Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics Plasma medium: common interest to the PPRT thrust area Same fundamental knowledge reservoir Plasmas investigated vary in density and temperatures Intrinsic nonequilibrium medium Utilize fundamental knowledge in various applications Very good example of applied science Plasma Physics and Radiation Technology Experiments and modeling approach

/ Applied Physics Plasma Physics and Radiation Technology Physics and chemistry on short time and length scales Use of high power lasers for in situ and real time plasma and surface diagnostics Two groups: Research on plasma-surface interaction Plasma & Materials Processing (PMP) Research on homogeneous plasma processes Elementary Processes in Gasdischarges (EPG)

/ Applied Physics Plasma Physics and Radiation Technology CQT High phase space density plasmas Coherence & Quantum Technology DeBroglie wavelength: Phase space density: Quantum Effects become important

/ Applied Physics Plasma Physics and Radiation Technology Science & Technology of Nuclear fusion High temperature, magnetically confined plasmas Group will have experimental focus Strong collaboration with national and international facilities world wide  Fusion courses as electives in Plasma track, but also: Independent / interdisciplinary master  More details in separate presentation

/ Applied Physics General compulsory courses: 3 courses (10 ECTS): -Electrodynamics -Computational physics -Complex Analysis Compulsory track courses: 2 courses (8 ECTS): -Introduction to plasma physics -Lasers & Optics Elective track courses: 3 courses (9 ECTS) Technical and free elective courses: 4-5 courses (14 ECTS) External traineeship project of 12 weeks usually outside TU/e (19 ECTS) Master project 1 year (60 ECTS ) Plasma Physics and Radiation Technology

/ Applied Physics General compulsory courses: 3 courses (10 ECTS): -Electrodynamics -Computational physics -Complex Analysis Compulsory track courses: 2 courses (8 ECTS): -Introduction to plasma physics -Lasers & Optics Elective track courses: 3 courses (9 ECTS) Technical and free elective courses: 4-5 courses (14 ECTS) External traineeship project of 12 weeks usually outside TU/e (19 ECTS) Master project 1 year (60 ECTS) Plasma Physics and Radiation Technology

/ Applied Physics Staff: Prof.dr.ir. Gerrit Kroesen Dr.ir. Eddie van Veldhuizen Dr.ir. Sander Nijdam Dr.ir. Jan van Dijk Dr.ir. Job Beckers Dr.ir. Ana Sobota Prof.dr. Ute Ebert (CWI) Prof.dr. Marco Haverlag (Philips) Prof.dr. Vadim Banine (ASML) Elementary Processes in Gas Discharges (EPG) Light and photons: Efficient lamps and EUV sources Environmental technology: using plasmas for air / water cleaning Biomedical technology: sterilisation; new medical treatments

/ Applied Physics Plasmas in lab and industry (1) Elementary Processes in Gas Discharges (EPG)

/ Applied Physics Plasmas in lab and industry (2) Elementary Processes in Gas Discharges (EPG)

/ Applied Physics Stereo-photography of Corona discharges S. Nijdam et al., Appl. Phys. Lett (2008)

/ Applied Physics

Coherence & Quantum Technology (CQT) Extreme states of matter: Ultra-cold & ultra-hot, plasmas & gases; Laser manipulation of atoms, electrons and ions; Atom, electron & ion beams for femto-nano science & engineering. Staff: Prof. Jom Luiten Prof. Ton van Leeuwen Dr. Servaas Kokkelmans Dr. Peter Mutsaers Dr. Edgar Vredenbregt Dr. Seth Brussaard

/ Applied Physics Coherence & Quantum Technology (CQT) Ultra-Cold Electron & Ion Beams: Laser cooling & trapping; Femtosecond (10-15 s) laser physics; Ultra-low temperature ( kelvin) plasmas; Femtosecond electron microscopy; Sub-nanometer ion beam drilling & milling. Edgar Vredenbregt, Jom Luiten, Peter Mutsaers

/ Applied Physics Ultracold electron & ion beams 15 K Electron temperature e-e- ions V II Taban et al., to be published Ultracold plasmas Taban et al., Phys. Rev. Special Topics, 11, (2008)

/ Applied Physics Theory of Quantum Gases: Atoms trapped in an optical lattice; Superfluidity of ultra-cold (nano-kelvin) Fermi and Bose gases; Quantum Plasmas & Beams. Servaas Kokkelmans Coherence & Quantum Technology (CQT)

/ Applied Physics Femtosecond structural dynamics “The (bio)molecular movie...” The poor man’s X-ray Free Electron Laser Femtosecond electron imaging Phase space density = Beam Brightness

/ Applied Physics Plasma & Materials Processing (PMP) Staff: Prof.dr.ir. Erwin Kessels Dr. Ageeth Bol Dr. Adriana Creatore Dr. Richard Engeln Prof.dr. Ruud Schropp (part-time, ECN) Prof.dr. Fred Roozeboom (part-time, TNO) Prof.dr.ir. Richard van de Sanden (part-time, DIFFER) Understanding of plasma-surface interaction Nanoscale processing of materials Renewable energy technologies & nanoelectronics

/ Applied Physics Plasma & Materials Processing (PMP) Processing technologies Application areas Atomic layer deposition Plasma-enhanced CVD Plasma etching Atmospheric plasma processing Nanoelectronics Solar cells & solar fuels Flexible electronics Sensors, batteries & fuel cells Expertise Ultrathin film technologies Nanoscale processing Plasma surface interaction Plasma & surface diagnostics Advanced spectroscopy

/ Applied Physics Atomic-scale deposition for solar cells Ultrathin films by (plasma-enhanced) atomic layer deposition (ALD) Q-cells Q.ANTUM solar cell Excellent surface passivation of high-efficiency solar cells Novel nanotechnology Implementation in industry

/ Applied Physics P( , 2  )  =    (1)  E(  )    (2)  E(  ) E(  )    (3)  E(  ) E(  )  E DC  Nonlinear surface spectroscopy Ultrafast high-intensity laser system Electric field-induced second harmonic generation Polarization with non-linear contributions:

/ Applied Physics Single-digit nanopatterning Spacer-defined double patterning Nanocontacts on carbon nanotubes and graphene Graphene Nanotube Double patterning Top-down Lithography-based Bottom-up Direct-write

Waar komen onze afstudeerders terecht? Lokale industrie (ASML, Philips, NXP, FEI) Instituten (TNO, ECN, etc.) Promotieplaatsen bij diverse universiteiten (ook buitenland via de verschillende zeer internationaal georienteerde groepen) / Applied Physics

Plasma medium: common interest to the PPRT thrust area Same fundamental knowledge reservoir Plasmas investigated vary in density and temperatures Intrinsic nonequilibrium medium Utilize fundamental knowledge in various applications Very good example of applied science Plasma Physics and Radiation Technology Experiments and modeling approach