(Photonics and Semiconductor Electronics) 光電與半導體電子 (Photonics and Semiconductor Electronics) 薛文証 教授 工程科學及海洋工程學系

Research Topics Photonics: Semiconductor Electronics: Liquid Crystal Display (LCD) Solar Cells Light Emitting Diode (LED) Metamaterials Near-Field Optics (Nano Optics) Photonic Crystals Semiconductor Junctions High Electron Mobility Transistor (HEMT) Heterojunction Bipolar Transistor (HBT) Nano Electronics Group III-V Semiconductor Devices Chapter 1.1.1 Introduction

LCD TV Chapter 1.1.1 Introduction

TFT LCD Display Chapter 1.1.1 Introduction

LCD Display Chapter 1.1.1 Introduction

Photovoltaic Cells (Solar Cells) Chapter 5.4 Magnetic sensors

Photovoltaic Cells (Solar Cells) a. Encapsulate b. Contact Grid c. The Antireflective Coating (AR Coating) d. N-Type Silicon e. P-Type Silicon f. Back Contact Chapter 5.4 Magnetic sensors

Application of LEDs Traffic/ Railway/ Marine/ Airport Runway Signaling Automotive Exterior/ Stop-Tail-Turn Signage/ Corporate Identity Portable Lighting/ Flashlights Landscape Lighting/ Bollards Architectural Detail/ Column/ Wall Wash LCD Back Lighting/ Edge-Lit Signs Chapter 1.1.1 Introduction Source : Lumileds

Evolution of LEDs Chapter 1.1.1 Introduction Source: OSRAM

White LEDs Efficiency 220 Lumin/Watt ?? Source: OSRAM Chapter 1.1.1 Introduction Source: OSRAM

Structure of White LEDs GaAs (Eg1.42 eV) is an absorbing sub. to the AlGaInP(Eg1.88 to 2.3 eV) LED structure. GaAs with poor thermal conductivity (44 W/mK) An increase in luminous efficiency can be achieved by the DBR method, but the DBR only reflects light of near-normal incidence. GaP window layer will limit the light extraction due to with high refraction index (n~3.3>>1 or epoxy 1.4~1.5) GaAs substrate 1 DBR Active Window 3 2 Chapter 1.1.1 Introduction

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Development of Microelectronics 1948 The first transistor was invented. 1952 Shockly proposed field-effect transistor (FET). 1958 Integrated circuits (ICs) were developed. Chapter 1.1.1 Introduction

The resultant increase in the number of IC technology has developed rapidly during the past 45 years. The resultant decrease in the size of silicon processing device. (minimum: <100 nm) The resultant increase in the number of transistors contained within a single IC. (maximum: >1G) Chapter 1.1.1 Introduction

ENIAC computer in 1947 Fig. 1.1.1-1 (Van der Spiegel G2,p17 ) Chapter 1.1.1 Introduction

Miniaturized ENIAC computer ( produced in 1997) Chapter 1.1.1 Introduction Fig. 1.1.1-2 (Van der Spiegel et al.1998 G2,p18 )

Moore’s law for integrated circuits Double per 1.5 years Fig. 1.1.1-3 (T1,p2) Chapter 1.1.1 Introduction

Size reduction for DRAM Fig. 1.1.1-4 (Campbell 1996 T1,p2) Chapter 1.1.1 Introduction

Nanoelectronics Scaling Chapter 1.1.1 Introduction

Microoptical application (2/4) c. Waveguide principle 1.The indices of refraction of the surface layer and the substrate are different. 2.The light is guided along the fiber due to the total reflection within the glass interface 3.The layer structure SiO2/SiON/SiO2 can be used as a sensor element. Fig. 5.1.1-2 Waveguide in an optical microchip Chapter 5.1.1 Overview

Mach-Zehnder interferometer(1/2) 1. system consisting a. SiON waveguides b. Silicon membrane c. Photodiobes d. CMOS amplifier 2. chip size : 0.3mm x 5mm 3. membranes : 200µm x 200µm Fig. 5.1.2-9 Mach-Zehnder interferometer. According to [Fisch91] (G1 p_220) Chapter 5.1.2 Pressure sensors

Application of the Immuno sensors Principle: 1.The sensor detects the concentration of the antigens directly with an interferometric method 2.The light intensity changes are here due to the bonding process Fig. 5.7-2 Immuno-sensing using an optical transducer (G1-P252) Chapter 5.7 Biological sensors

The various materials used to cover the UV to IR range Fig. 5.3-4 some common semiconducting materials used in radiation microsensors and their dynamic range within the UV-to –IR spectrum (T1 p_243) Chapter 5.3 Radiation sensors

Photograph of photoconductive sensors CdS photoconductive sensor. ( Relatively large active area of 12mm and slow response time.) Fig. 5.3-2 example of radiation microsensors (T1 p_246) Chapter 5.3 Radiation sensors

Layout of a Hall effect magnetic microsensor (1/3) Fig. 5.4-4 Schematic layout of a Hall effect magnetic microsensor fabricated in (a) a bipolar IC process and (b) an nMOS IC process (T1 p.273) The layout of a substrate Hall plate sensor made from a bipolar process and a CMOS process. Chapter 5.4 Magnetic sensors

Fig. 1.2.2-1 Contaminant analyzer using an optical principle (Schomburg 1993 G1,p36) Chapter 1.2.2 environmental and biotechnology

Microspectrometer Fig. 1.2.2-2 (Schomburg 1993 G1,p36) Chapter 1.2.2 environmental and biotechnology

The Langmuir-Blodgett (LB) Film Fig. 2.3-2 microsensor using polymers. (g2.p266) Ferro, pyro, and piezoelectric polymer thin films Coating materials with controllable optical properties Microsensors (Chemical and Biomedical) 2.3 Ceramic, polymeric, and composite materials

END Fig. 1.3.2 (Gardner 1994 T1,p4) Chapter 1.3 Markets for microsystems

GaN HEMT http://www.ed-china.com/ART_8800016382_400001_500002_TS_46518aaf.HTM Chapter 1.1.1 Introduction

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HEMT HEMT Chapter 1.1.1 Introduction

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HEMT http://www.ed-china.com/ART_8800019585_400010_500003_TS_cdbda837.HTM Chapter 1.1.1 Introduction

HEMT http://news.soft32.com/fujitsu%E2%80%99s-technology-for-gallium-nitride-hemt_4558.html Chapter 1.1.1 Introduction

HEMT http://www.sinmat.com/technologies.php Chapter 1.1.1 Introduction

http://web.mit.edu/tpalacios/Research.htm Chapter 1.1.1 Introduction

HBT Chapter 1.1.1 Introduction http://users.ece.gatech.edu/~cressler/

http://taiwan. cnet. com/digilife/0,2000089053,20125995-20001643c,00 http://taiwan.cnet.com/digilife/0,2000089053,20125995-20001643c,00.htm Chapter 1.1.1 Introduction

HBT Chapter 1.1.1 Introduction

http://taiwan.cnet.com/digilife/0,2000089053,20125143,00.htm Chapter 1.1.1 Introduction

Chapter 1.1.1 Introduction

Single electron Transistor Chapter 1.1.1 Introduction http://nano.nchc.org.tw/dictionary/set.htm

Single electron Transistor Chapter 1.1.1 Introduction

Single electron Transistor Chapter 1.1.1 Introduction

http://psroc.phys.ntu.edu.tw/bimonth/v26/483.pdf Chapter 1.1.1 Introduction

Carbon nanotube Chapter 1.1.1 Introduction

http://gb-www. digitimes. com. tw/gate/gb/tech. digitimes. com http://gb-www.digitimes.com.tw/gate/gb/tech.digitimes.com.tw/-ifbase3-base20-U2hvd05ld3MuYXNweA~~?-base76-ekNhdElkPTE0MiZ6Tm90ZXNEb2NJZD1GMzJEOTFCMUZBQjczOEUxNDgyNTcxNjEwMDNFOUM0MQ~~ Chapter 1.1.1 Introduction

A semiconductor quantum well http://www.lanl.gov/orgs/pa/newsbulletin/2004/06/10/text02.shtml Chapter 1.1.1 Introduction

A semiconductor quantum well Chapter 1.1.1 Introduction http://www.ir-nova.se/tech/qwip.htm

https://spie.org/x8796.xml?highlight=x2408 Chapter 1.1.1 Introduction

http://www.asklight.com/article/Folder3/20070107/8535.Html Chapter 1.1.1 Introduction

http://www.asklight.com/article/Folder3/20070107/8535.Html Chapter 1.1.1 Introduction

http://www.asklight.com/article/Folder3/20070107/8535.Html Chapter 1.1.1 Introduction

http://pages.ief.u-psud.fr/QDgroup/modeling.html Chapter 1.1.1 Introduction

Semiconductor LASERS http://www.laserfocusworld.com/display_article/308742/12/none/none/Feat/SHORT-WAVE-DIODE-LASERS:-Nonpolar-gallium-nitride-laser-diodes-are-the-next-new-blu Chapter 1.1.1 Introduction

tunneling transistor http://www.allaboutcircuits.com/vol_3/chpt_2/14.html Chapter 1.1.1 Introduction

nano-techology http://google.brand.edgar-online.com/EFX_dll/EDGARpro.dll?FetchFilingHTML1?SessionID=gnd4WdQ6duMtVau&ID=4960887 Chapter 1.1.1 Introduction

Quantum compuer Chapter 1.1.1 Introduction

Quantum compuer Chapter 1.1.1 Introduction

Quantum compuer http://www.fastcursor.com/computers/quantum-computer-photo-gallery.asp Chapter 1.1.1 Introduction

quantum dot http://www.primidi.com/2005/02/12.html Chapter 1.1.1 Introduction

http://140.113.87.143/ymlab/software/tcad/tcad_overview.htm Chapter 1.1.1 Introduction

https://www.spie.org/x8882.xml?highlight=x2412 Chapter 1.1.1 Introduction

Quantum Well Infrared photo detector NASA Developing Infrared Camera For Use In Brain Surgery, Tumor Removal - Daisy Spangler Chapter 1.1.1 Introduction http://www.usmedicine.com/article.cfm?articleID=959&issueID=67

http://www.mtmi.vu.lt/pfk/funkc_dariniai/diod/led.htm Chapter 1.1.1 Introduction

Semiconductor laser http://www.mtmi.vu.lt/pfk/funkc_dariniai/diod/led.htm Chapter 1.1.1 Introduction

LASER http://www.mtmi.vu.lt/pfk/funkc_dariniai/diod/led.htm Chapter 1.1.1 Introduction

Group III-V Chapter 1.1.1 Introduction

Group III-V Chapter 1.1.1 Introduction

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