IN5350 – CMOS Image Sensor Design

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Presentation transcript:

IN5350 – CMOS Image Sensor Design Lecture 8 – Characterization

Contents Measurement tools QE – Quantum efficiency CG – Conversion gain RN - Readnoise DC – Dark current DSNU – Dark signal non-uniformity PRNU – Photoresponse non-uniformity VFPN – Vertical fixed pattern noise HFPN – Horizontal fixed pattern noise 03.11.2019

Recommended reading EMVA 1288 Standard for image sensor characterization https://www.emva.org/wp-content/uploads/EMVA1288-3.1a.pdf SPIE book by Jim Janesick: Photon Transfer Available at UiO PhD thesis on CIS characterization file:///Users/eier/Downloads/Utsav_jain_thesis_report.pdf SPIE paper on Raspberry Pi based camera characterization https://www.spiedigitallibrary.org/journalArticle/Download?fullDOI=10.1117%2F1.JEI.26.1.013014 03.11.2019

Integrating sphere Illuminating a sensor uniformly on all pixels Can be combined with a filter to select specific wavelength(s) 03.11.2019

Optoliner Integrating sphere + filters + optics Illumination w/test pattern 03.11.2019

Light box with Macbeth colour checker chart Illumination w/colour temperature settings Ref: RGB coordinates of Macbeth colours 03.11.2019

Monochromator Narrowband wavelength selection Spectral response measurement (QE) Reference detector DUT Monochromator principles: (i) prism, (ii) grating 03.11.2019

Quantum efficiency Definition: Probability of a pixel detecting a photon of a given wavelength (spectral sensitivity) Method: With a monochromator, step through each wavelength and measure average output pixel value, calculate back to #electrons captured, divide by #photons incident on the pixel 03.11.2019

QE remarks QE influenced by angle of incidence Wide angle => more crosstalk to neighbour pixels Using small array in the centre minimizes crosstalk Interference oscillations from optical stack Latest innovation to boost QE in NIR 03.11.2019

Photon Transfer Curve (PTC) PTC: plot of variance vs mean (in DNs, Volts, or electrons) Curve bends due to clipping near saturation Slope = CG (in DN/e-) . 2Nbit-1 Convert from DN/e- to uV/e- by multiplying with: 𝜎 𝑡𝑜𝑡 2 (DN2) . . . . . . . . . 𝑉𝑟𝑒𝑓/ 2 𝑁𝑏𝑖𝑡 ∙1/𝐴𝑠𝑓 Readnoise ... . Mean pixel value, (DN) 03.11.2019

Photon Transfer Curve Let 𝑆 𝑜𝑢𝑡 =𝛼∙ 𝑁 𝑒𝑙𝑒𝑐 +β (1) , where 𝑆 𝑜𝑢𝑡 = output pixel value (DN) 𝛼 = conversion factor (DN/e-) 𝑁 𝑒𝑙𝑒𝑐 = number of electrons captured (e-) 𝛽 = black level offset (DN) From (1), the noise output variance ( 𝜎 𝑜𝑢𝑡 2 ) can be expressed by 𝜎 𝑜𝑢𝑡 2 = 𝜎 𝑒𝑙𝑒𝑐 2 + 𝜎 𝑅𝑁 2 = 𝛼 2 𝑁 𝑒𝑙𝑒𝑐 + 𝜎 𝑅𝑁 2 (2) , where 𝜎 𝑒𝑙𝑒𝑐 2 = electron shot noise (DN2) 𝜎 𝑅𝑁 2 = readnoise floor at zero illumination (DN2) 03.11.2019

Photon Transfer Curve (cont.) From (1) we have 𝑆 𝑜𝑢𝑡 −β=𝛼∙ 𝑁 𝑒𝑙𝑒𝑐 (3) Replacing into (2) gives (4) 𝜎 𝑜𝑢𝑡 2 =𝛼 𝑆 𝑜𝑢𝑡 −β + 𝜎 𝑅𝑁 2 Deriving (4) with respect to Sout gives 𝑑 𝜎 𝑜𝑢𝑡 2 𝑑 𝑆 𝑜𝑢𝑡 =𝛼 (5) (DN/e-) Conclusion: Conversion gain (in DN/e-) is slope of output variance versus mean curve. Can be referred back to FD node by dividing by ADC gain and SF gain. 03.11.2019

PTC remarks Vary light level by changing integration time High precision from crystal oscillator Tint=0 gives readnoise value (RN) To measure mean value (x-axis), prudent to capture dark frame (black level) for each setting To measure variance (y-axis), convenient to use difference between two subsequent captures Removes black level and fixed pattern noise Remember to divide by 2 since noise variance is additive Pixel values start to clip near saturation (measurement error) For extra precision calculate variance for each pixel independently, i.e. by capturing 100-1000 pictures for each light level setting Avoids the influence of PRNU at high signal levels 03.11.2019

PTC example 03.11.2019

Dark current (DC) measurement Sources of DC Slope=DC (DN/s or e-/s) μ,pix (DN) @T=60C Tint (s) Example of bright pixels DC captures at constant temp. Source: Harvest Imaging blog 03.11.2019

Dark current measurement remarks Ensure sensor has reached a stable temperature since DC is highly temperature dependent (DC doubles every 6-8℃) Avoid light exposure (sometimes challenging) Beware of DC shading. Could be due to non-uniform doping or contaminant levels and/or heat glow from circuits nearby (e.g. high power voltage driver) Plot DC vs Tint. Slope gives DC in e-/sec. DC can be calculated as average per frame OR individually for each pixel and then averaged In the latter case, you can calculate the RMS variation of the DC. This is called the DSNU (dark signal non uniformity). DSNU sometimes artificially large due to ’outliers’ in the DC distribution (ie bright pixels or black pixels). Could be filtered out. 03.11.2019

Photoresponse non-uniformity (PRNU) As the name suggests, PRNU is a measure of the variation in responsivity from pixel to pixel It’s definition varies in the literature, but the most common is as follows Where σ50% is the rms variation of pixel mean values across the frame at 50% saturation (i.e. all the temporal noise is removed by averaging multiple frames, e.g. 100-1000 frames) 𝑃𝑅𝑁𝑈= 𝜎 50% 2 − 𝐷𝑆𝑁𝑈 2 𝜇 50% − 𝜇 𝑑𝑎𝑟𝑘 (% rms) 03.11.2019

PRNU remarks Convenient to re-use data from PTC measurements (assuming 100-1000 frames were captured for each integration time) Remove temporal noise by calculating mean (μ) for each pixel position. Use it to calculate PRNU which is spatial and fixed noise. Stack of captures each with identical setting (values vary due to temporal noise, only) 03.11.2019

Vertical Fixed Pattern Noise (VFPN) VFPN induced by col-to-col variations in Vth and parasitic couplings causing signal DC offset variations Measured by (i) capturing dark frame, (ii) averaging all rows to form one single row without temporal noise, (iii) calculate rms value of row VFPN value should be 10x smaller than RN to be invisible in image 03.11.2019

Hnoise (rownoise) Temporal noise on all pixels along one row induced by spikes on array signals or on VDD or GND during CDS readout (same noise spike on all pixels along one row) Hnoise measured similarly to VFPN, ie average all columns to remove temporal noise, then calculate rms value 03.11.2019