidic design would increase flexibility Goal Design, construct, and test a controllable microfluidic device with at least two fluid levels. Identify appropriate materials, processes, and device geometries. Add pictures. Show old and new. (Dan)

Problem Scope Requirements Constraints To make a two-level microfluidic device To incorporate active control elements Constraints Assume external fluid control Neglect biochemical reactions in channels Keep design feasible for manufacturing

Initial Material Choices Narrowing Materials Choices Desired Mechanical and electrical properties Process considerations Create materials table: rigid SU8, flexible PDMS, Pyrex and silicon as substrates. (Anne, Charles)

Project Development Map out development process (Chen, Dave)

Device Design: Stage 1 (Initial Microchannel Design Concept) Device Logic (Anne, Susan, Kunal)

Device Design: Stage 1 (Initial Microchannel Design Concept) (Anne, Susan, Kunal)

Device Design: Stage 2 (Modified Microchannel Design) Device Logic (Anne, Susan, Kunal)

Device Design: Stage 2 (Modified Microchannel Design) (Anne, Susan, Kunal)

Device Design: Stage 2 (Modified Microchannel Design) Manufacturing and experimental results (Mark, Dan)

Device Design: Stage 3 (Pressure Actuated Valve Design) Device Logic (Shawna, Charles, Bryan)

Device Design: Stage 3 (Pressure Actuated Valve Design) (Shawna, Charles, Bryan)

Device Design: Stage 3 (Pressure Actuated Valve Design) Simulation PDMS deflection (Shawna)

Device Design: Stage 3 (Pressure Actuated Valve Design) Flow modeling (Bryan, Kunal)

Device Design: Stage 3 (Pressure Actuated Valve Design) Manufacturing and experimental results (Dan, Mark)

Alternative Designs (Anne, Susan, Charles, Chen)

Future Work (Shawna)

Summary (Chen, Dave)