Canaux: 62 x 44 mm Manifold: 62 x 1.6 (le même que pour les tests en pression) Inlet: diam. 1.4 (au milieu du bord du rectangle, au sommet) Sensor + R/O.

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Presentation transcript:

Canaux: 62 x 44 mm Manifold: 62 x 1.6 (le même que pour les tests en pression) Inlet: diam. 1.4 (au milieu du bord du rectangle, au sommet) Sensor + R/O chips beam 27 Tentative dicing lines (62 x 76)

Pressure drop in 1 channel (100 x 100 µm): 1.4 bar Fin width 25 µm

Pressure drop in 1 channel (100 x 100 µm): 2.3 bar Fin width 100 µm

Geometry chosen Channel 100 x 100 µm Fin width 100 µm Manifold depth 280 µm

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Thinning… Adapt Nanoport position for thinning.