Cleanroom safety in McGill Nanotool fab John Li Feb-2013

Contents Purpose cleanroom safety rules Emergency procedures Summary New rules implemented Emergency procedures Summary

Purpose Reinforce the general safety policies Keys safety practices in the cleanroom New safety practices implementation

Cleanroom safety: where to start Review the Safety and Behavior video Review the Microfab's Policies Review the chemical list http://mnm.physics.mcgill.ca/content/list-chemicals-available-cleanroom (with MSDS) Review the wet benches process http://mnm.physics.mcgill.ca/content/wet-benches Review online safety training from McGill EHS unit http://cool.mcgill.ca/COOLLectureListing.aspx?Semester=TRAINING&Course=EHS

Cleanroom safety: The consequence not following rules Dangerous for yourself and other users if not follow the rule properly (HF burned examples)

Cleanroom safety: Do’s/Don’ts Always use bottle rinser to rinse/dry emptied bottle (acid/solvent) before put in pass-through and marked Always use the dedicated green glove to transfer new acid bottle to acid bench Always label your chemical in beaker (acid/solvent bench) all the times Never touch acid bench N2 gun with cleanroom gloves Never leave glassware in dump rinser after done Never leave outside of green marker area with PPE on (except for getting chemical from cabinet or pass-through)

Cleanroom safety: Do’s and Don'ts at Acid bench (I)

Cleanroom safety: Do’s and Don'ts at Acid bench (II)

Cleanroom safety: Transfer samples at wetbench Prepare your solution with PPE on Wearing Apron and cleanroom gloves(Not green gloves), and with your own tweezers, to transfer your samples on clean/dry wipes Put back on all PPE, using tweezers at wetbench to put samples in your beaker Once Etching done, rinse, dry your samples and clean/dry the bench surface as well. And put the your samples on dry/clean wipe Remove green gloves, and face shield (if you prefer), using your own tweezers to put the samples in your petri dish

Cleanroom safety: Pictorial steps of transferring samples at wetbench Before Etch Prepared Acid solution with PPE on Remove green gloves, transfer your sample With your own tweezers to clean/dry wipe After Etch Once finished your work, Put back PPE to Rinse/dry your samples and clean bench Then remove green gloves, with cleanroom gloves transfer your samples from wipes to petri dish with your own tweezers

Cleanroom safety: Cleanup A clean wetbench is a safe wetbench Wet Bench checklist: Return all chemicals to their proper storage area Dispose of any used chemicals Rinse out all containers you have used (graduated cylinders, beaker, etc.) and remove them from sink after rinse Clean and dry the wetbench surfaces

Cleanroom safety: Transfer chemical bottles from pass-through to wetbench Use the dedicated green gloves (which clamped by pass-through Do NOT use cleanroom gloves

Cleanroom safety: green gloves in the proper position and order Gloves for Metal bench Gloves for Acid bench

Cleanroom safety: cleanup Gloves for Site Coater Gloves for Laurell coater

Cleanroom safety: Chemical disposal Solvent and resist (To solvent waste container) Acid and Base (TMAH) (cool down and dump in drain) Metal etchant (dedicated waste containers) Empty bottles of Acids and Solvents (rinse, mark and put in pass-through)

Emergency Procedures: Evacuation (I) Should any of the following situations occurs: • Ventilation system failure (ie., fresh air/exhaust systems/cleanroom power failure) • Large chemical spill • Fire alarm sounded • or should any other imminently dangerous situation present itself

Emergency Procedures: Evacuation (II) Must take the following actions IMMEDIATELY: • WARN anyone within their immediate area of the danger. • TURN OFF any equipments being used via the safest manner if possible. • EXIT the fab in a calm, orderly manner via: • INFORM Fab Personnel OR call McGill Security by dialing 3000

Emergency Procedures Accidental contact with a chemical Remove contaminated clothing and flush with cold water for at lease 15 minutes. The extent of any injury, even if no injury seems apparent, MUST be evaluated by a medical doctor immediately In case of HF, gently massage calcium gluconate ointment into skin. This material in the NanoLab First Aid Kit

Emergency Procedures: Fire safety When you hear a fire alarm you must immediately exit the Clean Room through the closest emergency exit doors (No need to remove clean room bunny suits). Trigger an alarm if it is possible when a fire occurs in cleanroom

Report to staff immediately when There is abnormal smell or odour There is strange noise/sound There is gas/water leak Or any other abnormal situations

Summary Clean fab is a safe fab All users in the microfab are expected to take steps to ensure that health and safety of other lab members will not be endangered. Every users are requested to correct other users dangerous behaviours in cleanroom It is YOUR fab and YOUR safety matters