by Sanha Kim, Yijie Jiang, Kiera L. Thompson Towell, Michael S. H

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Presentation transcript:

Soft nanocomposite electroadhesives for digital micro- and nanotransfer printing by Sanha Kim, Yijie Jiang, Kiera L. Thompson Towell, Michael S. H. Boutilier, Nigamaa Nayakanti, Changhong Cao, Chunxu Chen, Christine Jacob, Hangbo Zhao, Kevin T. Turner, and A. John Hart Science Volume 5(10):eaax4790 October 11, 2019 Copyright © 2019 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. No claim to original U.S. Government Works. Distributed under a Creative Commons Attribution NonCommercial License 4.0 (CC BY-NC).

Fig. 1 Picking and placing micro objects using a ceramic-carbon SNE. Picking and placing micro objects using a ceramic-carbon SNE. (A) Schematic of a pick-and-place procedure wherein a micrometer-sized object in contact with an SNE surface can be picked up, while an external voltage is applied and placed back when the voltage is removed. (B) Schematics and scanning electron microscopy (SEM) images of a 200-μm SNE composed of Al2O3-coated carbon nanotubes (CNTs). (C) Snapshots of picking and placing an unpackaged LED chiplet (170 μm by 170 μm by 50 μm) using the Al2O3-CNT nanocomposite electroadhesive (200 μm by 200 μm by 50 μm). (D) Schematic of pull-off force measurement system using a colloidal AFM tip and load-displacement curves for a Al2O3-CNT SNE measured using a ~4-μm-diameter Pt-coated spherical tip with and without a bias voltage of 10 V. The inset SEM image shows the Pt-coated spherical tip. (E) Measured pull-off forces using the Pt-coated spherical tip against a reference surface (flat Al2O3-coated TiN; ~0.8 μN; black dashed line) and against the Al2O3-CNT SNE at different applied voltages (e.g., ~0.02 μN at 0 V and ~2.3 μN at 30 V; blue dashed line), measured by a conductive AFM. Error bars represent the SD in the set of force measurements with each applied voltage. Sanha Kim et al. Sci Adv 2019;5:eaax4790 Copyright © 2019 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. No claim to original U.S. Government Works. Distributed under a Creative Commons Attribution NonCommercial License 4.0 (CC BY-NC).

Fig. 2 Fibrous structure, roughness, and softness of SNE surface enabling switchable adhesion. Fibrous structure, roughness, and softness of SNE surface enabling switchable adhesion. (A) An SEM image of SNE showing the top entangled surface and vertically aligned fibers underneath. (B) Schematics showing structural behavior of the top surface when a microsphere is compressed and retracted (left) and showing the van der Waals force that scales with few contacting nanofibers and electrostatic attraction that scales with all the nanofibers on the SNE surface (right). (C) AFM images of the top SNE surface composed of entangled Al2O3-coated CNT fibers. The root mean square roughness within the 100-μm2 area is ~35 nm. (D) Load displacement of Al2O3-coated surfaces with and without SNE, measured by nanoindentation using a ~10-μm-diameter sapphire tip. (E) Pull-off forces of Al2O3-coated surfaces with and without SNE measured by AFM using the ~4-μm-diameter Pt-coated spherical tip. (F) Attractive pressure at distances from the Al2O3-CNT SNE surface measured using the 1.2 mm by 1.2 mm Au-coated flat tip. Sanha Kim et al. Sci Adv 2019;5:eaax4790 Copyright © 2019 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. No claim to original U.S. Government Works. Distributed under a Creative Commons Attribution NonCommercial License 4.0 (CC BY-NC).

Fig. 3 Switchable adhesion influenced by structural design and object conductivity. Switchable adhesion influenced by structural design and object conductivity. (A) Adhesion on/off ratio (ratio of pull-off force with an external voltage to that without voltage) of Al2O3-CNT SNE with different Al2O3 coating thicknesses (approximately 0.2, 1, and 10 nm) and different fiber densities (sparse and dense). (B) AFM images (top) images of CNTs coated with Al2O3 via ALD with 10 (left) and 50 (right) deposition cycles, respectively, and SEM images (bottom) of SNE top surfaces with different densities. (C) Pull-off forces against a conductive (Pt-coated; ~4 μm diameter) and a nonconductive (uncoated SiO2; ~10 μm diameter) spherical tip. (D) Schematics of polarization of conductive and dielectric objects when the SNE is in contact with the external voltage on. Sanha Kim et al. Sci Adv 2019;5:eaax4790 Copyright © 2019 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. No claim to original U.S. Government Works. Distributed under a Creative Commons Attribution NonCommercial License 4.0 (CC BY-NC).

Fig. 4 Manipulation of multiple micro/nano objects using patterned SNE. Manipulation of multiple micro/nano objects using patterned SNE. (A) A micro–pick-and-place map showing the capable object size range that can be picked (by the adhesion force estimated from Eq. 1; blue solid and dashed lines) and placed (estimated from the first term of Eq. 1; red solid line) against a general flat surface with the same coating material (estimated from eq. S2; black solid line) at different operating voltages (30 and 100 V). The dots on the top x axis are the demonstrated materials in this study. (B) An SEM image (60° tilted) of a micropatterned Al2O3-CNT SNE. (C) Optical microscope images of transfer printed polystyrene (PS) microspheres (500 nm in diameter) and (D) Ag nanowires (20 nm in diameter and <12 μm in length) on a SiO2 (thermally oxidized, 300 nm)/Si wafer. (E) An optical microscope image (30° tilted) of 5-μm SiO2 microspheres transfer printed on a polyethylene terephthalate (PET) film. Sanha Kim et al. Sci Adv 2019;5:eaax4790 Copyright © 2019 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. No claim to original U.S. Government Works. Distributed under a Creative Commons Attribution NonCommercial License 4.0 (CC BY-NC).